CN220906492U - Multi-axis chip suction device - Google Patents

Abstract

The utility model provides a multi-axis chip suction device, which comprises a portal frame, wherein an X-axis movement mechanism is arranged on the portal frame, a Z-axis movement mechanism is arranged at the movement end of the X-axis movement mechanism, and a visual identification instrument and a Y-axis fine adjustment mechanism are arranged at the movement end of the Z-axis movement mechanism; the motion end of the Y-axis fine tuning mechanism is provided with a Z-axis fine tuning mechanism, the motion end of the Z-axis fine tuning mechanism is provided with a rotary fine tuning mechanism, the motion end of the rotary fine tuning mechanism is provided with a suction nozzle, the lens and the suction nozzle of the visual identification instrument are downwards arranged along the Z-axis, and the rotary fine tuning mechanism can drive the suction nozzle to rotate along the X-Y plane. By adopting the utility model, the chip can be identified by the visual identification instrument and the coordinate of the position where the suction nozzle can be contacted can be determined; the Y-axis fine adjustment mechanism is matched with the rotary fine adjustment mechanism, so that the suction nozzle can be driven to move to contact the coordinate point of the position; therefore, the suction nozzle can be accurately driven to contact with the specific position of the chip, a special circuit is avoided, and the yield is improved.

Description

Multi-axis chip suction device

Technical Field

The utility model relates to the technical field of crystal disc processing and transferring devices, in particular to a multi-axis chip sucking device.

Background

The chip needs to be transferred between different stations during the processing. Currently, common modes include forceps clamping, suction by a suction device, and the like. In the process of clamping chips by using tools such as forceps, the integrity and the function of the chips can be damaged due to excessive force, and the control force and the operation are difficult for operators.

In the process of taking and placing the chip by using the suction device, if the surface of the chip is provided with a special circuit, the suction nozzle is not allowed to contact, and the suction nozzle is required to avoid the special circuit in such a situation to accurately contact the specific position of the chip. The current suction device has no corresponding measures, so that the yield is affected when the chip is processed.

Disclosure of utility model

The technical problems to be solved by the utility model are as follows: how to make the suction device avoid the special circuit of the chip and accurately contact the specific position of the chip.

The technical scheme for solving the technical problems is as follows:

the utility model provides a multi-axis chip suction device, which comprises a portal frame, wherein an X-axis movement mechanism is arranged on the portal frame, a Z-axis movement mechanism is arranged at the movement end of the X-axis movement mechanism, and a visual identification instrument and a Y-axis fine adjustment mechanism are arranged at the movement end of the Z-axis movement mechanism; the motion end of the Y-axis fine tuning mechanism is provided with a Z-axis fine tuning mechanism, the motion end of the Z-axis fine tuning mechanism is provided with a rotary fine tuning mechanism, the motion end of the rotary fine tuning mechanism is provided with a suction nozzle, the lens and the suction nozzle of the visual identification instrument are downwards arranged along the Z-axis, and the rotary fine tuning mechanism can drive the suction nozzle to rotate along the X-Y plane.

The beneficial effects of the utility model are as follows:

According to the utility model, through arranging the lens and the suction nozzle of the visual recognition instrument downwards along the Z axis, chips can be recognized and X, Y coordinates of the contactable position of the suction nozzle can be determined; the X-axis movement mechanism and the Y-axis fine adjustment mechanism are matched with the rotary fine adjustment mechanism, so that the suction nozzle can be driven to move to any coordinate point in the visual identification visual field; therefore, the Z-axis fine adjustment mechanism and the Z-axis movement mechanism can accurately drive the suction nozzle to contact the contactable position of the chip, so that a special circuit of the chip is avoided, and the yield of chip processing is improved. In addition, as the visual identification instrument and the Y-axis fine adjustment mechanism are both arranged at the moving end of the Z-axis movement mechanism, the reference standard is the same, and the movement of the Y-axis fine adjustment mechanism can not influence the identification effect of the visual identification instrument, so that the reference system error is avoided.

On the basis of the technical scheme, the utility model can be improved as follows.

Further, the X-axis movement mechanism comprises a linear motor, the fixed end of the linear motor is fixed on the portal frame, and the movement end of the linear motor is connected with the Z-axis movement mechanism.

The operation is stable, the vibration is small, and the vibration is avoided to influence the visual recognition error.

Further, a first drag chain is further arranged on the portal frame, one end of the first drag chain is connected with the portal frame, and the other end of the first drag chain is connected with the moving end of the linear motor.

The cable wiring device is convenient for wiring cables of the Z-axis movement mechanism, the visual identification instrument, the Y-axis fine adjustment mechanism, the Z-axis fine adjustment mechanism, the rotary fine adjustment mechanism and other instruments, has a compact structure, and avoids cable dislocation interference with movement parts and damage in the movement process.

Further, as shown in fig. 2: the Z-axis movement mechanism comprises an output motor, a first support and a second support, wherein the first support is fixed at the movement end of the linear motor, the output motor is fixed on the first support, and the second support is in sliding connection with the first support; an output shaft of the output motor is downwards arranged along the Z axis and provided with a screw rod, two ends of the screw rod are rotationally connected with the first bracket, and the second bracket is in threaded connection with the middle part of the screw rod; the visual identification instrument and the Y-axis fine adjustment mechanism are both arranged on the second bracket.

Through first support and second support direction, output motor drive, the second support can drive visual identification instrument with Y axle fine setting mechanism reciprocates along the Z axle, operates steadily, convenient operation.

Further, a second drag chain is further arranged on the first bracket, one end of the second drag chain is connected with the first bracket, and the other end of the second drag chain is connected with the second bracket.

The cable wiring device is convenient for wiring cables of visual identification instruments, Y-axis fine tuning mechanisms, Z-axis fine tuning mechanisms, rotary fine tuning mechanisms and other instruments, has a compact structure, and avoids the dislocation of cables in the movement process from interfering with moving parts and causing damage.

Further, the visual recognition instrument is a CCD camera.

The automatic suction nozzle positioning device can be used for identifying chips and setting coordinates, is convenient for quickly controlling the Y-axis fine adjustment mechanism and the rotary fine adjustment mechanism to drive the suction nozzle to move to a specific position, and has high working efficiency.

Further, the Y-axis fine tuning mechanism comprises a first voice coil motor, the first voice coil motor is fixed on the second bracket, and a third bracket is arranged at the output end of the first voice coil motor; the Z-axis fine adjustment mechanism is arranged on the third bracket.

Through voice coil motor, the response is fast, is convenient for control the suction nozzle fast along Y axle fine setting, and work efficiency is high.

Further, the Z-axis fine adjustment mechanism comprises a second voice coil motor, the second voice coil motor is fixed on the third bracket, and a fourth bracket is arranged at the output end of the second voice coil motor; the rotary fine adjustment mechanism is arranged on the fourth bracket.

The voice coil motor is fast in response, so that the suction nozzle can be conveniently and quickly controlled to be finely adjusted along the Z axis, and the working efficiency is high; and the impact force of the suction nozzle on the chip can be buffered, so that the chip is prevented from being damaged.

Further, the rotary fine adjustment mechanism comprises a DD motor, the DD motor is fixed on the fourth bracket, and the output end of the DD motor is connected with the suction nozzle.

Vibration and noise are avoided, so that the motion of the suction nozzle is stable, and the impact on the chip caused by vibration is avoided.

Drawings

Fig. 1 is a schematic structural view of the present utility model.

Fig. 2 is a detailed view of the structure of the Z-axis movement mechanism.

In the drawings, the technical features represented by the reference numerals are as follows:

1-a portal frame; 2-X axis movement mechanism; a 3-Z axis movement mechanism; 4-visual recognition instrument; 5-Y axis fine adjustment mechanism; 6-Z axis fine adjustment mechanism; 7-a rotary fine adjustment mechanism; 8-suction nozzle; 9-outputting a motor; 10-a first stent; 11-screw rod; 12-a second stent; 13-a first voice coil motor; 14-a third bracket; 15-a second voice coil motor; 16-fourth rack; a 17-DD motor; 18-a first tow chain; 19-a second drag chain.

Detailed Description

The principles and features of the present utility model are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the utility model and are not to be construed as limiting the scope of the utility model.

The utility model is seen in fig. 1-2.

The utility model provides a multi-axis chip suction device, which comprises a portal frame 1, wherein an X-axis movement mechanism 2 is arranged on the portal frame 1, a Z-axis movement mechanism 3 is arranged at the movement end of the X-axis movement mechanism 2, and a visual identification instrument 4 and a Y-axis fine adjustment mechanism 5 are arranged at the movement end of the Z-axis movement mechanism 3; the motion end of the Y-axis fine tuning mechanism 5 is provided with a Z-axis fine tuning mechanism 6, the motion end of the Z-axis fine tuning mechanism 6 is provided with a rotary fine tuning mechanism 7, the motion end of the rotary fine tuning mechanism 7 is provided with a suction nozzle 8, the lens of the visual identification instrument 4 and the suction nozzle 8 are arranged downwards along the Z-axis, and the rotary fine tuning mechanism 7 can drive the suction nozzle 8 to rotate along the X-Y plane.

Principle of:

When the chip sucking machine is used, firstly, the chip sucking machine moves to the upper part of a chip tray through the X-axis moving mechanism 2, then moves downwards to a position close to the chip tray through the Z-axis moving mechanism 3, then positions a chip to be sucked through the visual recognition instrument 4, recognizes a special line position, determines X, Y coordinates of a contactable position of the suction nozzle 8, finally drives the suction nozzle 8 to corresponding X, Y coordinates through the Y-axis fine-tuning mechanism 5 and the rotary fine-tuning mechanism 7, and drives the suction nozzle 8 to contact the chip downwards along the Z-axis through the Z-axis fine-tuning mechanism 6, so that the chip can be sucked.

Note that: the rotary fine adjustment mechanism 7 can drive the suction nozzle 8 to rotate along the X-Y plane, the Y-axis fine adjustment mechanism 5 can be adjusted along the Y axis, and the combination of the two can drive the suction nozzle 8 to any coordinate point in a certain plane area. The visual recognition instrument 4 can adopt a CCD camera to recognize the chip and set the coordinates of each part as the existing functions, and because the visual recognition instrument 4 and the Y-axis fine adjustment mechanism 5 are jointly arranged at the moving end of the Z-axis movement mechanism 3, after the Z-axis movement mechanism 3 stops, the movement of the Y-axis fine adjustment mechanism 5 can not influence the originally set coordinates, so that the Y-axis fine adjustment mechanism 5 and the rotary fine adjustment mechanism 7 can be accurately controlled according to the visual recognition instrument 4 to drive the suction nozzle 8 to move to the coordinates of the chip, which can be contacted. In addition, the relative position of the suction nozzle 8 and the chip can be directly fed back through the visual recognition instrument 4 without setting coordinates, and then the suction nozzle 8 can be driven to contact the specific position of the chip through the mutual matching of the Y-axis fine adjustment mechanism 5, the rotary fine adjustment mechanism 7 and the Z-axis fine adjustment mechanism 6.

In summary, by adopting the utility model, the chip can be identified and the X, Y coordinates of the contactable position of the suction nozzle 8 can be determined by arranging the lens of the visual identification instrument 4 and the suction nozzle 8 downwards along the Z axis; the X-axis movement mechanism 2 and the Y-axis fine adjustment mechanism 5 are matched with the rotary fine adjustment mechanism 7, so that the suction nozzle 8 can be driven to move to any coordinate point in the visual identification visual field; therefore, the Z-axis fine adjustment mechanism 6 and the Z-axis movement mechanism 3 can accurately drive the suction nozzle 8 to contact the contactable position of the chip, so that the special circuit of the chip is avoided, and the processing yield of the chip is improved. In addition, since the visual identification instrument 4 and the Y-axis fine adjustment mechanism 5 are both arranged at the moving end of the Z-axis movement mechanism 3, the reference standard is the same, and the identification effect of the visual identification instrument 4 is not affected by the movement of the Y-axis fine adjustment mechanism 5 and the error of the reference system is avoided.

Further, the X-axis motion mechanism 2 includes a linear motor, a fixed end of the linear motor is fixed on the gantry 1, and a motion end of the linear motor is connected with the Z-axis motion mechanism 3.

The operation is stable, the vibration is small, and the vibration is avoided to influence the visual recognition error.

Further, a first drag chain 18 is further arranged on the portal frame 1, one end of the first drag chain 18 is connected with the portal frame 1, and the other end of the first drag chain is connected with the moving end of the linear motor.

The cable wiring of the Z-axis movement mechanism 3, the visual identification instrument 4, the Y-axis fine adjustment mechanism 5, the Z-axis fine adjustment mechanism 6, the rotary fine adjustment mechanism 7 and other instruments is convenient, the structure is compact, and the cable dislocation interference on moving parts and damage caused in the movement process are avoided.

Further, as shown in fig. 2: the Z-axis movement mechanism 3 comprises an output motor 9, a first support 10 and a second support 12, wherein the first support 10 is fixed at the movement end of the linear motor, the output motor 9 is fixed on the first support 10, and the second support 12 is in sliding connection with the first support 10; an output shaft of the output motor 9 is downwards arranged along the Z axis and provided with a screw rod 11, two ends of the screw rod 11 are rotationally connected with a first bracket 10, and a second bracket 12 is in threaded connection with the middle part of the screw rod 11; the visual identification instrument 4 and the Y-axis fine adjustment mechanism 5 are both arranged on the second bracket 12.

The first support 10 and the second support 12 are used for guiding, the output motor 9 is used for driving, the second support 12 can drive the visual identification instrument 4 and the Y-axis fine adjustment mechanism 5 to move up and down along the Z axis, and the operation is stable and the operation is convenient.

Further, the first bracket 10 is further provided with a second drag chain 19, one end of the second drag chain 19 is connected with the first bracket 10, and the other end is connected with the second bracket 12.

The cable wiring of the visual identification instrument 4, the Y-axis fine adjustment mechanism 5, the Z-axis fine adjustment mechanism 6, the rotary fine adjustment mechanism 7 and other instruments is convenient, the structure is compact, and the cable dislocation interference with moving parts and damage caused in the moving process are avoided.

Further, the visual recognition instrument 4 is a CCD camera.

The automatic chip identification device can be used for identifying chips and setting coordinates, is convenient for quickly controlling the Y-axis fine adjustment mechanism 5 and the rotary fine adjustment mechanism 7 to drive the suction nozzle 8 to move to a specific position, and has high working efficiency.

Further, the Y-axis fine tuning mechanism 5 includes a first voice coil motor 13, the first voice coil motor 13 is fixed on the second bracket 12, and a third bracket 14 is provided at an output end of the first voice coil motor 13; the Z-axis fine adjustment mechanism 6 is arranged on the third bracket 14.

Through voice coil motor, the response is fast, is convenient for control suction nozzle 8 fast along Y axle fine setting, and work efficiency is high.

Further, the Z-axis fine tuning mechanism 6 includes a second voice coil motor 15, the second voice coil motor 15 is fixed on the third bracket 14, and a fourth bracket 16 is provided at an output end of the second voice coil motor 15; the rotary fine adjustment mechanism 7 is arranged on the fourth bracket 16.

Note that: in fig. 2, the second voice coil motor 15 is mostly hidden by the third bracket 14, and the fourth bracket 16 to which the output end thereof is connected is visible.

The voice coil motor is fast in response, so that the suction nozzle 8 can be conveniently and quickly controlled to be finely adjusted along the Z axis, and the working efficiency is high; and can buffer the impact force of the suction nozzle 8 to the chip, thereby avoiding the chip damage.

Further, the rotary fine adjustment mechanism 7 comprises a DD motor 17, the DD motor 17 is fixed on the fourth bracket 16, and the output end of the DD motor 17 is connected with the suction nozzle 8.

Note that: the contact of the suction nozzle 8 can be arranged eccentrically with the output end of the DD motor 17; in addition, the XY coordinates of the suction nozzle 8 may be adjusted by the X-axis movement mechanism 2 cooperating with the Y-axis fine adjustment mechanism.

Vibration and noise are avoided, so that the motion of the suction nozzle 8 is stable, and the impact on a chip caused by vibration is avoided.

Further, if an order description term occurs, for example: "first," "second," etc. are used in this specification for convenience in understanding or simplifying the description, for example, in order to distinguish between a plurality of technical features that have the same type or function, but may have to be individually referred to, and this specification may be referred to by a prefix or suffix sequence description term. Thus, no indication or implication of relative importance or an implication of the number of technical features indicated is to be understood. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, if structural relative action description terms are used, for example: "mounted," "connected," "secured," and the like are to be construed broadly, unless otherwise specifically indicated and limited. For example, "mounted," "connected," etc., may be fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be the communication between the two elements or the interaction relationship between the two elements; the fixing can be integrated fixing or detachable fixing through a fastener; can be directly fixed or fixed through an intermediate medium. The specific meaning of the above descriptive terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances, the context in which it is located, the consistency of the context, etc.

In the present utility model, if a descriptive term containing an attached or connected meaning, e.g., a first feature "on" or "under" a second feature, is not to be interpreted in a limiting sense unless expressly stated or limited otherwise, e.g., the "on" or "under" can be either the direct contact of the first and second features or the indirect contact of the first and second features via an intermediary. The specific meaning of the above descriptive terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances, the context in which it is located, the consistency of the context, etc.

Further, a first feature "above," "over" and "on" a second feature may be that the first feature is directly above or obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms are not necessarily for the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments, examples, and features of various embodiments, examples described in this specification may be combined and combined by persons skilled in the art without contradiction, and such combination or combination is intended to fall within the broad scope of the utility model.

While embodiments of the present utility model have been shown and described above, it should be understood that the above embodiments are illustrative and not to be construed as limiting the present utility model, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art in light of the disclosure of the utility model as may be acquired within the scope of the disclosure.

Claims (9)

1. A multiaxis chip suction device which characterized in that: the device comprises a portal frame (1), wherein an X-axis movement mechanism (2) is arranged on the portal frame (1), a Z-axis movement mechanism (3) is arranged at the movement end of the X-axis movement mechanism (2), and a visual identification instrument (4) and a Y-axis fine adjustment mechanism (5) are arranged at the movement end of the Z-axis movement mechanism (3); the motion end of Y axle fine setting mechanism (5) is equipped with Z axle fine setting mechanism (6), and the motion end of Z axle fine setting mechanism (6) is equipped with rotatory fine setting mechanism (7), and the motion end of rotatory fine setting mechanism (7) is equipped with suction nozzle (8), and camera lens and suction nozzle (8) of visual identification instrument (4) all follow Z axle and arrange down, and rotatory fine setting mechanism (7) can drive suction nozzle (8) along X-Y plane rotation.

2. The multi-axis chip suction device according to claim 1, wherein: the X-axis movement mechanism (2) comprises a linear motor, the fixed end of the linear motor is fixed on the portal frame (1), and the movement end of the linear motor is connected with the Z-axis movement mechanism (3).

3. The multi-axis chip suction device according to claim 2, wherein: the gantry (1) is further provided with a first drag chain (18), one end of the first drag chain (18) is connected with the gantry (1), and the other end of the first drag chain is connected with the moving end of the linear motor.

4. The multi-axis chip suction device according to claim 2, wherein: the Z-axis movement mechanism (3) comprises an output motor (9), a first bracket (10) and a second bracket (12), wherein the first bracket (10) is fixed at the movement end of the linear motor, the output motor (9) is fixed on the first bracket (10), and the second bracket (12) is in sliding connection with the first bracket (10); an output shaft of the output motor (9) is downwards arranged along the Z axis and provided with a screw rod (11), two ends of the screw rod (11) are rotationally connected with the first bracket (10), and the second bracket (12) is in threaded connection with the middle part of the screw rod (11); the visual identification instrument (4) and the Y-axis fine adjustment mechanism (5) are arranged on the second bracket (12).

5. The multi-axis chip suction device according to claim 4, wherein: the first bracket (10) is also provided with a second drag chain (19), one end of the second drag chain (19) is connected with the first bracket (10), and the other end is connected with the second bracket (12).

6. The multi-axis chip suction device according to claim 4, wherein: the visual recognition instrument (4) is a CCD camera.

7. The multi-axis chip suction device according to claim 4, wherein: the Y-axis fine adjustment mechanism (5) comprises a first voice coil motor (13), the first voice coil motor (13) is fixed on the second bracket (12), and a third bracket (14) is arranged at the output end of the first voice coil motor (13); the Z-axis fine adjustment mechanism (6) is arranged on the third bracket (14).

8. The multi-axis chip suction device according to claim 7, wherein: the Z-axis fine adjustment mechanism (6) comprises a second voice coil motor (15), the second voice coil motor (15) is fixed on the third bracket (14), and a fourth bracket (16) is arranged at the output end of the second voice coil motor (15); the rotary fine adjustment mechanism (7) is arranged on the fourth bracket (16).

9. The multi-axis chip suction device according to claim 8, wherein: the rotary fine adjustment mechanism (7) comprises a DD motor (17), the DD motor (17) is fixed on the fourth bracket (16), and the output end of the DD motor (17) is connected with the suction nozzle (8).