JPH0438469B2 - - Google Patents

Info

Publication number
JPH0438469B2
JPH0438469B2 JP62304140A JP30414087A JPH0438469B2 JP H0438469 B2 JPH0438469 B2 JP H0438469B2 JP 62304140 A JP62304140 A JP 62304140A JP 30414087 A JP30414087 A JP 30414087A JP H0438469 B2 JPH0438469 B2 JP H0438469B2
Authority
JP
Japan
Prior art keywords
cleaning
chamber
exhaust
pipe
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62304140A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01143675A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP30414087A priority Critical patent/JPH01143675A/ja
Publication of JPH01143675A publication Critical patent/JPH01143675A/ja
Publication of JPH0438469B2 publication Critical patent/JPH0438469B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP30414087A 1987-11-30 1987-11-30 洗浄装置 Granted JPH01143675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30414087A JPH01143675A (ja) 1987-11-30 1987-11-30 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30414087A JPH01143675A (ja) 1987-11-30 1987-11-30 洗浄装置

Publications (2)

Publication Number Publication Date
JPH01143675A JPH01143675A (ja) 1989-06-06
JPH0438469B2 true JPH0438469B2 (OSRAM) 1992-06-24

Family

ID=17929524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30414087A Granted JPH01143675A (ja) 1987-11-30 1987-11-30 洗浄装置

Country Status (1)

Country Link
JP (1) JPH01143675A (OSRAM)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599228B2 (ja) * 1980-03-07 1984-03-01 トヨタ自動車株式会社 有機溶剤を用いた洗浄装置
JPS59102189U (ja) * 1982-12-23 1984-07-10 吉井産業株式会社 有機溶剤蒸気浴洗浄装置
JPS59110003U (ja) * 1983-01-17 1984-07-25 吉井産業株式会社 有機溶剤洗浄における排気ガス回収装置

Also Published As

Publication number Publication date
JPH01143675A (ja) 1989-06-06

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