JPH04367260A - Multi-chip semiconductor device - Google Patents

Multi-chip semiconductor device

Info

Publication number
JPH04367260A
JPH04367260A JP3143000A JP14300091A JPH04367260A JP H04367260 A JPH04367260 A JP H04367260A JP 3143000 A JP3143000 A JP 3143000A JP 14300091 A JP14300091 A JP 14300091A JP H04367260 A JPH04367260 A JP H04367260A
Authority
JP
Japan
Prior art keywords
chip
semiconductor device
film carrier
assembly frame
chip semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3143000A
Other languages
Japanese (ja)
Inventor
Toshiharu Ishida
石田 寿治
Masaru Sakaguchi
勝 坂口
Koji Serizawa
弘二 芹沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3143000A priority Critical patent/JPH04367260A/en
Publication of JPH04367260A publication Critical patent/JPH04367260A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Dram (AREA)

Abstract

PURPOSE:To provide a structure and IC chip for a multi-chip semiconductor device which can prevent the malfunction of the device caused by the heat produced when the device is operated and can also prevent the performance deterioration of the IC chip itself. CONSTITUTION:This multi-chip semiconductor device is assembled by using an IC chip 1 for a multi-chip semiconductor device with a heat radiating bump on the surface and multi-chip semiconductor device assembling frame 4 provided with heat radiating patterns 5 and 5'.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は半導体装置に係り、特に
、フィルムキャリアTCP(Tape Carrier
Package)を用いた、大容量マルチチップ半導体
装置組立用枠とマルチチップの冷却方法に関連して、半
導体素子(ICチップ)に関する。
FIELD OF INDUSTRIAL APPLICATION The present invention relates to semiconductor devices, and particularly to film carrier TCP (Tape Carrier).
The present invention relates to a large-capacity multi-chip semiconductor device assembly frame and a multi-chip cooling method using a semiconductor device (IC chip).

【0002】0002

【従来の技術】半導体メモリは、大形コンピュータ、ワ
ークステ−ション、パーソナルコンピュータ、ワードプ
ロセッサ等の情報機器に多量に使用されている。今後こ
れらの機器の高性能化、製品拡大がさらに進むことから
、ここに使われている半導体メモリの需要も加速的に増
大していくものと予想される。これに対し、大容量のメ
モリを必要とする装置では、機器内での半導体メモリが
占める実装面積は増大する方向にあり、これが機器の小
形、軽量化を阻害する最大の要因となつている。この問
題の解決法として、その一つは従来から強力に押し進め
られているICチップ内素子の高集積化による一チップ
当りのメモリ容量増大である。また、他の一つはパッケ
ージングされたメモリモジュールをプリント配線板に高
密度実装する方法であり、さらに、他の一つは、特開昭
59−194460号及び、特開昭61−185958
号公報に述べられているように複数個のICチップを厚
さ方向に積み重ねて高密度化を図るものである。
2. Description of the Related Art Semiconductor memories are widely used in information equipment such as large computers, workstations, personal computers, and word processors. As the performance of these devices continues to improve and the number of products continues to expand, demand for the semiconductor memory used in these devices is expected to increase at an accelerated pace. On the other hand, in devices that require large-capacity memory, the mounting area occupied by the semiconductor memory within the device tends to increase, and this is the biggest factor preventing devices from becoming smaller and lighter. One way to solve this problem is to increase the memory capacity per chip by increasing the integration of elements within IC chips, which has been strongly promoted in the past. Another method is to mount packaged memory modules on a printed wiring board at high density.
As described in the publication, a plurality of IC chips are stacked in the thickness direction to achieve high density.

【0003】これらのうち、ICチップ内素子の高集積
化は従来技術の延長では解決出来ない新しい局面に来て
おり、新技術、生産設備の開発が必要である。プリント
板への高密度実装方法は高密度小形モジュール両面実装
用ZIP(Zigzag−in−line Packa
ge)部品の採用等が行われており、一個のチップを1
パッケージングとしたモジュールを使う範囲ではこれ以
上の大幅な高密度化は難しい状況にある。これに対し、
複数個のICチップを厚さ方向に三次元的に積み重ねる
方法が非常に有利であり、種々提案されている.従来の
方法では、例えば、高速論理回路素子、あるいは、高電
力消費メモリを積層して、複数個のICチップを同時に
動作させた場合、特開昭62−261166号、実開昭
63−36052号公報に述べられているように、発熱
量の多いICチップを冷却する点について考慮がなされ
ておらず、動作時の発熱によりマルチチップ半導体装置
全体が昇温し、誤動作を起こしたり半導体素子自体の性
能劣化を招く問題があった。
Among these, high integration of elements within IC chips has reached a new situation that cannot be solved by extending conventional technology, and requires the development of new technology and production equipment. A high-density mounting method on a printed circuit board is ZIP (Zigzag-in-line Packa) for double-sided mounting of high-density small modules.
ge) Parts are being adopted, and one chip is one
As far as packaging modules are used, it is difficult to significantly increase the density any further. On the other hand,
A method of three-dimensionally stacking a plurality of IC chips in the thickness direction is very advantageous, and various methods have been proposed. In the conventional method, for example, when multiple IC chips are operated simultaneously by stacking high-speed logic circuit elements or high power consumption memories, Japanese Patent Application Laid-Open No. 62-261166 and Utility Model Application No. 63-36052 As stated in the publication, no consideration has been given to cooling IC chips that generate a large amount of heat, and the heat generated during operation increases the temperature of the entire multichip semiconductor device, causing malfunctions and damaging the semiconductor elements themselves. There was a problem that caused performance deterioration.

【0004】0004

【発明が解決しようとする課題】本発明の目的は、上記
従来技術の不具合点を除去したマルチチップ半導体装置
の構造及びマルチチップ半導体装置用のICチップの構
造を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a structure of a multi-chip semiconductor device and an IC chip for the multi-chip semiconductor device, which eliminates the disadvantages of the prior art described above.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に、本発明はマルチチップ半導体装置用枠のそれぞれ対
向する一方の辺に、放熱用パターンを設け、表面にメタ
ライズ処理を行い、これにICチップの発熱を取り出す
目的のリードを接続させ、そして、それらを積層して各
層を熱伝導的に導通を取り、最上層枠及び最下層枠放熱
用パターンからマザーボード(モジュール基板)に伝導
させるようにした。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a heat dissipation pattern on each opposing side of a frame for a multi-chip semiconductor device, performs a metallization process on the surface, and Connect the leads for the purpose of extracting heat from the IC chip, and then stack them to establish thermal conductivity between each layer so that the heat is conducted from the top layer frame and bottom layer heat dissipation pattern to the motherboard (module board). I made it.

【0006】[0006]

【作用】すなわち、フィルムキャリアテープにICチッ
プを電気的に接続したフィルムキャリアテープ半導体装
置TCPを、組立用枠を介して、二個以上積み重ねてな
るマルチチップ半導体装置において、ICチップとして
、チップ表面に放熱専用リードをボンディングするため
のバンプを設けたものを用いると共に、組立用枠の一対
の辺に放熱用パターンを設け、ICチップで発熱した熱
を放熱の目的のため設けられたバンプ、放熱専用リード
、放熱用パターンの経路で取り出すようにした。これに
より、動作時の発熱によるマルチチップ半導体装置全体
の昇温を防ぐことが出来るので、装置の誤動作を起こさ
ず、ICチップ自体の性能劣化を防ぎ安定した動作性能
を得ることができる。
[Operation] That is, in a multi-chip semiconductor device formed by stacking two or more film carrier tape semiconductor devices TCP in which an IC chip is electrically connected to a film carrier tape via an assembly frame, the chip surface is used as an IC chip. In addition to using bumps for bonding leads dedicated to heat dissipation, a heat dissipation pattern is provided on a pair of sides of the assembly frame, and the bumps and heat dissipation patterns provided for the purpose of dissipating the heat generated by the IC chip are used. It is now possible to take it out using a dedicated lead and heat dissipation pattern. This can prevent the temperature of the entire multi-chip semiconductor device from rising due to heat generated during operation, so that malfunction of the device can be prevented, performance deterioration of the IC chip itself can be prevented, and stable operational performance can be obtained.

【0007】[0007]

【実施例】以下、本発明の一実施例を図1,ないし図7
により説明する。
[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 to 7.
This is explained by:

【0008】図1は、本発明による一実施例のマルチチ
ップ半導体装置の正面図である。図2は、一実施例のマ
ルチチップ半導体装置を配線基板上に搭載した状態で、
図1のマルチチップをIIーII線で切断した断面図で
ある。図3は図2と同じ様にIII−III線で切断し
た断面図である。図4は、本発明の一実施例で用いたマ
ルチチップ半導体装置用組立枠の平面図である。図5は
本発明の一実施例で用いたマルチチップ半導体装置用I
Cチップの表面であリ、電極パッド配置を示す平面図で
ある。図6は、本発明の一実施例で用いたフィルムキャ
リアテープの平面図である。図7は、従来技術によるマ
ルチチップ半導体装置の平面図である。
FIG. 1 is a front view of a multi-chip semiconductor device according to an embodiment of the present invention. FIG. 2 shows a state in which a multi-chip semiconductor device according to an embodiment is mounted on a wiring board.
FIG. 2 is a cross-sectional view of the multi-chip in FIG. 1 taken along line II-II. FIG. 3 is a sectional view taken along the line III--III in the same way as FIG. 2. FIG. 4 is a plan view of an assembly frame for a multi-chip semiconductor device used in an embodiment of the present invention. FIG. 5 shows an I for a multi-chip semiconductor device used in an embodiment of the present invention.
FIG. 3 is a plan view showing the arrangement of electrode pads on the surface of the C chip. FIG. 6 is a plan view of a film carrier tape used in one embodiment of the present invention. FIG. 7 is a plan view of a multi-chip semiconductor device according to the prior art.

【0009】図1において、マルチチップ半導体装置1
00は図6に示すポリイミド製フィィルム8にスプロケ
ット9,デバイスホ−ル13,信号入出力および電源印
加用リード11,11’と放熱用リード12,12’を
それぞれ設け、デバイスホ−ル13に、図5に示すIC
チップ1を載せ、チップ表面に信号入出力および電源印
加用,そしてICチップ内の能動素子とは断絶され、放
熱専用としてそれぞれ設けられたバンプ2,2’および
3,3’にリード11,11’,12,12’をボンデ
ィング接続し、TCP化したものを、図6に示すアウタ
リード部に当たるアウタリード用ホール10,10’部
分のリードと、図4のガラスエポキシ製のマルチチップ
半導体装置用組立枠の配線用電極パターン6,6’およ
び放熱専用パターン5,5’で接続し、それを複数個積
層したものである。
In FIG. 1, a multi-chip semiconductor device 1
00 is a polyimide film 8 shown in FIG. 6, provided with a sprocket 9, a device hole 13, leads 11, 11' for signal input/output and power supply, and leads 12, 12' for heat dissipation, respectively. IC shown in 5
A chip 1 is mounted, and leads 11, 11 are connected to bumps 2, 2' and 3, 3' provided on the chip surface for signal input/output and power supply, and for heat dissipation only, separated from active elements in the IC chip. ', 12, 12' are connected by bonding and made into TCP, and the leads of the outer lead holes 10, 10' corresponding to the outer lead part shown in FIG. 6 and the glass epoxy multi-chip semiconductor device assembly frame shown in FIG. A plurality of wiring electrode patterns 6, 6' and heat dissipation patterns 5, 5' are connected, and a plurality of them are stacked.

【0010】マルチチップ半導体装置100の断面構造
は図2,図3に示すように、組立用枠4の配線用電極パ
ターン6,6’の一部分に設けられたスルーホール7,
7’および放熱専用パターン5,5’を介して四段層接
続されている。層間接続は、ここでは、メタライズの関
係で、はんだ−はんだ接続の一般的なリフロ−で行なっ
た。
As shown in FIGS. 2 and 3, the cross-sectional structure of the multi-chip semiconductor device 100 includes through holes 7, which are provided in a portion of the wiring electrode patterns 6, 6' of the assembly frame 4.
7' and heat dissipation exclusive patterns 5, 5'. Interlayer connection here was performed by general reflow solder-solder connection due to metallization.

【0011】マルチチップ半導体装置100内の個々の
ICチップ1は動作時多量の熱を生じる。この熱はIC
チップ1内を伝導し、リード11→スル−ホ−ル7→モ
ジュール基板の配線パターン14→モジュール基板15
への放熱経路、あるいは、リード12→放熱専用パター
ン5→モジュール基板の配線パターン14→モジュ−ル
基板15への放熱経路、ICチップ1の表面から空気中
への放熱経路がある。その際、リード11→スルーホー
ル7→モジュール基板の配線パターン14→モジュール
基板15の経路では、約10℃〜20℃の放熱効果があ
る。
[0011] Each IC chip 1 in the multi-chip semiconductor device 100 generates a large amount of heat during operation. This heat is IC
Conducting inside the chip 1, lead 11→through hole 7→wiring pattern 14 of module board→module board 15
There is a heat radiation path from the lead 12 to the heat radiation pattern 5 to the module board wiring pattern 14 to the module board 15, or a heat radiation path from the surface of the IC chip 1 to the air. At this time, there is a heat dissipation effect of approximately 10° C. to 20° C. in the path from lead 11 → through hole 7 → wiring pattern 14 of module board → module board 15.

【0012】リード12→放熱専用パターン5→モジュ
ール基板の配線パターン14→モジュール基板1の経路
では、入出力リード11、11’と違い、隣接リードの
短絡の問題を考えなくて良いため、組立枠側面の放熱専
用パターン5、5’を共有出来ることとICチップ表面
のバンプ(3、3’)形状(面積)を大きくすることが
可能で放熱専用リード12、12’を広くすることが出
来、放熱効果は更に高まり、約30℃以上が見込まれる
Unlike the input/output leads 11 and 11', there is no need to consider the problem of short circuits between adjacent leads in the path of lead 12 → heat dissipation pattern 5 → module board wiring pattern 14 → module board 1. It is possible to share the patterns 5, 5' dedicated to heat radiation on the sides, and it is possible to increase the shape (area) of the bumps (3, 3') on the surface of the IC chip, making it possible to widen the leads 12, 12' dedicated to heat radiation. The heat dissipation effect will further increase, and it is expected that the temperature will reach approximately 30°C or higher.

【0013】これにより、動作時のICチップ1からの
発熱が積極的に冷却され、マルチチップ半導体装置の昇
温を約80℃以下に抑えることが出来、安全した動作性
能が得られ、高密度のマルチチップ半導体装置100が
実現出来る。
[0013] As a result, the heat generated from the IC chip 1 during operation is actively cooled down, and the temperature rise of the multi-chip semiconductor device can be suppressed to about 80°C or less, resulting in safe operation performance and high-density A multi-chip semiconductor device 100 can be realized.

【0014】[0014]

【発明の効果】本発明によれば、動作時にICチップか
ら発生する熱を、各段の放熱専用リード、放熱用パター
ンを経由して、効率良く、マザーボードに放熱ができ、
動作温度を約80℃以下に抑えることができるので、マ
ルチチップ半導体装置の昇温を防ぎ、装置の誤動作を招
くことなく、安定した動作性能を得る効果がある。また
、加熱状態におけるICチップの急速な性能の劣化を防
ぎ長時間にわたり動作性能を確保できる。
[Effects of the Invention] According to the present invention, heat generated from an IC chip during operation can be efficiently radiated to the motherboard via the dedicated heat radiation leads and heat radiation patterns at each stage.
Since the operating temperature can be suppressed to about 80° C. or less, it is possible to prevent the temperature of the multi-chip semiconductor device from rising and to obtain stable operating performance without causing malfunction of the device. Further, rapid performance deterioration of the IC chip in a heated state can be prevented, and operational performance can be ensured for a long period of time.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の一実施例のマルチチップ半導体装置の
正面図、
FIG. 1 is a front view of a multi-chip semiconductor device according to an embodiment of the present invention;

【図2】図1のIIーII矢視断面図、[Fig. 2] Cross-sectional view taken along the line II-II in Fig. 1;

【図3】図1の
IIIーIII矢視断面図、
[Fig. 3] Cross-sectional view taken along arrow III-III in Fig. 1;

【図4】本発明の実施例の
マルチチップ半導体装置用組立枠の平面図、
FIG. 4 is a plan view of an assembly frame for a multi-chip semiconductor device according to an embodiment of the present invention;

【図5】本発明の実施例のフイルムキャリア半導体装置
用ICチップの平面図、
FIG. 5 is a plan view of an IC chip for a film carrier semiconductor device according to an embodiment of the present invention;

【図6】実施例のフイルムキャリア半導体装置用フイル
ムキャリアテ−プの平面図、
FIG. 6 is a plan view of a film carrier tape for a film carrier semiconductor device according to an example;

【図7】従来例のマルチチップ半導体装置の平面図であ
る。
FIG. 7 is a plan view of a conventional multi-chip semiconductor device.

【符号の説明】[Explanation of symbols]

100:マルチチップ半導体装置、 1:ICチップ、 2:金属バンプ、 3:金属バンプ、 4:ガラスエポキシ製組立枠、 5:放熱専用パターン、 6:電極用パターン、 7:スルーホール、 8:フイルムキャリアテープ、 9:スプロケット、 10:アウタリード用ホール、 11、:信号入出力用リード、 100: Multi-chip semiconductor device, 1: IC chip, 2: Metal bump, 3: Metal bump, 4: Glass epoxy assembly frame, 5: Heat radiation only pattern, 6: Electrode pattern, 7: Through hole, 8: Film carrier tape, 9: Sprocket, 10: Outer lead hole, 11.: Signal input/output lead,

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】フイルムキャリアテープに半導体チップを
電気的に接続したフイルムキャリア半導体装置を組立用
枠を介して、積み重ねたマルチチップ半導体装置におい
て、前記組立用枠のそれぞれ向き合う一対の一方の辺に
、外側側壁で表裏面が導通が取れている金属製放熱用パ
ターンを設けたことを特徴とする組立用枠。
1. A multi-chip semiconductor device in which film carrier semiconductor devices each having a semiconductor chip electrically connected to a film carrier tape are stacked together via an assembly frame, wherein one side of a pair of opposing sides of the assembly frame is provided. An assembly frame characterized by having a metal heat dissipation pattern with conductivity on the front and back surfaces on the outer side wall.
【請求項2】放熱用パターンが設けられた一対の辺に対
向する半導体素子表面の外周部分に能動素子と断絶した
左右対称になるように配列された放熱専用の電極金属バ
ンプを設けたことを特徴とするフイルムキャリア半導体
装置用半導体素子。
Claim 2: Electrode metal bumps dedicated to heat radiation are provided on the outer periphery of the surface of the semiconductor element facing the pair of sides provided with the heat radiation pattern, separated from the active element and arranged symmetrically. A semiconductor element for a film carrier semiconductor device characterized by:
【請求項3】請求項2において、前記フイルムキャリア
半導体装置用半導体素子とフィルムキャリアテープとを
用いて組立られたTCPとマルチチップ半導体装置用組
立枠を用いて、積み重ねて積層して組立てるマルチチッ
プ半導体装置。
3. The multi-chip according to claim 2, which is assembled by stacking and stacking the TCP assembled using the semiconductor element for the film carrier semiconductor device and the film carrier tape and the assembly frame for the multi-chip semiconductor device. Semiconductor equipment.
JP3143000A 1991-06-14 1991-06-14 Multi-chip semiconductor device Pending JPH04367260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3143000A JPH04367260A (en) 1991-06-14 1991-06-14 Multi-chip semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3143000A JPH04367260A (en) 1991-06-14 1991-06-14 Multi-chip semiconductor device

Publications (1)

Publication Number Publication Date
JPH04367260A true JPH04367260A (en) 1992-12-18

Family

ID=15328615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3143000A Pending JPH04367260A (en) 1991-06-14 1991-06-14 Multi-chip semiconductor device

Country Status (1)

Country Link
JP (1) JPH04367260A (en)

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