JPH0438152B2 - - Google Patents
Info
- Publication number
- JPH0438152B2 JPH0438152B2 JP60024075A JP2407585A JPH0438152B2 JP H0438152 B2 JPH0438152 B2 JP H0438152B2 JP 60024075 A JP60024075 A JP 60024075A JP 2407585 A JP2407585 A JP 2407585A JP H0438152 B2 JPH0438152 B2 JP H0438152B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- vertical
- piezoelectric
- beams
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60024075A JPS61183981A (ja) | 1985-02-08 | 1985-02-08 | 圧電体変位装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60024075A JPS61183981A (ja) | 1985-02-08 | 1985-02-08 | 圧電体変位装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61183981A JPS61183981A (ja) | 1986-08-16 |
| JPH0438152B2 true JPH0438152B2 (index.php) | 1992-06-23 |
Family
ID=12128300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60024075A Granted JPS61183981A (ja) | 1985-02-08 | 1985-02-08 | 圧電体変位装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183981A (index.php) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001026167A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| JP3845544B2 (ja) * | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
| JP3845543B2 (ja) | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
| WO2001026168A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device |
-
1985
- 1985-02-08 JP JP60024075A patent/JPS61183981A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61183981A (ja) | 1986-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100809712B1 (ko) | 압전 액튜에이터 | |
| JP4245096B2 (ja) | 積層圧電素子およびこれを用いた圧電アクチュエータ、超音波モータ | |
| CN100385700C (zh) | 弧形的电激活致动器 | |
| JP4447250B2 (ja) | 圧電アクチュエータアレイ及び製造方法 | |
| US5517074A (en) | Piezoelectric actuator device | |
| JP2005507323A5 (index.php) | ||
| JPS61150287A (ja) | 圧電体変位装置 | |
| JPH0438152B2 (index.php) | ||
| JPS6132836B2 (index.php) | ||
| JPH04167580A (ja) | 積層圧電アクチュエータ素子 | |
| JP2585322B2 (ja) | 圧電アクチュエータ | |
| US8299683B2 (en) | Ultrasonic motor | |
| JPS61148886A (ja) | 圧電体変位装置 | |
| JPH0334383A (ja) | 積層セラミックス圧電アクチュエータ | |
| JPH0739252Y2 (ja) | 圧電アクチュエータ | |
| US20050145606A1 (en) | Low cost actuator with 2 dimensional motion | |
| JP3360384B2 (ja) | 積層型アクチュエータ | |
| JPH0436231Y2 (index.php) | ||
| JPH0453008Y2 (index.php) | ||
| JPS63296286A (ja) | 積層形圧電アクチュエ−タ素子 | |
| JPH05304324A (ja) | 圧電式アクチュエータ | |
| JPH0453009Y2 (index.php) | ||
| JP2533861B2 (ja) | 圧電アクチユエ−タ | |
| JPH01238759A (ja) | 6自由度精密微動台 | |
| JPH0964431A (ja) | バイモルフ型アクチュエータ |