JPH0440268Y2 - - Google Patents
Info
- Publication number
- JPH0440268Y2 JPH0440268Y2 JP10806486U JP10806486U JPH0440268Y2 JP H0440268 Y2 JPH0440268 Y2 JP H0440268Y2 JP 10806486 U JP10806486 U JP 10806486U JP 10806486 U JP10806486 U JP 10806486U JP H0440268 Y2 JPH0440268 Y2 JP H0440268Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- poly
- rods
- wafer
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 89
- 239000010453 quartz Substances 0.000 claims description 88
- 235000012431 wafers Nutrition 0.000 claims description 22
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 31
- 238000010438 heat treatment Methods 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 238000003466 welding Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10806486U JPH0440268Y2 (pm) | 1986-07-16 | 1986-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10806486U JPH0440268Y2 (pm) | 1986-07-16 | 1986-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6315042U JPS6315042U (pm) | 1988-02-01 |
| JPH0440268Y2 true JPH0440268Y2 (pm) | 1992-09-21 |
Family
ID=30984914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10806486U Expired JPH0440268Y2 (pm) | 1986-07-16 | 1986-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440268Y2 (pm) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0711470Y2 (ja) * | 1988-10-17 | 1995-03-15 | 富士通株式会社 | 半導体基板保持具 |
-
1986
- 1986-07-16 JP JP10806486U patent/JPH0440268Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6315042U (pm) | 1988-02-01 |
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