JPH0443419B2 - - Google Patents

Info

Publication number
JPH0443419B2
JPH0443419B2 JP59019947A JP1994784A JPH0443419B2 JP H0443419 B2 JPH0443419 B2 JP H0443419B2 JP 59019947 A JP59019947 A JP 59019947A JP 1994784 A JP1994784 A JP 1994784A JP H0443419 B2 JPH0443419 B2 JP H0443419B2
Authority
JP
Japan
Prior art keywords
silicon
single crystal
substrate
support layer
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59019947A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60165737A (ja
Inventor
Hironori Inoe
Takaya Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59019947A priority Critical patent/JPS60165737A/ja
Publication of JPS60165737A publication Critical patent/JPS60165737A/ja
Publication of JPH0443419B2 publication Critical patent/JPH0443419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Element Separation (AREA)
JP59019947A 1984-02-08 1984-02-08 絶縁分離基板 Granted JPS60165737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59019947A JPS60165737A (ja) 1984-02-08 1984-02-08 絶縁分離基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59019947A JPS60165737A (ja) 1984-02-08 1984-02-08 絶縁分離基板

Publications (2)

Publication Number Publication Date
JPS60165737A JPS60165737A (ja) 1985-08-28
JPH0443419B2 true JPH0443419B2 (enExample) 1992-07-16

Family

ID=12013394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59019947A Granted JPS60165737A (ja) 1984-02-08 1984-02-08 絶縁分離基板

Country Status (1)

Country Link
JP (1) JPS60165737A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892842A (en) * 1987-10-29 1990-01-09 Tektronix, Inc. Method of treating an integrated circuit

Also Published As

Publication number Publication date
JPS60165737A (ja) 1985-08-28

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