JPH0432525U - - Google Patents

Info

Publication number
JPH0432525U
JPH0432525U JP7537090U JP7537090U JPH0432525U JP H0432525 U JPH0432525 U JP H0432525U JP 7537090 U JP7537090 U JP 7537090U JP 7537090 U JP7537090 U JP 7537090U JP H0432525 U JPH0432525 U JP H0432525U
Authority
JP
Japan
Prior art keywords
cleaning
ion exchange
cleaning solution
exchange resin
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7537090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7537090U priority Critical patent/JPH0432525U/ja
Publication of JPH0432525U publication Critical patent/JPH0432525U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP7537090U 1990-07-16 1990-07-16 Pending JPH0432525U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7537090U JPH0432525U (enExample) 1990-07-16 1990-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7537090U JPH0432525U (enExample) 1990-07-16 1990-07-16

Publications (1)

Publication Number Publication Date
JPH0432525U true JPH0432525U (enExample) 1992-03-17

Family

ID=31615895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7537090U Pending JPH0432525U (enExample) 1990-07-16 1990-07-16

Country Status (1)

Country Link
JP (1) JPH0432525U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263586A (ja) * 1988-08-27 1990-03-02 Nec Corp 洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263586A (ja) * 1988-08-27 1990-03-02 Nec Corp 洗浄装置

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