JPH0437666Y2 - - Google Patents
Info
- Publication number
- JPH0437666Y2 JPH0437666Y2 JP11592287U JP11592287U JPH0437666Y2 JP H0437666 Y2 JPH0437666 Y2 JP H0437666Y2 JP 11592287 U JP11592287 U JP 11592287U JP 11592287 U JP11592287 U JP 11592287U JP H0437666 Y2 JPH0437666 Y2 JP H0437666Y2
- Authority
- JP
- Japan
- Prior art keywords
- brush
- workpiece
- hole
- cylindrical body
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 4
- 230000001680 brushing effect Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11592287U JPH0437666Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-30 | 1987-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11592287U JPH0437666Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-30 | 1987-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421787U JPS6421787U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-03 |
| JPH0437666Y2 true JPH0437666Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-09-03 |
Family
ID=31358007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11592287U Expired JPH0437666Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-30 | 1987-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437666Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7045020B2 (en) * | 2003-05-22 | 2006-05-16 | Applied Materials, Inc. | Cleaning a component of a process chamber |
-
1987
- 1987-07-30 JP JP11592287U patent/JPH0437666Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6421787U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-03 |