JPH0442914Y2 - - Google Patents
Info
- Publication number
- JPH0442914Y2 JPH0442914Y2 JP12885486U JP12885486U JPH0442914Y2 JP H0442914 Y2 JPH0442914 Y2 JP H0442914Y2 JP 12885486 U JP12885486 U JP 12885486U JP 12885486 U JP12885486 U JP 12885486U JP H0442914 Y2 JPH0442914 Y2 JP H0442914Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- workpiece
- mounting table
- illuminator
- wrapping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 49
- 238000005286 illumination Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12885486U JPH0442914Y2 (enrdf_load_html_response) | 1986-08-26 | 1986-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12885486U JPH0442914Y2 (enrdf_load_html_response) | 1986-08-26 | 1986-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6336036U JPS6336036U (enrdf_load_html_response) | 1988-03-08 |
| JPH0442914Y2 true JPH0442914Y2 (enrdf_load_html_response) | 1992-10-12 |
Family
ID=31024898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12885486U Expired JPH0442914Y2 (enrdf_load_html_response) | 1986-08-26 | 1986-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442914Y2 (enrdf_load_html_response) |
-
1986
- 1986-08-26 JP JP12885486U patent/JPH0442914Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6336036U (enrdf_load_html_response) | 1988-03-08 |