JPH04313076A - Apparatus for inspecting high-frequency, high-output-power transistor - Google Patents

Abstract

PURPOSE:To smooth the motion of a stub and to average the change in impedance by using an air cylinder whose length can be changed continuously and smoothly as a driving source for the variable-length stub. CONSTITUTION:A sliding part 4 is fixed to one end of a fixed plate 2 which is provided through a fixed guide shaft 1. A stub 5 is associatively moved by the up and down operation of the sliding part 4. The sliding part 4 of an air cylinder 3 is slid up and down by the operation of the air cylinder 3. The sliding part 4 and an inner conductor 5B of the stub 5 are fixed with the fixed plate 2. Therefore, the conductor 5B of the stub 5 is slid by the sliding of the air cylinder 3. The up and down motion of the stub 5 is performed continuously and smoothly. Thus, impedance can be changed continuously and smoothly.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a testing device for semiconductor devices, and more particularly to a testing device for performing a load variation test on high frequency, high output transistors used in output stages of wireless devices.

0002

2. Description of the Related Art High frequency, high power transistors are used, for example, in the output stage of radio equipment. Radio equipment generally uses an antenna, but if the antenna is touched or broken, the predetermined impedance may change and the transistor may be damaged. For this reason, a load variation device is used to select transistors that will not be damaged even when the load varies. Figure 2 shows an example of a load variation device.

In FIG. 2, the stub 5 includes an outer conductor 5A, which is a fixed part, and an inner conductor 5B, which is a movable part. One end of the internal conductor 5B is fixed to one end of the fixed plate 2, and the other end of the fixed plate 2 is fixed to the receiving plate 6. The fixed plate 2 is configured to be slidable along the fixed guide shaft 1 in the vertical direction in the figure. Reference numeral 7 denotes a rotating body, which is driven and rotated by a drive means (not shown), for example, a pulse motor, so that the receiving plate 6 can slide up and down.

Power from a pulse motor (not shown) is transmitted to a rotating body 7. The motion of the rotating body 7 is transmitted to the receiving plate 6, which causes it to slide up and down. At the same time as the receiving plate 6, the fixed plate 2 is also moved up and down, and the internal conductor 5B of the stub 5 is also moved up and down, thereby changing the impedance and making it possible to perform tests based on load fluctuations of the transistor.

[0005]

[Problem to be Solved by the Invention] Since the conventional load variation device is constructed as described above, "slip" occurs when the rotational motion of the pulse motor is transmitted to the receiving plate 6, and the internal conductor is smoothly moved. There is a disadvantage that it is difficult to move 5B, and therefore the impedance cannot be changed smoothly and continuously.

The present invention has been made to solve the above-mentioned problems, and the internal conductor of the stub is moved using a linear driving force, so that impedance changes in the stub are continuously controlled. The object of the present invention is to obtain a high frequency, high power transistor testing device that can perform the test smoothly.

[0007]

[Means for Solving the Problems] The high frequency, high power transistor testing device according to the present invention uses an air cylinder as a drive source for the device to move the stub up and down, and can directly transmit the up and down movement to the stub. This is how it was done.

[0008]

In the present invention, by using an air cylinder as a driving source, the stub can be continuously driven up and down, and therefore the impedance can be changed continuously and smoothly.

[0009]

[Example] The present invention will be explained below. FIG. 1 is a plan view of a load varying device showing an embodiment of the present invention. Figure 1
2, the same reference numerals as those in FIG. 2 indicate the same components, 3 is an air cylinder which is a driving source, and 4 is a sliding part thereof. This sliding portion 4 is fixed to one end of a fixed plate 2 provided via a fixed guide shaft 1. The stub 5 is configured to move in conjunction with the vertical movement of the sliding portion 4.

Next, the operation of the above embodiment will be explained. The operation of the air cylinder 3 causes the sliding portion 4 of the air cylinder 3 to slide up and down. The sliding portion 4 of the air cylinder 3 and the internal conductor 5B of the stub 5 are fixed by a fixing plate 2. Therefore, as the air cylinder 3 slides, the internal conductor 5B of the stub 5 slides, and the vertical movement of the stub 5 is performed continuously and smoothly, and accordingly, the impedance is also continuously and smoothly. It can be changed.

[0011]

As explained above, in the present invention, by changing the drive source of the load variation device from a pulse motor to an air cylinder, there is no need to convert rotational motion into vertical motion as in the conventional case. The structure of the device is simplified, the stub can move up and down smoothly, and the impedance can be changed continuously and smoothly.

[Brief explanation of the drawing]

FIG. 1 is a plan view of a load variation device showing an embodiment of the present invention.

FIG. 2 is a plan view of a conventional load variation device.

[Explanation of symbols]

1 Fixed guide shaft 2 Fixed plate 3 Air cylinder 4 Sliding part 5 Stub 5A external conductor 5B Internal conductor

Claims (1)

[Claims] 1. An apparatus for inspecting high-frequency, high-output transistors using impedance changes of a variable-length stub, in which an air cylinder whose length can be continuously and smoothly varied is used as a drive source for the variable-length stub. A high-frequency, high-output transistor inspection device characterized by using.