JPH0442612B2 - - Google Patents
Info
- Publication number
- JPH0442612B2 JPH0442612B2 JP57062314A JP6231482A JPH0442612B2 JP H0442612 B2 JPH0442612 B2 JP H0442612B2 JP 57062314 A JP57062314 A JP 57062314A JP 6231482 A JP6231482 A JP 6231482A JP H0442612 B2 JPH0442612 B2 JP H0442612B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- pressure sensor
- constant current
- voltage
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003321 amplification Effects 0.000 claims description 21
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 21
- 230000035945 sensitivity Effects 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 230000007423 decrease Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6231482A JPS58180926A (ja) | 1982-04-16 | 1982-04-16 | 圧力センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6231482A JPS58180926A (ja) | 1982-04-16 | 1982-04-16 | 圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58180926A JPS58180926A (ja) | 1983-10-22 |
JPH0442612B2 true JPH0442612B2 (de) | 1992-07-14 |
Family
ID=13196543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6231482A Granted JPS58180926A (ja) | 1982-04-16 | 1982-04-16 | 圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58180926A (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49119675A (de) * | 1973-03-15 | 1974-11-15 |
-
1982
- 1982-04-16 JP JP6231482A patent/JPS58180926A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49119675A (de) * | 1973-03-15 | 1974-11-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS58180926A (ja) | 1983-10-22 |
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