JPH0430729U - - Google Patents
Info
- Publication number
- JPH0430729U JPH0430729U JP7262990U JP7262990U JPH0430729U JP H0430729 U JPH0430729 U JP H0430729U JP 7262990 U JP7262990 U JP 7262990U JP 7262990 U JP7262990 U JP 7262990U JP H0430729 U JPH0430729 U JP H0430729U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- wafer
- processing
- carrier
- pipes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 claims 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990072629U JP2568799Y2 (ja) | 1990-07-10 | 1990-07-10 | ウエハー処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990072629U JP2568799Y2 (ja) | 1990-07-10 | 1990-07-10 | ウエハー処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0430729U true JPH0430729U (pt) | 1992-03-12 |
JP2568799Y2 JP2568799Y2 (ja) | 1998-04-15 |
Family
ID=31610735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990072629U Expired - Fee Related JP2568799Y2 (ja) | 1990-07-10 | 1990-07-10 | ウエハー処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2568799Y2 (pt) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999034420A1 (fr) * | 1997-12-26 | 1999-07-08 | Spc Electronics Corporation | Equipement de nettoyage de tranches et plateau destine a etre utilise dans un equipement de nettoyage de tranches |
JP2018130722A (ja) * | 2018-04-26 | 2018-08-23 | 光洋サーモシステム株式会社 | 洗浄装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0276837U (pt) * | 1988-11-30 | 1990-06-13 |
-
1990
- 1990-07-10 JP JP1990072629U patent/JP2568799Y2/ja not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0276837U (pt) * | 1988-11-30 | 1990-06-13 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999034420A1 (fr) * | 1997-12-26 | 1999-07-08 | Spc Electronics Corporation | Equipement de nettoyage de tranches et plateau destine a etre utilise dans un equipement de nettoyage de tranches |
JP2018130722A (ja) * | 2018-04-26 | 2018-08-23 | 光洋サーモシステム株式会社 | 洗浄装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2568799Y2 (ja) | 1998-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |