JPH0438466B2 - - Google Patents
Info
- Publication number
- JPH0438466B2 JPH0438466B2 JP62185960A JP18596087A JPH0438466B2 JP H0438466 B2 JPH0438466 B2 JP H0438466B2 JP 62185960 A JP62185960 A JP 62185960A JP 18596087 A JP18596087 A JP 18596087A JP H0438466 B2 JPH0438466 B2 JP H0438466B2
- Authority
- JP
- Japan
- Prior art keywords
- fluorocarbon
- tank
- vapor
- liquefaction
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 88
- 238000004140 cleaning Methods 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 30
- 238000001816 cooling Methods 0.000 claims description 22
- 239000002904 solvent Substances 0.000 claims description 16
- 230000003134 recirculating effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000005484 gravity Effects 0.000 description 5
- 239000003507 refrigerant Substances 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000010992 reflux Methods 0.000 description 4
- 238000003915 air pollution Methods 0.000 description 3
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Coating Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18596087A JPS6430685A (en) | 1987-07-24 | 1987-07-24 | Fleon washer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18596087A JPS6430685A (en) | 1987-07-24 | 1987-07-24 | Fleon washer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430685A JPS6430685A (en) | 1989-02-01 |
| JPH0438466B2 true JPH0438466B2 (ko) | 1992-06-24 |
Family
ID=16179889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18596087A Granted JPS6430685A (en) | 1987-07-24 | 1987-07-24 | Fleon washer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430685A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022208975A1 (de) | 2021-09-03 | 2023-03-09 | Okuma Corporation | Genauigkeitsanalysesystem für eine Werkzeugmaschine |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2833893B2 (ja) * | 1991-11-20 | 1998-12-09 | 山口日本電気株式会社 | 洗浄装置 |
| CN103084352B (zh) * | 2012-12-10 | 2015-09-30 | 周庆芬 | 一种清洗装置 |
| JP6979244B1 (ja) * | 2021-05-21 | 2021-12-08 | ジャパン・フィールド株式会社 | 洗浄装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63184336A (ja) * | 1987-01-26 | 1988-07-29 | Nec Corp | 洗浄装置 |
-
1987
- 1987-07-24 JP JP18596087A patent/JPS6430685A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63184336A (ja) * | 1987-01-26 | 1988-07-29 | Nec Corp | 洗浄装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022208975A1 (de) | 2021-09-03 | 2023-03-09 | Okuma Corporation | Genauigkeitsanalysesystem für eine Werkzeugmaschine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6430685A (en) | 1989-02-01 |
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