JPH0437737Y2 - - Google Patents
Info
- Publication number
- JPH0437737Y2 JPH0437737Y2 JP1986197217U JP19721786U JPH0437737Y2 JP H0437737 Y2 JPH0437737 Y2 JP H0437737Y2 JP 1986197217 U JP1986197217 U JP 1986197217U JP 19721786 U JP19721786 U JP 19721786U JP H0437737 Y2 JPH0437737 Y2 JP H0437737Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- vacuum
- robot
- transported
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986197217U JPH0437737Y2 (enExample) | 1986-12-22 | 1986-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986197217U JPH0437737Y2 (enExample) | 1986-12-22 | 1986-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100179U JPS63100179U (enExample) | 1988-06-29 |
| JPH0437737Y2 true JPH0437737Y2 (enExample) | 1992-09-04 |
Family
ID=31156740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986197217U Expired JPH0437737Y2 (enExample) | 1986-12-22 | 1986-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437737Y2 (enExample) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136862U (enExample) * | 1974-04-26 | 1975-11-11 | ||
| JPS5672691U (enExample) * | 1979-11-09 | 1981-06-15 |
-
1986
- 1986-12-22 JP JP1986197217U patent/JPH0437737Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63100179U (enExample) | 1988-06-29 |
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