JPH04331373A - Magnetic detector - Google Patents
Magnetic detectorInfo
- Publication number
- JPH04331373A JPH04331373A JP3101591A JP10159191A JPH04331373A JP H04331373 A JPH04331373 A JP H04331373A JP 3101591 A JP3101591 A JP 3101591A JP 10159191 A JP10159191 A JP 10159191A JP H04331373 A JPH04331373 A JP H04331373A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- magnetic
- field generator
- detection device
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 claims abstract description 60
- 230000005389 magnetism Effects 0.000 claims abstract 6
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 239000010949 copper Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000002500 effect on skin Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
- G01R15/205—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は磁気検出装置に係り、特
に磁界発生体に電流が流れることにより発生する検出磁
界を検出する磁気検出装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic detection device, and more particularly to a magnetic detection device that detects a magnetic field generated by a current flowing through a magnetic field generator.
【０００２】磁界を検出する磁気検出装置は、検出すべ
き磁界を高精度，高感度に検出することが必要とされる
。また近年、磁気検出装置が配設される機器の高速化が
進んでおり、磁気検出装置もこれに対応させる必要があ
る。A magnetic detection device that detects a magnetic field is required to detect the magnetic field with high precision and sensitivity. Furthermore, in recent years, the speed of equipment equipped with magnetic detection devices has been increasing, and magnetic detection devices must also be compatible with this.
【０００３】そこで、高周波応答特性の良好な磁気検出
装置が望まれている。[0003] Therefore, a magnetic detection device with good high frequency response characteristics is desired.
【０００４】0004
【従来の技術】従来の磁気検出装置として、例えば特開
平１−２９９４８１号公報に示される磁気検出装置があ
る。図５，図６は同公報に示された磁気検出装置１，２
を示している。各図において３は磁気抵抗素子，４はバ
イアス磁界を発生する磁石，５は検出磁界を発生する磁
界発生体，６は磁気シールドケース（破線で示す）であ
る。磁気抵抗素子３は磁界発生体５と対向するよう配設
されている。そして、磁界発生体５に電流ｉが流れると
磁界発生体５はこの電流ｉに対応した磁界を発生し、磁
界発生体５に対向配設された磁気抵抗素子３はこの磁界
に対応して抵抗値を変化させる。よって、上記電流ｉの
変化は磁気抵抗素子３の抵抗変化として検出することが
できる。2. Description of the Related Art As a conventional magnetic detection device, there is, for example, a magnetic detection device disclosed in Japanese Patent Laid-Open No. 1-299481. Figures 5 and 6 show magnetic detection devices 1 and 2 shown in the same publication.
It shows. In each figure, 3 is a magnetoresistive element, 4 is a magnet that generates a bias magnetic field, 5 is a magnetic field generator that generates a detection magnetic field, and 6 is a magnetic shield case (indicated by a broken line). The magnetoresistive element 3 is arranged to face the magnetic field generator 5. When a current i flows through the magnetic field generator 5, the magnetic field generator 5 generates a magnetic field corresponding to the current i, and the magnetoresistive element 3 disposed opposite to the magnetic field generator 5 resists the magnetic field in response to this magnetic field. Change the value. Therefore, the change in the current i can be detected as a change in the resistance of the magnetoresistive element 3.
【０００５】また、従来の磁気検出装置１，２では、磁
界発生体５は幅広の板状部材が用いられており、この磁
界発生体５の幅寸法（各図に矢印Ｌで示す）は磁気抵抗
素子３と対向する位置においても、対向位置以外の位置
においても略同一の幅寸法Ｌとされていた。Furthermore, in the conventional magnetic detection devices 1 and 2, a wide plate member is used as the magnetic field generator 5, and the width dimension (indicated by arrow L in each figure) of the magnetic field generator 5 is The width dimension L was substantially the same both at the position facing the resistive element 3 and at positions other than the facing position.
【０００６】[0006]
【発明が解決しようとする課題】しかるに従来の磁気検
出装置１，２では、上記のように磁界発生体５は幅広の
板状部材が用いられていたため、磁気検出装置１，２に
より高速電流波形を検出しようとした場合、磁界発生体
５に渦電流が発生する。即ち、磁界発生体５に流れる電
流が高速パルス動作を行うと、電流により発生する磁界
変化は大きくなり、これにより磁界発生体５自体に渦電
流が発生する。この渦電流はレンツの法則に従い磁界の
変化を妨げる向きに流れるため、この渦電流により磁界
発生体５が発生する磁界が乱れ、電流波形の忠実な再現
ができないという問題点があった。また、この渦電流の
発生は磁界発生体５の幅寸法Ｌが広い場合に顕著であっ
た。[Problems to be Solved by the Invention] However, in the conventional magnetic detection devices 1 and 2, the magnetic field generator 5 is a wide plate-like member as described above. When an attempt is made to detect this, an eddy current is generated in the magnetic field generator 5. That is, when the current flowing through the magnetic field generator 5 performs a high-speed pulse operation, the change in the magnetic field generated by the current becomes large, thereby generating an eddy current in the magnetic field generator 5 itself. Since this eddy current flows in a direction that obstructs changes in the magnetic field according to Lenz's law, this eddy current disturbs the magnetic field generated by the magnetic field generator 5, posing a problem in that the current waveform cannot be faithfully reproduced. Moreover, the generation of this eddy current was remarkable when the width dimension L of the magnetic field generator 5 was wide.
【０００７】本発明は上記の点に鑑みてなされたもので
あり、渦電流による悪影響を防止することにより高速電
流波形の検出を可能とした磁気検出装置を提供すること
を目的とする。The present invention has been made in view of the above points, and an object of the present invention is to provide a magnetic detection device that can detect high-speed current waveforms by preventing the adverse effects of eddy currents.
【０００８】[0008]
【課題を解決するための手段】上記課題を解決するため
、本発明では、検出磁界を発生する磁界発生体と、この
磁界発生体と対向配設され、磁性体または半導体の磁気
抵抗を利用して、前記磁界発生体に発生した検出磁界を
検出する磁気検出素子とを具備してなる磁気検出装置に
おいて、上記磁界発生体の形状を、上記磁気検出素子と
対向する位置における磁界発生体の幅寸法を（Ｗ）とし
、厚さ寸法を（Ｔ）とした場合、この幅寸法（Ｗ）と厚
さ寸法（Ｔ）との比（Ｗ／Ｔ）が、０．６以下（（Ｗ／
Ｔ）≦０．６）となる形状としたことを特徴とするもの
である。[Means for Solving the Problems] In order to solve the above problems, the present invention utilizes a magnetic field generator that generates a detection magnetic field, and a magnetic resistance of a magnetic material or semiconductor that is disposed opposite to the magnetic field generator. In the magnetic detection device comprising a magnetic detection element that detects a detection magnetic field generated in the magnetic field generation body, the shape of the magnetic field generation body is determined by the width of the magnetic field generation body at a position facing the magnetic detection element. When the dimension is (W) and the thickness dimension is (T), the ratio (W/T) between the width dimension (W) and the thickness dimension (T) is 0.6 or less ((W/
T)≦0.6).
【０００９】[0009]
【作用】上記構成とされた磁気検出装置は、磁気検出素
子と対向する位置における磁界発生体の幅寸法（Ｗ）と
厚さ寸法（Ｔ）との比（Ｗ／Ｔ）が０．６以下と、従来
の磁気検出装置の幅寸法と厚さ寸法との比（Ｗ／Ｔ）が
４程度であったのに比べて小さな値となっている。[Operation] In the magnetic detection device configured as described above, the ratio (W/T) between the width dimension (W) and the thickness dimension (T) of the magnetic field generator at the position facing the magnetic detection element is 0.6 or less. This is a smaller value than the width-to-thickness ratio (W/T) of a conventional magnetic detection device, which was about 4.
【００１０】これは、従来の磁気検出装置に比べて本発
明に係る磁気検出装置は、幅寸法（Ｗ）が小さいことを
意味する（磁気検出装置の場合、磁界発生体の厚さ寸法
（Ｔ）を大きく変更することはその構造上できないため
）。This means that the magnetic detection device according to the present invention has a smaller width dimension (W) than the conventional magnetic detection device (in the case of a magnetic detection device, the thickness dimension (T ) cannot be changed significantly due to its structure).
【００１１】このように、磁界発生体の幅寸法（Ｗ）が
小さくなることにより、磁界発生体の表面上で発生する
渦電流は相互に相殺され易くなる。また、磁界発生体の
表皮効果（周波数が高くなるにつれて導体に流れる電流
が表面に集まり、中心部ほど流れ難くなる現象）が減少
する。よって、検出結果に渦電流が悪影響を及ぼすのを
防止することができる。[0011] As the width dimension (W) of the magnetic field generator is reduced in this way, the eddy currents generated on the surface of the magnetic field generator tend to cancel each other out. Furthermore, the skin effect of the magnetic field generator (a phenomenon in which as the frequency increases, the current flowing through the conductor gathers on the surface and becomes more difficult to flow toward the center) is reduced. Therefore, it is possible to prevent eddy currents from adversely affecting the detection results.
【００１２】0012
【実施例】次に本発明の実施例について図面と共に説明
する。図２は本発明の一実施例である磁気検出装置１０
を示す底面図及び縦断面図である。尚、磁気検出装置１
０が被測定電流を検出する原理は、先に説明した従来の
磁気検出装置１，２と同一であるため、その説明は省略
する。Embodiments Next, embodiments of the present invention will be described with reference to the drawings. FIG. 2 shows a magnetic detection device 10 which is an embodiment of the present invention.
FIG. In addition, magnetic detection device 1
The principle by which 0 detects the current to be measured is the same as that of the conventional magnetic detection devices 1 and 2 described above, so the explanation thereof will be omitted.
【００１３】同図において、１１はパーマロイ等の磁性
体の磁気抵抗を利用した磁気抵抗素子であり、この磁気
抵抗素子１１と対向する位置には磁界発生体１２が配設
されている。また磁気抵抗素子１１の、磁界発生体１２
と対向する面と逆の面には、磁気抵抗素子１１に対して
バイアス磁界を印加する永久磁石１３が配設されている
。In the figure, reference numeral 11 denotes a magnetoresistive element that utilizes the magnetic resistance of a magnetic material such as permalloy, and a magnetic field generator 12 is disposed at a position facing this magnetoresistive element 11. In addition, the magnetic field generator 12 of the magnetoresistive element 11
A permanent magnet 13 that applies a bias magnetic field to the magnetoresistive element 11 is disposed on a surface opposite to the surface facing the magnetoresistive element 11 .
【００１４】更に、磁気抵抗素子１１の周囲には、磁気
シールド板１４，１５が配設されており、更にその外周
位置には静電シールドを行うための銅ケース１６が設け
られている。このように、磁気抵抗素子１１は磁気シー
ルド板１４，１５及び銅ケース１６に囲繞された構成と
なっており、外部磁界が磁気抵抗素子１１に影響を及ぼ
さないよう構成されている。Further, magnetic shield plates 14 and 15 are provided around the magnetoresistive element 11, and a copper case 16 for electrostatic shielding is further provided at the outer circumferential position of the magnetic shield plates 14 and 15. In this way, the magnetoresistive element 11 is surrounded by the magnetic shield plates 14 and 15 and the copper case 16, and is configured so that the external magnetic field does not affect the magnetoresistive element 11.
【００１５】ここで、図１の本発明の特徴となる磁界発
生体１２を図１に拡大して示し更に詳述する。The magnetic field generator 12 shown in FIG. 1, which is a feature of the present invention, is shown enlarged in FIG. 1 and will be described in further detail.
【００１６】磁界発生体１２は銅（Ｃｕ），アルミニウ
ム（Ａｌ），亜鉛（Ｚｎ），金（Ａｕ）等の導電性が良
好でかつ非磁性の金属よりなり、ダイキャスティング加
工，プレス加工，切削加工等を用いて後述する所定の形
状に形成したものである。この磁界発生体１２は、その
中央部分に前記した磁気抵抗素子１１と対向する磁界印
加部１７と、この磁界印加部１７を挟んで一対のネジ孔
１８，１９が形成されている。このネジ孔１８，１９は
電極として機能するものであり、よって実装時には被測
定電流はこの一対のネジ孔１８，１９の間を流れ、磁界
印加部１７において磁界を発生させる。The magnetic field generating body 12 is made of a non-magnetic metal with good conductivity such as copper (Cu), aluminum (Al), zinc (Zn), gold (Au), etc., and can be processed by die casting, press processing, or cutting. It is formed into a predetermined shape, which will be described later, using processing or the like. The magnetic field generating body 12 has a magnetic field applying section 17 facing the magnetoresistive element 11 described above in its central portion, and a pair of screw holes 18 and 19 sandwiching the magnetic field applying section 17 therebetween. The screw holes 18 and 19 function as electrodes, and therefore, during mounting, the current to be measured flows between the pair of screw holes 18 and 19, and a magnetic field is generated in the magnetic field applying section 17.
【００１７】いま、磁界印加部１７の幅寸法をＷとし、
厚さ寸法をＴとした場合（Ｗ，Ｔを夫々図中矢印で示す
）、磁界印加部１７の形状は幅寸法Ｗと厚さ寸法Ｔとの
比（Ｗ／Ｔ）が０．６以下（（Ｗ／Ｔ）≦０．６）とな
る形状とされている。この形状とすることにより、磁界
印加部１７に高速パルス動作を行う電流を流しても渦電
流の発生を防止することができる。以下、その理由及び
本発明者が行った実験結果について説明する。Now, let the width dimension of the magnetic field applying section 17 be W,
When the thickness dimension is T (W and T are indicated by arrows in the figure), the shape of the magnetic field application section 17 is such that the ratio of the width dimension W to the thickness dimension T (W/T) is 0.6 or less ( (W/T)≦0.6). With this shape, it is possible to prevent the generation of eddy currents even when a current for high-speed pulse operation is passed through the magnetic field applying section 17. The reason for this and the results of experiments conducted by the present inventor will be explained below.
【００１８】図３は本発明者の行った実験結果を示す図
であり、電流−磁界出力特性を示す図である。同図（Ａ
）は（Ｗ／Ｔ）＝０．６の本願発明の特性を示しており
、また同図（Ｂ）は（Ｗ／Ｔ）＝５．０の従来構成の特
性を示している。また、各図において一転鎖線で示すの
は磁気検出装置への入力電流（被側電流）であり、実線
で示すのは上記一転鎖線で示す被側電流を入力した場合
の磁気検出装置からの出力波形を示している。FIG. 3 is a diagram showing the results of an experiment conducted by the present inventor, and is a diagram showing current-magnetic field output characteristics. The same figure (A
) shows the characteristics of the present invention with (W/T)=0.6, and (B) of the same figure shows the characteristics of the conventional configuration with (W/T)=5.0. In addition, in each figure, the dash-dash line indicates the input current to the magnetic detection device (current), and the solid line indicates the output from the magnetic detection device when the current indicated by the dash-dash line above is input. It shows the waveform.
【００１９】同図から明らかなように、同図（Ａ）に示
す本願発明に係る磁気検出装置では、入力電流波形と出
力電流波形が略同一の特性を示しており、高い再現性を
有している。これに対し、同図（Ｂ）に示す従来構成の
磁気検出装置では、入力電流波形と出力電流波形は広い
範囲で一致してはおらず再現性は劣化している。特に図
中矢印Ａで示す位置における特性劣化が著しい。従って
同図より、本願発明に係る磁気検出装置は、優れた再現
性を有していることが判る。As is clear from the figure, in the magnetic detection device according to the present invention shown in figure (A), the input current waveform and the output current waveform exhibit substantially the same characteristics, and have high reproducibility. ing. On the other hand, in the conventional magnetic detection device shown in FIG. 2B, the input current waveform and the output current waveform do not match over a wide range, resulting in poor reproducibility. In particular, the characteristics deteriorated significantly at the position indicated by arrow A in the figure. Therefore, from the figure, it can be seen that the magnetic detection device according to the present invention has excellent reproducibility.
【００２０】また、図４は（Ｗ／Ｔ）と波形歪み率の関
係を示す図である。ここで、波形歪み率（Ｑパーセント
）とは、図３（Ｂ）において図中矢印Ｈ１，Ｈ２を求め
、次式より求められる値である。FIG. 4 is a diagram showing the relationship between (W/T) and waveform distortion rate. Here, the waveform distortion rate (Q percent) is a value obtained from arrows H1 and H2 in FIG. 3(B) and from the following equation.
【００２１】Ｑ＝（Ｈ２／Ｈ１）×１００ （％）こ
の波形歪み率Ｑはゼロであることが望ましい。そこで本
発明者は、（Ｗ／Ｔ）の値が異なる複数の磁気検出装置
を作成し、各磁気検出装置に対して（Ｗ／Ｔ）と波形歪
み率の関係を求めた。その結果が図４である。そこで図
４を見ると、Ｑ＝０となるのは（Ｗ／Ｔ）≦０．６の場
合である。よって、磁界印加部１７が（Ｗ／Ｔ）≦０．
６を満足させることができるとき、波形歪み（図３（Ｂ
）に矢印Ａで示す部分）の発生を防止できる。Q=(H2/H1)×100 (%) This waveform distortion rate Q is preferably zero. Therefore, the present inventor created a plurality of magnetic detection devices having different values of (W/T), and determined the relationship between (W/T) and waveform distortion rate for each magnetic detection device. The results are shown in FIG. Looking at FIG. 4, Q=0 occurs when (W/T)≦0.6. Therefore, the magnetic field applying section 17 satisfies (W/T)≦0.
6 can be satisfied, waveform distortion (Figure 3 (B
) can be prevented from occurring (the part indicated by arrow A).
【００２２】上記実験結果から明らかなように、本発明
に係る磁気検出素子１０は従来構成の磁気検出素子に比
べて優れた特性を示す。これは、磁気検出素子１０の磁
界発生体１２に発生する渦電流による影響が検出結果に
影響を及ぼしていないことに起因すると思われる。以下
、上記効果が生じる理由について本発明者の推論を述べ
る。As is clear from the above experimental results, the magnetic sensing element 10 according to the present invention exhibits superior characteristics compared to magnetic sensing elements of conventional construction. This seems to be due to the fact that the eddy current generated in the magnetic field generator 12 of the magnetic detection element 10 does not affect the detection results. Hereinafter, the inventor's reasoning regarding the reason why the above effect occurs will be described.
【００２３】磁界印加部１７の形状を上記のように構成
することにより、磁界印加部１７は従来のように幅広の
形状とされていた磁界発生体５（図５，図６参照）に比
べて、幅寸法をＷは小さな値となっている。上記の（Ｗ
／Ｔ）≦０．６という条件は、幅寸法Ｗと厚さ寸法Ｔを
パラメータとする値であるため、幅寸法Ｗを一定とした
場合厚さ寸法Ｔを変化させることによりその数値を変化
させる。しかるに、磁気検出装置１０は、その構造上、
磁界印加部１７の厚さを極端に厚くすることはできない
。よって、上記条件を満たす磁界印加部１７の形状は必
然的に幅寸法Ｗが小さな形状となる。By configuring the shape of the magnetic field applying section 17 as described above, the magnetic field applying section 17 has a wider shape than the conventional magnetic field generating body 5 (see FIGS. 5 and 6). , the width dimension W has a small value. Above (W
/T)≦0.6 is a value that uses the width dimension W and the thickness dimension T as parameters, so if the width dimension W is constant, the value can be changed by changing the thickness dimension T. . However, due to its structure, the magnetic detection device 10 has
The thickness of the magnetic field application section 17 cannot be made extremely thick. Therefore, the shape of the magnetic field application section 17 that satisfies the above conditions necessarily has a small width dimension W.
【００２４】このように幅狭形状とされた磁界印加部１
７に高速パルス（高周波）を有する被測電流（図１（Ａ
）中、矢印Ｉで示す）が流されたとする。すると、この
高周波の被測電流により磁界印加部１７の表面には渦電
流が発生する。この渦電流を図１（Ａ）に矢印で示す。
同図に示すように、発生する渦電流はレンツの法則に従
い、被測電流Ｉを妨げる方向の回転電流となる。従って
磁界印加部１７の長手方向中心線（図１（Ａ）中、一点
鎖線で示す）に対して左右に発生する渦電流は互いに逆
向きの回転を有した渦電流であり、かつ磁界印加部１７
の幅寸法Ｗは狭いため、各渦電流により発生する磁界は
相互に相殺され、被測電流Ｉによる磁界のみが発生する
。よって、本発明構成とすることにより、渦電流に起因
する磁界の発生を抑制することができ、特に高周波領域
における磁界測定の精度を向上させることができる。[0024] The magnetic field applying section 1 has a narrow width as described above.
7 has a high-speed pulse (high frequency) (Fig. 1 (A)
), shown by arrow I) is swept away. Then, an eddy current is generated on the surface of the magnetic field applying section 17 due to this high frequency current to be measured. This eddy current is shown by an arrow in FIG. 1(A). As shown in the figure, the generated eddy current becomes a rotating current that obstructs the measured current I according to Lenz's law. Therefore, the eddy currents generated on the left and right sides of the longitudinal center line of the magnetic field application section 17 (indicated by the dashed line in FIG. 1A) are eddy currents that rotate in opposite directions, and the magnetic field application section 17
Since the width dimension W of is narrow, the magnetic fields generated by each eddy current cancel each other out, and only the magnetic field due to the measured current I is generated. Therefore, by adopting the configuration of the present invention, it is possible to suppress the generation of a magnetic field due to eddy currents, and it is possible to improve the accuracy of magnetic field measurement, especially in a high frequency region.
【００２５】また、磁界発生体の幅寸法（Ｗ）が小さく
なることにより、磁界発生体の表面上で発生する渦電流
は相互に相殺され易くなり磁界発生体の表皮効果が減少
し、よって磁界発生体に渦電流自体の発生が防止される
のも、本願発明の効果が生じる一つの理由であると考え
られる。Furthermore, as the width dimension (W) of the magnetic field generator becomes smaller, the eddy currents generated on the surface of the magnetic field generator tend to cancel each other out, and the skin effect of the magnetic field generator decreases, so that the magnetic field Preventing the generation of eddy current itself in the generator is considered to be one of the reasons why the effects of the present invention are produced.
【００２６】[0026]
【発明の効果】上述の如く本発明によれば、渦電流が検
出結果に悪影響を及ぼすことを防止できるため、高速パ
ルス電流応答波形において再現性の良好な出力波形を得
ることができ、検出精度を向上させることができる等の
特長を有する。Effects of the Invention As described above, according to the present invention, it is possible to prevent eddy currents from having an adverse effect on detection results, so it is possible to obtain an output waveform with good reproducibility in a high-speed pulse current response waveform, thereby improving detection accuracy. It has features such as being able to improve
【図１】本発明の一実施例である磁気検出装置に配設さ
れる磁界発生体を拡大して示す図である。FIG. 1 is an enlarged view showing a magnetic field generator disposed in a magnetic detection device according to an embodiment of the present invention.
【図２】（Ａ）は本発明の一実施例である磁気検出装置
を示す底面図、（Ｂ）は本発明の一実施例である磁気検
出装置を示す縦断面図である。FIG. 2A is a bottom view showing a magnetic detection device according to an embodiment of the present invention, and FIG. 2B is a longitudinal sectional view showing the magnetic detection device according to an embodiment of the present invention.
【図３】（Ａ）は本発明に係る磁気検出装置の（Ｗ／Ｔ
）と電流−磁界出力との関係を示す図、（Ｂ）は従来に
おける磁気検出装置の（Ｗ／Ｔ）と電流−磁界出力との
関係を示す図である。FIG. 3 (A) shows (W/T) of the magnetic detection device according to the present invention.
) and current-magnetic field output, and (B) is a diagram showing the relationship between (W/T) and current-magnetic field output of a conventional magnetic detection device.
【図４】（Ｗ／Ｔ）と出力波形歪み率との関係を示す図
である。FIG. 4 is a diagram showing the relationship between (W/T) and output waveform distortion rate.
【図５】従来の磁気検出装置の一例を説明するための図
である。FIG. 5 is a diagram for explaining an example of a conventional magnetic detection device.
【図６】従来の磁気検出装置の一例を説明するための図
である。FIG. 6 is a diagram for explaining an example of a conventional magnetic detection device.
１０ 磁気検出装置 １１ 磁気抵抗素子 １２ 磁界発生体 １３ 永久磁石 １４，１５ 磁気シールド板 １６ 銅ケース １７ 磁界印加部 １８，１９ ネジ孔 10 Magnetic detection device 11 Magnetoresistive element 12 Magnetic field generator 13 Permanent magnet 14,15 Magnetic shield plate 16 Copper case 17 Magnetic field application section 18, 19 Screw hole
Claims (3)
）と、該磁界発生体（１２）と対向配設され、磁性体ま
たは半導体の磁気抵抗を利用して、該磁界発生体（１２
）に発生した検出磁界を検出する磁気検出素子（１１，
１３）とを具備してなる磁気検出装置において、該磁界
発生体（１２）の形状を、該磁気検出素子（１１，１３
）と対向する位置における該磁界発生体（１２）の幅寸
法を（Ｗ）とし、厚さ寸法を（Ｔ）とした場合、この幅
寸法（Ｗ）と厚さ寸法（Ｔ）との比（Ｗ／Ｔ）が、０．
６以下（（Ｗ／Ｔ）≦０．６）となる形状としたことを
特徴とする磁気検出装置。[Claim 1] A magnetic field generator (12
) and the magnetic field generator (12) are disposed opposite to the magnetic field generator (12), and the magnetic field generator (12) is
) for detecting the detection magnetic field generated in the magnetic detection element (11,
13), in which the shape of the magnetic field generator (12) is adjusted to match the shape of the magnetic detection element (11, 13).
) The width dimension of the magnetic field generator (12) at the position facing the magnetic field generator (12) is (W), and the thickness dimension is (T), the ratio of this width dimension (W) to the thickness dimension (T) is ( W/T) is 0.
6 or less ((W/T)≦0.6).
好でかつ非磁性の金属であることを特徴とする請求項１
の磁気検出装置。2. Claim 1, wherein the magnetic field generator (12) is made of a non-magnetic metal with good electrical conductivity.
magnetic detection device.
１）と該磁気抵抗素子（１１）にバイアス磁界を印加す
る磁石（１３）とにより構成されており、かつ、該磁石
（１３）は該磁気抵抗素子（１１）が該磁界発生体（１
２）と対向する面と反対の面に配設されていることを特
徴とする請求項１または２の磁気検出装置。3. The magnetic detection element includes a magnetoresistive element (1
1) and a magnet (13) that applies a bias magnetic field to the magnetoresistive element (11), and the magnet (13) is composed of a magnetoresistive element (11) that
3. The magnetic detection device according to claim 1, wherein the magnetic detection device is disposed on a surface opposite to the surface facing the magnetism detection device 2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3101591A JPH04331373A (en) | 1991-05-07 | 1991-05-07 | Magnetic detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3101591A JPH04331373A (en) | 1991-05-07 | 1991-05-07 | Magnetic detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04331373A true JPH04331373A (en) | 1992-11-19 |
Family
ID=14304631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3101591A Withdrawn JPH04331373A (en) | 1991-05-07 | 1991-05-07 | Magnetic detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04331373A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212307A (en) * | 2006-02-09 | 2007-08-23 | Akebono Brake Ind Co Ltd | Current sensor |
-
1991
- 1991-05-07 JP JP3101591A patent/JPH04331373A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212307A (en) * | 2006-02-09 | 2007-08-23 | Akebono Brake Ind Co Ltd | Current sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7106046B2 (en) | Current measuring method and current measuring device | |
| US4385273A (en) | Transducer for measuring a current-generated magnetic field | |
| US4793241A (en) | Piston position detector for fluid pressure cylinder | |
| US7977934B2 (en) | High bandwidth open-loop current sensor | |
| US7064937B2 (en) | System and method for fixing a direction of magnetization of pinned layers in a magnetic field sensor | |
| JP5271448B2 (en) | Magnetic position detector | |
| EP1975637B1 (en) | Magnetic substance detection sensor and magnetic substance detecting apparatus | |
| US5592082A (en) | Magnetic sensor with permanent magnet bias layers | |
| JP2008102116A (en) | Current detector | |
| US5923162A (en) | Non-inductive lead path hall effect electrical current sensor | |
| JPH04331373A (en) | Magnetic detector | |
| KR100334828B1 (en) | Spin-valve type magnetoresistive thin film element and spin-valve type magnetoresistive thin film head using the same | |
| JPH0293373A (en) | Current detector | |
| JP2008003072A (en) | Thin-film magnetoresistive element and thin-film magnetic sensor | |
| US11333723B2 (en) | Magnetic sensor | |
| US11467231B2 (en) | Magnetic sensor | |
| TWI619280B (en) | Sensing device | |
| KR960706064A (en) | MAGNETIC SIGNAL DETECTION APPARATUS | |
| JP7382853B2 (en) | Magnetic sensor and magnetic detection method | |
| JPH054037U (en) | Current detection sensor | |
| JP2514338B2 (en) | Current detector | |
| JP2980460B2 (en) | Current detector | |
| JPH10142263A (en) | Current detecting device | |
| JPS6326450B2 (en) | ||
| JP2666613B2 (en) | Magnetic sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980806 |