JPH0438182Y2 - - Google Patents
Info
- Publication number
- JPH0438182Y2 JPH0438182Y2 JP11766387U JP11766387U JPH0438182Y2 JP H0438182 Y2 JPH0438182 Y2 JP H0438182Y2 JP 11766387 U JP11766387 U JP 11766387U JP 11766387 U JP11766387 U JP 11766387U JP H0438182 Y2 JPH0438182 Y2 JP H0438182Y2
- Authority
- JP
- Japan
- Prior art keywords
- door
- clean room
- airtight
- container
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003566 sealing material Substances 0.000 claims description 22
- 230000008878 coupling Effects 0.000 claims description 16
- 238000010168 coupling process Methods 0.000 claims description 16
- 238000005859 coupling reaction Methods 0.000 claims description 16
- 239000000428 dust Substances 0.000 description 10
- 241000894006 Bacteria Species 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000011109 contamination Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11766387U JPH0438182Y2 (enrdf_load_stackoverflow) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11766387U JPH0438182Y2 (enrdf_load_stackoverflow) | 1987-07-31 | 1987-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422936U JPS6422936U (enrdf_load_stackoverflow) | 1989-02-07 |
| JPH0438182Y2 true JPH0438182Y2 (enrdf_load_stackoverflow) | 1992-09-08 |
Family
ID=31361317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11766387U Expired JPH0438182Y2 (enrdf_load_stackoverflow) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438182Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-07-31 JP JP11766387U patent/JPH0438182Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6422936U (enrdf_load_stackoverflow) | 1989-02-07 |
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