JPH0439773B2 - - Google Patents

Info

Publication number
JPH0439773B2
JPH0439773B2 JP58146320A JP14632083A JPH0439773B2 JP H0439773 B2 JPH0439773 B2 JP H0439773B2 JP 58146320 A JP58146320 A JP 58146320A JP 14632083 A JP14632083 A JP 14632083A JP H0439773 B2 JPH0439773 B2 JP H0439773B2
Authority
JP
Japan
Prior art keywords
gate
lift
layer
gate metal
concentration region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58146320A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6038883A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58146320A priority Critical patent/JPS6038883A/ja
Publication of JPS6038883A publication Critical patent/JPS6038883A/ja
Publication of JPH0439773B2 publication Critical patent/JPH0439773B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP58146320A 1983-08-12 1983-08-12 ショットキゲ−ト型ｆｅｔの製造方法 Granted JPS6038883A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58146320A JPS6038883A (ja) 1983-08-12 1983-08-12 ショットキゲ−ト型ｆｅｔの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58146320A JPS6038883A (ja) 1983-08-12 1983-08-12 ショットキゲ−ト型ｆｅｔの製造方法

Publications (2)

Publication Number Publication Date
JPS6038883A JPS6038883A (ja) 1985-02-28
JPH0439773B2 true JPH0439773B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-30

Family

ID=15404998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58146320A Granted JPS6038883A (ja) 1983-08-12 1983-08-12 ショットキゲ−ト型ｆｅｔの製造方法

Country Status (1)

Country Link
JP (1) JPS6038883A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6337701A (ja) * 1986-07-31 1988-02-18 Nippon Dengiyou Kosaku Kk 複合形帯域阻止ろ波器
WO2007072247A2 (en) * 2005-12-22 2007-06-28 Koninklijke Philips Electronics N.V. An improved lift-off technique suitable for nanometer-scale patterning of metal layers

Also Published As

Publication number Publication date
JPS6038883A (ja) 1985-02-28

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