JPH044167Y2 - - Google Patents
Info
- Publication number
- JPH044167Y2 JPH044167Y2 JP16739684U JP16739684U JPH044167Y2 JP H044167 Y2 JPH044167 Y2 JP H044167Y2 JP 16739684 U JP16739684 U JP 16739684U JP 16739684 U JP16739684 U JP 16739684U JP H044167 Y2 JPH044167 Y2 JP H044167Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- laser beam
- objective lens
- measured
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002834 transmittance Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 241001422033 Thestylus Species 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16739684U JPH044167Y2 (ko) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16739684U JPH044167Y2 (ko) | 1984-11-06 | 1984-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184509U JPS6184509U (ko) | 1986-06-04 |
| JPH044167Y2 true JPH044167Y2 (ko) | 1992-02-07 |
Family
ID=30725190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16739684U Expired JPH044167Y2 (ko) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044167Y2 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0725618Y2 (ja) * | 1988-03-29 | 1995-06-07 | アンリツ株式会社 | 変位測定装置 |
-
1984
- 1984-11-06 JP JP16739684U patent/JPH044167Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6184509U (ko) | 1986-06-04 |
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