JPH0439023B2 - - Google Patents
Info
- Publication number
- JPH0439023B2 JPH0439023B2 JP12487587A JP12487587A JPH0439023B2 JP H0439023 B2 JPH0439023 B2 JP H0439023B2 JP 12487587 A JP12487587 A JP 12487587A JP 12487587 A JP12487587 A JP 12487587A JP H0439023 B2 JPH0439023 B2 JP H0439023B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- main body
- body plate
- plate
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12487587A JPS63289433A (ja) | 1987-05-21 | 1987-05-21 | 差圧測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12487587A JPS63289433A (ja) | 1987-05-21 | 1987-05-21 | 差圧測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63289433A JPS63289433A (ja) | 1988-11-25 |
| JPH0439023B2 true JPH0439023B2 (pm) | 1992-06-26 |
Family
ID=14896257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12487587A Granted JPS63289433A (ja) | 1987-05-21 | 1987-05-21 | 差圧測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63289433A (pm) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006300570A (ja) * | 2005-04-18 | 2006-11-02 | Yokogawa Electric Corp | 差圧／圧力伝送器 |
-
1987
- 1987-05-21 JP JP12487587A patent/JPS63289433A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63289433A (ja) | 1988-11-25 |
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