JPH04365877A - Catalyst liquid for copper base material-selecting electroless plating - Google Patents

Catalyst liquid for copper base material-selecting electroless plating

Info

Publication number
JPH04365877A
JPH04365877A JP14168891A JP14168891A JPH04365877A JP H04365877 A JPH04365877 A JP H04365877A JP 14168891 A JP14168891 A JP 14168891A JP 14168891 A JP14168891 A JP 14168891A JP H04365877 A JPH04365877 A JP H04365877A
Authority
JP
Japan
Prior art keywords
co2m
same
general formula
ch2co2m
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14168891A
Other languages
Japanese (ja)
Other versions
JP2649750B2 (en
Inventor
Masaki Haga
芳賀 正記
Mamoru Uchida
衛 内田
Takashi Okada
隆 岡田
Hiroko Uchida
内田 宏子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishihara Chemical Co Ltd
Original Assignee
Ishihara Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishihara Chemical Co Ltd filed Critical Ishihara Chemical Co Ltd
Priority to JP3141688A priority Critical patent/JP2649750B2/en
Publication of JPH04365877A publication Critical patent/JPH04365877A/en
Application granted granted Critical
Publication of JP2649750B2 publication Critical patent/JP2649750B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To selectively form a good plating film only on a copper conductive part by using a catalytic liquid comprising a combination of paradium compd. and specified chelating agent. CONSTITUTION:The catalytic liquid is prepared by mixing a paradium compd. dissolved in hydrochloric acid or sulfuric acid with aq. soln. of chelating agent. To control pH, acid such as hydrochloric acid or an alkali compd. such as NaOH is used. As necessary, a surfactant thiourea of pH buffer can be used individually or by mixing thereof. The treatment with this catalytic liquid is performed as usual, by dipping the material in the liquid at about 10-90 deg.C for 10sec. to 10min.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、銅系素材選択型無電解
めっき用触媒液に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a catalyst solution for selective electroless plating of copper-based materials.

【0002】0002

【従来の技術及びその課題】次亜リン酸化合物を還元剤
とするNi、Pd、Pd−Ni等の無電解めっきを、銅
系素材上に施す場合には、通常めっき皮膜の還元折出用
の触媒として、Pd化合物を素材上に付与した後、無電
解めっきが行なわれる。かかる場合の触媒付与方法とし
ては、SnCl2溶液とPdCl2溶液による2段処理
、PdCl2/SnCl2混合系の塩酸酸性水溶液によ
る処理等が行なわれている。しかしながら、これらの処
理法を、プリント基板、セラミック基板、チップ部品等
の絶縁体と導体とが一体となったものに対して適用する
場合には、絶縁部分及び導体部分の全てが触媒活性化さ
れて、無電解めっき工程で全面にめっきが行なわれ、導
体部分にのみめっき皮膜を形成することができない。ま
た、PdCl2の塩酸酸性水溶液を用いて銅系素材を触
媒活性化する方法も知られているが、この場合にも絶縁
体部分に触媒成分が一部吸着されて、めっき工程で絶縁
体部分に一部めっき皮膜が形成され、特に、導体間の間
隔が狭い場合には、導体と導体とが部分的に結合するブ
リッジ(メッキブリッジ)現象が生じるという問題点が
ある。
[Prior art and its problems] When electroless plating of Ni, Pd, Pd-Ni, etc. using a hypophosphorous acid compound as a reducing agent is applied to a copper-based material, it is usually used for reduction and deposition of the plating film. After applying a Pd compound onto the material as a catalyst, electroless plating is performed. In such a case, catalyst application methods include two-stage treatment using a SnCl2 solution and a PdCl2 solution, and treatment using a hydrochloric acid acidic aqueous solution of a PdCl2/SnCl2 mixed system. However, when these treatment methods are applied to an integrated insulator and conductor such as a printed circuit board, ceramic substrate, or chip component, all of the insulating and conductor parts are catalytically activated. Therefore, plating is performed on the entire surface in an electroless plating process, and it is not possible to form a plating film only on the conductor portion. There is also a known method of catalytically activating a copper-based material using an acidic solution of PdCl2 in hydrochloric acid, but in this case too, a portion of the catalyst component is adsorbed onto the insulator, resulting in the insulator being deposited during the plating process. Particularly when a plating film is formed and the spacing between the conductors is narrow, there is a problem in that a bridging phenomenon (plating bridge) occurs in which the conductors are partially coupled.

【0003】この対策として、pHを上げて触媒活性を
弱める工夫がなされているが、pHを5程度に上げても
メッキブリッジを解消することはできず、一方pHが6
以上となるとコロイド状の沈殿が生じるために、実際上
の取り扱いが困難である。
[0003] As a countermeasure to this problem, attempts have been made to increase the pH to weaken the catalytic activity, but even if the pH is raised to about 5, the plating bridge cannot be eliminated;
If this is the case, a colloidal precipitate will form, making it difficult to handle in practice.

【0004】また、PdCl2の濃度を減少させて、触
媒活性力を弱める工夫もなされているが、この場合、メ
ッキブリッジはなくなるが、反対に触媒活性が弱くなり
すぎて、一部めっきがつかない現象(スキップ現象)を
引きおこすという問題点がある。
[0004] In addition, efforts have been made to reduce the concentration of PdCl2 to weaken the catalytic activity, but in this case, the plating bridge disappears, but on the other hand, the catalytic activity becomes too weak and some plating does not adhere. There is a problem in that it causes a phenomenon (skip phenomenon).

【0005】[0005]

【課題を解決するための手段】本発明者は、上記した従
来技術の現状に鑑みて、銅系素材のみを選択的に活性化
でき、かつスキップ現象、ブリッジ現象等を生じること
のない無電解めっき用の触媒を見出すべく鋭意研究を重
ねてきた。その結果、パラジウム化合物と特定のキレー
ト化剤とを組み合わせて配合した触媒液によって、上記
目的が達成されることを見出した。
[Means for Solving the Problems] In view of the current state of the prior art as described above, the present inventor has proposed an electroless method that can selectively activate only copper-based materials and does not cause skip or bridge phenomena. We have been conducting extensive research to find a catalyst for plating. As a result, they found that the above object could be achieved by a catalyst liquid containing a combination of a palladium compound and a specific chelating agent.

【0006】即ち、本発明は、 (I)パラジウム化合物0.0001〜0.5モル/l
、並びに (II)(a)一般式
That is, the present invention provides (I) a palladium compound of 0.0001 to 0.5 mol/l;
, and (II) (a) general formula

【0007】[0007]

【化8】[Chemical formula 8]

【0008】(式中、X1、X2及びX3は各々同一又
は異なって、−CH2CO2M、−CH2PO3MM、
−CH(CH3)CO2M又は−CH2CH2CO2M
を示し、X4は−CH2CO2M、−CH2PO3MM
、−CH2CH2OH、−CH(CH3)CO2M又は
−CH2CH2CO2Mを示し、X5はH、−CH2C
O2M、−CH2PO3MM、−CH(CH3)CO2
M又は−CH2CH2CO2Mを示す。上記において、
Mは、同一又は異なって、各々H、K、Na又はNH4
を示し、nは0〜2の整数を示す)で表わされる化合物
、 (b)一般式
(wherein, X1, X2 and X3 are each the same or different, -CH2CO2M, -CH2PO3MM,
-CH(CH3)CO2M or -CH2CH2CO2M
and X4 is -CH2CO2M, -CH2PO3MM
, -CH2CH2OH, -CH(CH3)CO2M or -CH2CH2CO2M, X5 is H, -CH2C
O2M, -CH2PO3MM, -CH(CH3)CO2
M or -CH2CH2CO2M. In the above,
M is the same or different and each is H, K, Na or NH4
and n is an integer of 0 to 2), (b) General formula

【0009】[0009]

【化9】[Chemical formula 9]

【0010】(式中、X6及びX7は、同一又は異なっ
て、各々H、C1−5アルキル、アラルキル、アラルケ
ニル、アリール、−CH2CO2M、−CH(CH3)
CO2M、−CH2CH2CO2M、−CH2PO3M
M又は−CH2CH2OHを示し、X8は、H、C1−
5アルキル、アラルキル、アリール、−CH2CO2M
、−CH(CH3)CO2M、−CH2CH2CO2M
、−CH2PO3MM、−CH2CH2OH、−(CH
2)p−NH2又は−[(CH2)q−NH]r−Hを
示す。上記において、Mは前記に同じ、Pは0〜10の
整数、qは1〜3の整数、rは1〜10の整数を示す)
で表わされる化合物、(c)一般式
(wherein, X6 and X7 are the same or different and each represents H, C1-5 alkyl, aralkyl, aralkenyl, aryl, -CH2CO2M, -CH(CH3)
CO2M, -CH2CH2CO2M, -CH2PO3M
M or -CH2CH2OH, X8 is H, C1-
5 alkyl, aralkyl, aryl, -CH2CO2M
, -CH(CH3)CO2M, -CH2CH2CO2M
, -CH2PO3MM, -CH2CH2OH, -(CH
2) Indicates p-NH2 or -[(CH2)q-NH]r-H. In the above, M is the same as above, P is an integer of 0 to 10, q is an integer of 1 to 3, and r is an integer of 1 to 10)
A compound represented by (c) general formula

【0011】[0011]

【化10】[Chemical formula 10]

【0012】(式中、X9はH、−CH2CO2M又は
−PO3MMを示し、X10はC1−5アルキル、−C
O2M又は−CH2CO2Mを示し、X11は−CO2
M、−CH2CO2M、−PO3MM又は−CH(OH
)CO2Mを示し、X12はH又はOHを示す。上記に
おいて、Mは前記に同じ)で表わされる化合物、 (d)一般式
(wherein, X9 represents H, -CH2CO2M or -PO3MM, and X10 represents C1-5 alkyl, -C
O2M or -CH2CO2M, X11 is -CO2
M, -CH2CO2M, -PO3MM or -CH(OH
) represents CO2M, and X12 represents H or OH. In the above, M is the same as above), (d) a compound represented by the general formula

【0013】[0013]

【化11】[Chemical formula 11]

【0014】(式中、Z1、Z2、Z3及びZ4は同一
又は異なって、各々H、CH3、CONH2又は−C(
NH2)=NHを示す。上記においてMは前記に同じ、
mは1〜15の整数を示す。)で表わされる化合物、(
e)一般式
(wherein Z1, Z2, Z3 and Z4 are the same or different and each represents H, CH3, CONH2 or -C(
NH2)=NH. In the above, M is the same as above,
m represents an integer of 1 to 15. ), a compound represented by (
e) General formula

【0015】[0015]

【化12】[Chemical formula 12]

【0016】(式中、AはH、−OH、−SH、NH2
CO−、−COOM、アミノ基、−NH−C(NH2)
=NH、−ONH2、−CH(NH2)CO2H、RS
−、NH2CONH−、
(wherein A is H, -OH, -SH, NH2
CO-, -COOM, amino group, -NH-C(NH2)
=NH, -ONH2, -CH(NH2)CO2H, RS
-, NH2CONH-,

【0017】[0017]

【化13】[Chemical formula 13]

【0018】又は[0018] or

【0019】[0019]

【化14】[Chemical formula 14]

【0020】を示し、Z5、Z6及びZ7は同一又は異
なって各々H、CH3又はC2H5を示し、Z8はNH
2又はOHを示す。上記において、Mは前記に同じ、R
はC1−5アルキルを示し、lは0〜4の整数、kは0
又は1を示す。)で表わされる化合物、 (f)一般式(IV)の化合物及び/又は一般式(V)
の化合物が縮合したジペプチド又はトリペプチド化合物
、及び (g)環状窒素化合物 から選ばれた少なくとも一種のキレート化剤0.000
1〜2モル/lを含有する水溶液からなることを特徴と
する銅系素材選択型無電解めっき用触媒液に係る。
Z5, Z6 and Z7 are the same or different and each represent H, CH3 or C2H5, and Z8 is NH
2 or OH. In the above, M is the same as above, R
represents C1-5 alkyl, l is an integer from 0 to 4, and k is 0
Or indicates 1. ), (f) a compound of general formula (IV) and/or general formula (V)
(g) at least one chelating agent selected from a dipeptide or tripeptide compound condensed with a compound of (g) a cyclic nitrogen compound;
The present invention relates to a catalyst solution for selective electroless plating of copper-based materials, characterized in that it consists of an aqueous solution containing 1 to 2 mol/l.

【0021】本発明触媒液で用いるパラジウム化合物と
しては、(NH4)2[PdCl6]、(NH4)2[
PdCl4]、[PdCl2(NH3)2]、[PdI
2(NH3)2]、[Pd(NO2)2(NH3)2]
、K2[PdCl6]、K2[PdCl4]、K2[P
d(NO2)4]、Na2[PdCl4]、Na2[P
d(NO2)4]、PdBr2、PdCl2、PdI2
、Pd(NO3)2・2H2O、PdO、PdSO4、
PdS、[Pd(NH3)4]Cl2、[Pd(NH3
)4](NO3)2、Pd(C2H3O2)2、Pd(
NO3)2、[Pd(NH3)4](OH)2等を例示
できる。パラジウム化合物の添加量は、0.0001〜
0.5モル/l程度、好ましくは0.0005〜0.1
モル/l程度とすればよく、0.0001モル/lを下
回るとスキップ現象が生じ易くなり、0.5モル/lを
上回ると不経済となるので好ましくない。
Palladium compounds used in the catalyst solution of the present invention include (NH4)2[PdCl6], (NH4)2[
PdCl4], [PdCl2(NH3)2], [PdI
2(NH3)2], [Pd(NO2)2(NH3)2]
, K2[PdCl6], K2[PdCl4], K2[P
d(NO2)4], Na2[PdCl4], Na2[P
d(NO2)4], PdBr2, PdCl2, PdI2
, Pd(NO3)2・2H2O, PdO, PdSO4,
PdS, [Pd(NH3)4]Cl2, [Pd(NH3)
)4](NO3)2, Pd(C2H3O2)2, Pd(
Examples include NO3)2, [Pd(NH3)4](OH)2, and the like. The amount of palladium compound added is 0.0001~
About 0.5 mol/l, preferably 0.0005 to 0.1
The amount may be about mol/l; if it is less than 0.0001 mol/l, a skip phenomenon tends to occur, and if it exceeds 0.5 mol/l, it becomes uneconomical, which is not preferable.

【0022】本発明では、キレート化剤としては、前記
(a)〜(g)で示した化合物の少なくとも1種を用い
る。
In the present invention, at least one of the compounds shown in (a) to (g) above is used as the chelating agent.

【0023】前記(b)、(c)、(e)及び(f)に
おいて示されたアルキル基としては、好ましくは、炭素
数1〜5のもの、具体的には、メチル、エチル、プロピ
ル、イソプロピル、シクロプロピル、n−ブチル、t−
ブチル、n−ペンチル、イソアミル、ネオペンチル等を
示すことができる。前記(b)において示されたアラル
キル基又はアラルケニル基としては、ベンジル、フェネ
チル、フェニルプロピル、シンナミル、フルフリル、ナ
フチルメチル、ナフチルエチル、ピリジルメチル、ピリ
ジルエチル、キノリルメチル等を示すことができる。前
記(b)において示されたアリール基としては、フェニ
ル、トリル、メシチル、1ーナフチル、2−ナフチル、
ピリジル、キノリル、キノキサリル、アントラキノリル
、チアゾリル、フリル等を示すことができる。
The alkyl group shown in (b), (c), (e) and (f) above preferably has 1 to 5 carbon atoms, specifically methyl, ethyl, propyl, Isopropyl, cyclopropyl, n-butyl, t-
Butyl, n-pentyl, isoamyl, neopentyl, etc. can be shown. Examples of the aralkyl group or aralkenyl group shown in (b) above include benzyl, phenethyl, phenylpropyl, cinnamyl, furfuryl, naphthylmethyl, naphthylethyl, pyridylmethyl, pyridylethyl, quinolylmethyl, and the like. The aryl group shown in (b) above includes phenyl, tolyl, mesityl, 1-naphthyl, 2-naphthyl,
Pyridyl, quinolyl, quinoxalyl, anthraquinolyl, thiazolyl, furyl, etc. can be shown.

【0024】本発明で用いるキレート化剤の好ましい具
体例を以下に示す。
Preferred specific examples of the chelating agent used in the present invention are shown below.

【0025】(a)一般式(a) General formula

【0026】[0026]

【化15】[Chemical formula 15]

【0027】(式中、X1、X2、X3、X4、X5及
びnは前記に同じ)で表わされる化合物:エチレンジア
ミン四酢酸(EDTA)、エチレンジアミン四酢酸二ナ
トリウム塩(EDTA・2Na)、ヒドロキシエチルエ
チレンジアミン三酢酸(HEDTA)、ジエチレントリ
アミン五酢酸(DTPA)、トリエチレンテトラミン六
酢酸(TTHA)、エチレンジアミンテトラプロピオン
酸、エチレンジアミンテトラメチレンホスホン酸、ジエ
チレントリアミンペンタメチレンホスホン酸等。
Compounds represented by the formula (wherein X1, X2, X3, X4, X5 and n are the same as above): ethylenediaminetetraacetic acid (EDTA), ethylenediaminetetraacetic acid disodium salt (EDTA・2Na), hydroxyethylethylenediamine Triacetic acid (HEDTA), diethylenetriaminepentaacetic acid (DTPA), triethylenetetraminehexaacetic acid (TTHA), ethylenediaminetetrapropionic acid, ethylenediaminetetramethylenephosphonic acid, diethylenetriaminepentamethylenephosphonic acid, etc.

【0028】(b)一般式(b) General formula

【0029】[0029]

【化16】[Chemical formula 16]

【0030】(式中、X6、X7及びX8は上記に同じ
)で表わされる化合物:ニトリロ三酢酸(NTA)、イ
ミノジ酢酸(IDA)、イミノジプロピオン酸(IDP
)、アミノトリメチレンホスホン酸、アミノトリメチレ
ンホスホン酸五ナトリウム塩、メチルアミン、エチルア
ミン、プロピルアミン、ジメチルアミン、トリメチルア
ミン、ジメチルエチルアミン、ベンジルアミン、2−ナ
フチルアミン、イソブチルアミン、イソアミルアミン、
メチレンジアミン、エチレンジアミン、テトラメチレン
ジアミン、ペンタメチレンジアミン、ヘキサメチレンジ
アミン、ジエチレントリアミン、テトラエチレンペンタ
ミン、ペンタエチレンヘキサミン、ヘキサエチレンヘプ
タミン、シンナミルアミン、p−メトキシシンナミルア
ミン、アンモニア等。
Compounds represented by (wherein X6, X7 and X8 are the same as above): nitrilotriacetic acid (NTA), iminodiacetic acid (IDA), iminodipropionic acid (IDP)
), aminotrimethylenephosphonic acid, aminotrimethylenephosphonic acid pentasodium salt, methylamine, ethylamine, propylamine, dimethylamine, trimethylamine, dimethylethylamine, benzylamine, 2-naphthylamine, isobutylamine, isoamylamine,
Methylenediamine, ethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, diethylenetriamine, tetraethylenepentamine, pentaethylenehexamine, hexaethyleneheptamine, cinnamylamine, p-methoxycinnamylamine, ammonia, etc.

【0031】(c)一般式(c) General formula

【0032】[0032]

【化17】[Chemical formula 17]

【0033】(式中、X9、X10、X11及びX12
は前記に同じ)で表わされる化合物:1−ヒドロキシエ
チリデン−1、1−ジホスホン酸、1−ヒドロキシエチ
リデン−1、1−ジホスホン酸三ナトリウム塩、クエン
酸、酒石酸、リンゴ酸、マロン酸等。 (d)一般式
(wherein, X9, X10, X11 and X12
are the same as above): 1-hydroxyethylidene-1,1-diphosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid trisodium salt, citric acid, tartaric acid, malic acid, malonic acid, etc. (d) General formula

【0034】[0034]

【化18】[Chemical formula 18]

【0035】(式中、Z1、Z2、Z3、Z4、M及び
mは前記に同じ)で表わされる化合物:グリシン、アラ
ニン、N−メチルグリシン、グリコシアミン、ジメチル
グリシン、ヒダントイン酸、アミノ吉草酸、  β−ア
ラニン等。
Compounds represented by the formula (wherein Z1, Z2, Z3, Z4, M and m are the same as above): glycine, alanine, N-methylglycine, glycocyamine, dimethylglycine, hydantoic acid, aminovaleric acid, β -Alanine etc.

【0036】(e)一般式(e) General formula

【0037】[0037]

【化19】[Chemical formula 19]

【0038】(式中、A、Z5、Z6、Z7、M、l及
びkは前記に同じ)で表わされる化合物:バリン、ノル
バリン、ロイシン、ノルロイシン、イソロイシン、セリ
ン、システイン、アスパラギン、アスパラギン酸、グル
タミン酸、オルニチン、リジン、アルギニン、グルタミ
ン、ジアミノプロピオン酸、シトルリン、ヒドロキシ−
L−リジン、ジアミノ酪酸、アミノアジピン酸、カナリ
ン、キヌレニン、ジアミノピメリン酸、ホモシステイン
、ヒスチジン、メチオニン等。
Compounds represented by the formula (wherein A, Z5, Z6, Z7, M, l and k are the same as above): valine, norvaline, leucine, norleucine, isoleucine, serine, cysteine, asparagine, aspartic acid, glutamic acid , ornithine, lysine, arginine, glutamine, diaminopropionic acid, citrulline, hydroxy-
L-lysine, diaminobutyric acid, aminoadipic acid, canalin, kynurenine, diaminopimelic acid, homocysteine, histidine, methionine, etc.

【0039】(f)一般式(IV)の化合物及び/又は
一般式(V)の化合物が縮合したジペプチド又はトリペ
プチド化合物:アスパルチル−ヒスチジン、アラニル−
アラニン、アラニル−β−アラニン、β−アラニル−β
−アラニン、グリシル−リジン、アラニル−オルニチン
、リジル−リジン、オルニチル−オルニチン、グリシル
−オルニチン、β−アラニル−リジル−リジン、オルニ
チル−リジル−リジン、グリシルーオルニチルーオルニ
チン等。
(f) Dipeptide or tripeptide compound condensed with the compound of general formula (IV) and/or the compound of general formula (V): aspartyl-histidine, alanyl-
Alanine, alanyl-β-alanine, β-alanyl-β
-alanine, glycyl-lysine, alanyl-ornithine, lysyl-lysine, ornityl-ornithine, glycyl-ornithine, β-alanyl-lysyl-lysine, ornityl-lysyl-lysine, glycyl-ornithy-ornithine, etc.

【0040】(g)環状窒素化合物:イミダゾリン、2
,4,5−トリフェニル−2−イミダゾリン、2,2´
−ビス(2−イミダゾリン)、ピリジン、モルホリン、
ビピリジル、ピラゾール、トリアジン等。
(g) Cyclic nitrogen compound: imidazoline, 2
, 4,5-triphenyl-2-imidazoline, 2,2'
-bis(2-imidazoline), pyridine, morpholine,
Bipyridyl, pyrazole, triazine, etc.

【0041】本発明触媒液では、上記した(a)〜(g
)のキレート化剤の少なくとも1種を用いればよく、そ
の配合量は、触媒液中に0.0001〜2モル/l程度
、好ましくは0.0005〜0.4モル/l程度とすれ
ばよい。0.0001モル/lを下回るとブリッジ現象
が生じ易く、2モル/l程度を上回ると不経済となるの
で好ましくない。
In the catalyst liquid of the present invention, the above-mentioned (a) to (g)
) may be used, and the amount thereof may be about 0.0001 to 2 mol/l, preferably about 0.0005 to 0.4 mol/l, in the catalyst solution. . If it is less than 0.0001 mol/l, a bridging phenomenon tends to occur, and if it exceeds about 2 mol/l, it becomes uneconomical, which is not preferable.

【0042】本発明触媒液の調製方法は、特に限定的で
はなく、例えばキレート化剤の水溶液に、直接パラジウ
ム化合物を添加して溶解する方法、パラジウム化合物を
HCl、H2SO4等の酸に溶解したものをキレート化
剤の水溶液と混合する方法等を採用することができる。
The method for preparing the catalyst solution of the present invention is not particularly limited; for example, a method in which a palladium compound is directly added to and dissolved in an aqueous solution of a chelating agent, a method in which a palladium compound is dissolved in an acid such as HCl or H2SO4, etc. A method of mixing the chelating agent with an aqueous solution of a chelating agent, etc. can be adopted.

【0043】本発明の触媒液のpHは特に限定されるも
のではないが、pH調整を行なう場合には、必要に応じ
て、HCl、H2SO4等の酸やNaOH等のアルカリ
化合物を用いればよい。
The pH of the catalyst solution of the present invention is not particularly limited, but when adjusting the pH, an acid such as HCl or H2SO4 or an alkali compound such as NaOH may be used as necessary.

【0044】また、該触媒液中には、非イオン性、カチ
オン性、アニオン性、両性等の界面活性剤を添加するこ
ともでき、これにより、触媒液の表面張力を下げ、銅系
素材表面の触媒活性力を均一にすることができる。更に
、チオ尿素類の添加により、銅系素材の析出電位を下げ
、パラジウムとの置換を促進させることもできる。チオ
尿素類としては、チオ尿素、ジメチルチオ尿素、トリメ
チルチオ尿素、アリルチオ尿素、アセチルチオ尿素、エ
チレンチオ尿素、フェニルチオ尿素等を例示できる。 また、pH緩衝剤として、塩酸−塩化カリウム、フタル
酸水素カリウム−塩酸、フタル酸水素カリウム−水酸化
ナトリウム、リン酸二水素カリウム−水酸化ナトリウム
、ホウ酸−水酸化ナトリウム、炭酸水素ナトリウム−水
酸化ナトリウム、リン酸水素ニナトリウム−水酸化ナト
リウム、水酸化ナトリウム−塩化カリウム、トリス(ヒ
ドロキシメチル)アミノメタン−塩酸、酢酸ナトリウム
−酢酸等を添加することもできる。界面活性剤、チオ尿
素類及びpH緩衝剤は、必要に応じて単独又は適宜混合
して用いることができる。
[0044] Furthermore, a nonionic, cationic, anionic, or amphoteric surfactant may be added to the catalyst liquid, thereby lowering the surface tension of the catalyst liquid and improving the surface of the copper-based material. catalytic activity can be made uniform. Furthermore, by adding thioureas, the deposition potential of the copper-based material can be lowered and substitution with palladium can be promoted. Examples of thioureas include thiourea, dimethylthiourea, trimethylthiourea, allylthiourea, acetylthiourea, ethylenethiourea, and phenylthiourea. In addition, as a pH buffer, hydrochloric acid-potassium chloride, potassium hydrogen phthalate-hydrochloric acid, potassium hydrogen phthalate-sodium hydroxide, potassium dihydrogen phosphate-sodium hydroxide, boric acid-sodium hydroxide, sodium hydrogen carbonate-water Sodium oxide, disodium hydrogen phosphate-sodium hydroxide, sodium hydroxide-potassium chloride, tris(hydroxymethyl)aminomethane-hydrochloric acid, sodium acetate-acetic acid, etc. can also be added. Surfactants, thioureas, and pH buffers can be used alone or in appropriate combinations, if necessary.

【0045】本発明触媒液は、銅系素材を選択的に触媒
活性化するものであり、プリント基板、セラミック基板
、チップ部品等の絶縁体と導体が一体となった材料に対
しても、銅系素材のみを選択的に触媒活性化して、銅系
素材部分にのみ無電解めっきを行なうことが可能となる
The catalytic solution of the present invention selectively activates copper-based materials, and can be used to catalytically activate copper-based materials even for materials in which an insulator and a conductor are integrated, such as printed circuit boards, ceramic substrates, and chip parts. By selectively catalytically activating only the copper-based material, it becomes possible to perform electroless plating only on the copper-based material.

【0046】適用対象となる銅系素材としては、銅、黄
銅、リン青銅、洋白等を挙げることができ、これら素材
自体又は、各種素地の上に、めっき、蒸着、ペースト等
によってこれらの銅系素材の皮膜を形成したものに適用
できる。
Copper-based materials that can be applied include copper, brass, phosphor bronze, nickel silver, etc., and these copper materials can be coated on these materials themselves or on various substrates by plating, vapor deposition, paste, etc. It can be applied to products that have a film formed from these materials.

【0047】本発明の触媒液による処理法は、通常の触
媒液による処理と同様でよく、液温10〜90℃程度、
好ましくは25〜70℃程度の触媒液中に、被処理物を
10秒〜10分程度浸漬すればよい。液温が低すぎる場
合には、スキップ現象が生じ易く、一方液温が高すぎる
とブリッジ現象が生じ易くなるので注意が必要である。
The treatment method using the catalyst liquid of the present invention may be the same as the treatment using a normal catalyst liquid, and the liquid temperature is about 10 to 90°C,
Preferably, the object to be treated may be immersed in the catalyst liquid at a temperature of about 25 to 70°C for about 10 seconds to 10 minutes. If the liquid temperature is too low, a skip phenomenon tends to occur, while if the liquid temperature is too high, a bridge phenomenon tends to occur, so care must be taken.

【0048】触媒液によって活性化した後、無電解めっ
きを行なうことによって、銅系素材上に選択的にめっき
皮膜を形成できる。本発明触媒液は、無電解めっき液と
しては、特に限定はないが、次亜リン酸化合物を還元剤
とするNi、Pd、Pd−Ni等の無電解めっき液を用
いる場合に特に有効である。
[0048] By performing electroless plating after activation with a catalyst solution, a plating film can be selectively formed on the copper-based material. Although the catalyst solution of the present invention is not particularly limited as an electroless plating solution, it is particularly effective when using an electroless plating solution for Ni, Pd, Pd-Ni, etc. that uses a hypophosphorous acid compound as a reducing agent. .

【0049】本発明触媒液を用いる場合には、脱脂、酸
洗等の前処理は、常法に従えばよく、また無電解めっき
条件も通常通りでよい。
When the catalyst solution of the present invention is used, pretreatments such as degreasing and pickling may be performed according to conventional methods, and the electroless plating conditions may also be the same as usual.

【0050】[0050]

【発明の効果】本発明触媒液を用いることによって、銅
系素材上にのみ選択的に無電解めっきを行なうことがで
き、プリント基板、セラミック基板、チップ部品等の絶
縁体と導体とからなる材料に対しても、スキップ現象、
ブリッジ現象等を生じることなく、導体部分にのみ良好
なめっき皮膜を形成することが可能となる。
[Effects of the Invention] By using the catalyst liquid of the present invention, electroless plating can be performed selectively only on copper-based materials, and materials consisting of insulators and conductors such as printed circuit boards, ceramic substrates, chip parts, etc. Also, the skip phenomenon,
It becomes possible to form a good plating film only on the conductor portion without causing a bridging phenomenon or the like.

【0051】[0051]

【実施例】以下、実施例を挙げて本発明を更に詳細に説
明する。
[Examples] The present invention will be explained in more detail below with reference to Examples.

【0052】[0052]

【実施例1】ガラスエポキシ銅張積層板に穴あけをし、
無電解銅めっき、電気銅めっきを行なった後、エッチン
グレジスト層を形成し、次いで、エッチング、エッチン
グレジスト層剥離、ソルダーレジスト印刷、文字印刷、
外形加工の工程を経て得られた両面表面実装部品と片面
挿入型部品の混在実装用の100×170×16mmの
銅めっきスルーホールプリント配線板について、以下の
処理を行なった。
[Example 1] Drilling holes in a glass epoxy copper clad laminate,
After performing electroless copper plating and electrolytic copper plating, an etching resist layer is formed, and then etching, etching resist layer peeling, solder resist printing, character printing,
The following treatment was performed on a 100 x 170 x 16 mm copper-plated through-hole printed wiring board for mixed mounting of double-sided surface mount components and single-sided insertion type components obtained through the external shape processing step.

【0053】プリント配線板を浸漬脱脂、酸洗した後、
過硫酸アンモニウム150g/l水溶液に30℃で60
秒間浸漬してソフトエッチングを行ない、次いで酸洗後
、表1に示した触媒液組成及び条件で触媒を付与した。 次いで、下記組成のNi、Pd、Pd−Niの各々の無
電解めっきを行ない、スキップ現象及びブリッジ現象の
発生の有無を調べた。スキップ現象の評価の場合には、
めっき時間を30秒とし、ブリッジ現象の評価の場合に
はめっき時間を30分とした。
After degreasing and pickling the printed wiring board,
Ammonium persulfate 150g/l aqueous solution at 30℃
Soft etching was performed by dipping for a second, and then after pickling, a catalyst was applied using the catalyst liquid composition and conditions shown in Table 1. Next, electroless plating was performed using Ni, Pd, and Pd-Ni having the following compositions, and the occurrence of skip and bridge phenomena was examined. In the case of evaluation of skip phenomenon,
The plating time was 30 seconds, and in the case of bridging phenomenon evaluation, the plating time was 30 minutes.

【0054】 無電解Niメッキ液   硫酸ニッケル(6水塩)            
                        2
0g/l  りんご酸               
                         
          20g/l  次亜リン酸ナトリ
ウム(1水塩)                  
          30g/l  酢酸鉛(3水塩)
                         
                 1mg/l  p
H(アンモニア水で調整)             
                   6  浴温 
                         
                         
   85℃  析出速度             
                         
            約8μm/h無電解Pdメッ
キ液   塩化パラジウム                
                        0
.01モル/l  エチレンジアミン        
                         
     0.08モル/l  チオジグリコール酸 
                         
              20mg/l  次亜リ
ン酸ソーダ                    
                  0.06モル/
l  pH                    
                         
           8  浴温         
                         
                    50℃  
析出速度                     
                         
    約1μm/h無電解Pd−Niメッキ液   塩化パラジウム                
                        0
.01モル/l  塩化ニッケル          
                         
         0.1モル/l  エチレンジアミ
ン                        
              0.08モル/l  チ
オジグリコール酸                 
                       20
mg/l  次亜リン酸ソーダ           
                         
  0.06モル/l  pH           
                         
                    8  浴温
                         
                         
    50℃  析出速度            
                         
             約2μm/h
Electroless Ni plating solution Nickel sulfate (hexahydrate)
2
0g/l malic acid

20g/l Sodium hypophosphite (monohydrate)
30g/l lead acetate (trihydrate)

1mg/lp
H (adjusted with ammonia water)
6 Bath temperature


85℃ precipitation rate

Approximately 8μm/h Electroless Pd plating solution Palladium chloride
0
.. 01 mol/l ethylenediamine

0.08 mol/l thiodiglycolic acid

20mg/l Sodium hypophosphite
0.06 mol/
l pH

8 Bath temperature

50℃
Deposition rate

Approximately 1μm/h Electroless Pd-Ni plating solution Palladium chloride
0
.. 01 mol/l nickel chloride

0.1 mol/l ethylenediamine
0.08 mol/l thiodiglycolic acid
20
mg/l Sodium hypophosphite

0.06 mol/l pH

8 Bath temperature

50℃ precipitation rate

Approximately 2μm/h

【0055】[0055]

【表1】[Table 1]

【0056】以上の試験の結果、キレート化剤を添加し
ていないNo.1〜3の触媒液を用いた場合には、Ni
、Pd、Pd−Niのめっき皮膜は、全てスキップ現象
は認められなかったが、ブリッジ現象が多く認められた
。一方、本発明触媒液であるNo.4〜39の触媒液を
用いた場合には、全て、スキップ現象及びブリッジ現象
は認められなかった。
As a result of the above test, No. 1 to which no chelating agent was added. When catalyst liquids 1 to 3 are used, Ni
, Pd, and Pd-Ni, no skip phenomenon was observed, but many bridge phenomena were observed. On the other hand, No. 1, which is the catalyst liquid of the present invention. When catalyst liquids Nos. 4 to 39 were used, no skip phenomenon or bridging phenomenon was observed in all cases.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  (I)パラジウム化合物0.0001
〜0.5モル/l、並びに (II)(a)一般式 【化1】 (式中、X1、X2及びX3は各々同一又は異なって、
−CH2CO2M、−CH2PO3MM、−CH(CH
3)CO2M又は−CH2CH2CO2Mを示し、X4
は−CH2CO2M、−CH2PO3MM、−CH2C
H2OH、−CH(CH3)CO2M又は−CH2CH
2CO2Mを示し、X5はH、−CH2CO2M、−C
H2PO3MM、−CH(CH3)CO2M又は−CH
2CH2CO2Mを示す。上記において、Mは、同一又
は異なって、各々H、K、Na又はNH4を示し、nは
0〜2の整数を示す)で表わされる化合物、 (b)一般式 【化2】 (式中、X6及びX7は、同一又は異なって、各々H、
C1−5アルキル、アラルキル、アラルケニル、アリー
ル、−CH2CO2M、−CH(CH3)CO2M、−
CH2CH2CO2M、−CH2PO3MM又は−CH
2CH2OHを示し、X8は、H、C1−5アルキル、
アラルキル、アリール、−CH2CO2M、−CH(C
H3)CO2M、−CH2CH2CO2M、−CH2P
O3MM、−CH2CH2OH、−(CH2)p−NH
2又は−[(CH2)q−NH]r−Hを示す。上記に
おいて、Mは前記に同じ、Pは0〜10の整数、qは1
〜3の整数、rは1〜10の整数を示す)で表わされる
化合物、 (c)一般式 【化3】 (式中、X9はH、−CH2CO2M又は−PO3MM
を示し、X10はC1−5アルキル、−CO2M又は−
CH2CO2Mを示し、X11は−CO2M、−CH2
CO2M、−PO3MM又は−CH(OH)CO2Mを
示し、X12はH又はOHを示す。上記において、Mは
前記に同じ)で表わされる化合物、 (d)一般式 【化4】 (式中、Z1、Z2、Z3及びZ4は同一又は異なって
、各々H、CH3、CONH2又は−C(NH2)=N
Hを示す。上記においてMは前記に同じ、mは1〜15
の整数を示す。)で表わされる化合物、 (e)一般式 【化5】 (式中、AはH、−OH、−SH、NH2CO−、−C
OOM、アミノ基、−NHC(NH2)=NH、−ON
H2、−CH(NH2)CO2H、RS−、NH2CO
NH−、 【化6】 又は 【化7】 を示し、Z5、Z6及びZ7は同一又は異なって各々H
、CH3又はC2H5を示し、Z8はNH2又はOHを
示す。 上記において、Mは前記に同じ、RはC1−5アルキル
を示し、lは0〜4の整数、kは0又は1を示す。)で
表わされる化合物、 (f)一般式(IV)の化合物及び/又は一般式(V)
の化合物が縮合したジペプチド又はトリペプチド化合物
、及び (g)環状窒素化合物 から選ばれた少なくとも一種のキレート化剤0.000
1〜2モル/lを含有する水溶液からなることを特徴と
する銅系素材選択型無電解めっき用触媒液。
Claim 1: (I) Palladium compound 0.0001
~0.5 mol/l, and (II) (a) general formula [Formula 1] (wherein, X1, X2 and X3 are each the same or different,
-CH2CO2M, -CH2PO3MM, -CH(CH
3) Indicates CO2M or -CH2CH2CO2M, X4
-CH2CO2M, -CH2PO3MM, -CH2C
H2OH, -CH(CH3)CO2M or -CH2CH
2CO2M, X5 is H, -CH2CO2M, -C
H2PO3MM, -CH(CH3)CO2M or -CH
2CH2CO2M is shown. In the above, M are the same or different and each represents H, K, Na or NH4, and n represents an integer of 0 to 2), (b) a compound represented by the general formula: X6 and X7 are the same or different, and each is H,
C1-5 alkyl, aralkyl, aralkenyl, aryl, -CH2CO2M, -CH(CH3)CO2M, -
CH2CH2CO2M, -CH2PO3MM or -CH
2CH2OH, X8 is H, C1-5 alkyl,
Aralkyl, aryl, -CH2CO2M, -CH(C
H3) CO2M, -CH2CH2CO2M, -CH2P
O3MM, -CH2CH2OH, -(CH2)p-NH
2 or -[(CH2)q-NH]r-H. In the above, M is the same as above, P is an integer from 0 to 10, and q is 1
(c) a compound represented by the general formula [Formula 3] (wherein, X9 is H, -CH2CO2M or -PO3MM);
and X10 is C1-5 alkyl, -CO2M or -
CH2CO2M is shown, X11 is -CO2M, -CH2
It represents CO2M, -PO3MM or -CH(OH)CO2M, and X12 represents H or OH. In the above, M is the same as above), (d) a compound represented by the general formula: NH2)=N
Indicates H. In the above, M is the same as above, m is 1 to 15
indicates an integer. ), (e) a compound represented by the general formula [Chemical formula 5] (wherein A is H, -OH, -SH, NH2CO-, -C
OOM, amino group, -NHC(NH2)=NH, -ON
H2, -CH(NH2)CO2H, RS-, NH2CO
NH-, [Chemical formula 6] or [Chemical formula 7], and Z5, Z6 and Z7 are the same or different and each represents H
, CH3 or C2H5, and Z8 represents NH2 or OH. In the above, M is the same as above, R represents C1-5 alkyl, l is an integer of 0 to 4, and k represents 0 or 1. ), (f) a compound of general formula (IV) and/or general formula (V)
(g) at least one chelating agent selected from a dipeptide or tripeptide compound condensed with a compound of (g) a cyclic nitrogen compound;
A catalyst solution for selective electroless plating of copper-based materials, characterized in that it consists of an aqueous solution containing 1 to 2 mol/l.
JP3141688A 1991-06-13 1991-06-13 Selective electroless plating method on copper material Expired - Lifetime JP2649750B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3141688A JP2649750B2 (en) 1991-06-13 1991-06-13 Selective electroless plating method on copper material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3141688A JP2649750B2 (en) 1991-06-13 1991-06-13 Selective electroless plating method on copper material

Publications (2)

Publication Number Publication Date
JPH04365877A true JPH04365877A (en) 1992-12-17
JP2649750B2 JP2649750B2 (en) 1997-09-03

Family

ID=15297908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3141688A Expired - Lifetime JP2649750B2 (en) 1991-06-13 1991-06-13 Selective electroless plating method on copper material

Country Status (1)

Country Link
JP (1) JP2649750B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006009130A (en) * 2004-06-29 2006-01-12 Ebara Corp Method and apparatus for processing substrate
WO2006022334A1 (en) * 2004-08-26 2006-03-02 Tokyo Electron Limited Method for manufacturing semiconductor device
JP2007138218A (en) * 2005-11-16 2007-06-07 Hitachi Chem Co Ltd Liquid catalyst concentrate for electroless plating, and plating catalyst providing method using the same
JP2008184679A (en) * 2007-01-31 2008-08-14 Okuno Chem Ind Co Ltd Activation composition for electroless palladium plating
EP1959029A1 (en) * 2005-12-06 2008-08-20 Ebara-Udylite Co., Ltd. Palladium complex and catalyst-imparting treatment solution using the same
JP2010059479A (en) * 2008-09-03 2010-03-18 Okuno Chem Ind Co Ltd Activating liquid for electroless plating
JP2016515666A (en) * 2013-03-25 2016-05-30 アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングAtotech Deutschland GmbH Method for activating copper surface for electroless plating
US9435046B2 (en) 2007-07-20 2016-09-06 Rohm And Haas Electronics Llc High speed method for plating palladium and palladium alloys

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185794A (en) * 1982-04-21 1983-10-29 Hitachi Ltd Activated palladium solution
JPS59172796A (en) * 1983-03-22 1984-09-29 イビデン株式会社 Method of producing printed circuit board
JPS6024380A (en) * 1983-07-20 1985-02-07 Hitachi Ltd Palladium activating solution
JPS6358890A (en) * 1986-08-29 1988-03-14 日本電気株式会社 Manufacture of printed wiring board
JPH01149971A (en) * 1987-10-27 1989-06-13 Omi Internatl Corp Catalyst for electroless plating treatment
JPH01195281A (en) * 1988-01-28 1989-08-07 Hitachi Chem Co Ltd Catalyst for electroless plating

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185794A (en) * 1982-04-21 1983-10-29 Hitachi Ltd Activated palladium solution
JPS59172796A (en) * 1983-03-22 1984-09-29 イビデン株式会社 Method of producing printed circuit board
JPS6024380A (en) * 1983-07-20 1985-02-07 Hitachi Ltd Palladium activating solution
JPS6358890A (en) * 1986-08-29 1988-03-14 日本電気株式会社 Manufacture of printed wiring board
JPH01149971A (en) * 1987-10-27 1989-06-13 Omi Internatl Corp Catalyst for electroless plating treatment
JPH01195281A (en) * 1988-01-28 1989-08-07 Hitachi Chem Co Ltd Catalyst for electroless plating

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006009130A (en) * 2004-06-29 2006-01-12 Ebara Corp Method and apparatus for processing substrate
WO2006022334A1 (en) * 2004-08-26 2006-03-02 Tokyo Electron Limited Method for manufacturing semiconductor device
JP2007138218A (en) * 2005-11-16 2007-06-07 Hitachi Chem Co Ltd Liquid catalyst concentrate for electroless plating, and plating catalyst providing method using the same
EP1959029A1 (en) * 2005-12-06 2008-08-20 Ebara-Udylite Co., Ltd. Palladium complex and catalyst-imparting treatment solution using the same
JP5096165B2 (en) * 2005-12-06 2012-12-12 株式会社Jcu Palladium complex and catalyst application treatment liquid using the same
US8354014B2 (en) 2005-12-06 2013-01-15 Ebara-Udylite Co., Ltd. Palladium complex and catalyst-imparting treatment solution using the same
EP1959029A4 (en) * 2005-12-06 2013-07-17 Ebara Udylite Kk Palladium complex and catalyst-imparting treatment solution using the same
JP2008184679A (en) * 2007-01-31 2008-08-14 Okuno Chem Ind Co Ltd Activation composition for electroless palladium plating
US9435046B2 (en) 2007-07-20 2016-09-06 Rohm And Haas Electronics Llc High speed method for plating palladium and palladium alloys
JP2010059479A (en) * 2008-09-03 2010-03-18 Okuno Chem Ind Co Ltd Activating liquid for electroless plating
JP2016515666A (en) * 2013-03-25 2016-05-30 アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングAtotech Deutschland GmbH Method for activating copper surface for electroless plating

Also Published As

Publication number Publication date
JP2649750B2 (en) 1997-09-03

Similar Documents

Publication Publication Date Title
JP4596553B2 (en) Electroless palladium plating solution
JP4116718B2 (en) Electroless gold plating method and electroless gold plating solution used therefor
KR101393478B1 (en) Electroless gold plating bath, electroless gold plating method and electronic parts
JP4941650B2 (en) Plating ability maintenance management method of electroless gold plating bath
KR20080052478A (en) Electroless gold plating bath, electroless gold plating method and electronic parts
JP3387507B2 (en) Pretreatment solution and pretreatment method for electroless nickel plating
US6503343B1 (en) Controlled plating on reactive metals
JP3337802B2 (en) Direct plating method by metallization of copper (I) oxide colloid
JPH04365877A (en) Catalyst liquid for copper base material-selecting electroless plating
JP2927142B2 (en) Electroless gold plating bath and electroless gold plating method
JP2001519477A (en) Methods and solutions for producing a gold layer
JP3051683B2 (en) Electroless gold plating method
JP2003013249A (en) Gold substitution plating solution
JPH0711448A (en) Catalytic solution for electroless plating selective to copper-based material
KR20030051236A (en) Plating method
JP3566498B2 (en) Displacement gold plating bath
KR20190024959A (en) Electroless platinum abstinence
JP5371465B2 (en) Non-cyan electroless gold plating solution and conductor pattern plating method
JPH06101054A (en) Catalyst liquid selective of copper-base material for electroless plating
JP4599599B2 (en) Electroless gold plating solution
JP3369527B2 (en) How to improve surface solderability
JP2007246955A (en) Electroless gold-plating bath
JPH10147884A (en) Electroless gold plating method
JP2011042836A (en) Catalyst residue removing agent for printed circuit board
JP2649749B2 (en) Selective electroless plating method on copper material

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080516

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090516

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100516

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100516

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120516

Year of fee payment: 15

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120516

Year of fee payment: 15