JPH0430729U - - Google Patents

Info

Publication number
JPH0430729U
JPH0430729U JP7262990U JP7262990U JPH0430729U JP H0430729 U JPH0430729 U JP H0430729U JP 7262990 U JP7262990 U JP 7262990U JP 7262990 U JP7262990 U JP 7262990U JP H0430729 U JPH0430729 U JP H0430729U
Authority
JP
Japan
Prior art keywords
processing liquid
wafer
processing
carrier
pipes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7262990U
Other languages
English (en)
Japanese (ja)
Other versions
JP2568799Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990072629U priority Critical patent/JP2568799Y2/ja
Publication of JPH0430729U publication Critical patent/JPH0430729U/ja
Application granted granted Critical
Publication of JP2568799Y2 publication Critical patent/JP2568799Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1990072629U 1990-07-10 1990-07-10 ウエハー処理装置 Expired - Fee Related JP2568799Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990072629U JP2568799Y2 (ja) 1990-07-10 1990-07-10 ウエハー処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990072629U JP2568799Y2 (ja) 1990-07-10 1990-07-10 ウエハー処理装置

Publications (2)

Publication Number Publication Date
JPH0430729U true JPH0430729U (enrdf_load_html_response) 1992-03-12
JP2568799Y2 JP2568799Y2 (ja) 1998-04-15

Family

ID=31610735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990072629U Expired - Fee Related JP2568799Y2 (ja) 1990-07-10 1990-07-10 ウエハー処理装置

Country Status (1)

Country Link
JP (1) JP2568799Y2 (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999034420A1 (en) * 1997-12-26 1999-07-08 Spc Electronics Corporation Wafer cleaning equipment and tray for use in wafer cleaning equipment
JP2018130722A (ja) * 2018-04-26 2018-08-23 光洋サーモシステム株式会社 洗浄装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276837U (enrdf_load_html_response) * 1988-11-30 1990-06-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276837U (enrdf_load_html_response) * 1988-11-30 1990-06-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999034420A1 (en) * 1997-12-26 1999-07-08 Spc Electronics Corporation Wafer cleaning equipment and tray for use in wafer cleaning equipment
JP2018130722A (ja) * 2018-04-26 2018-08-23 光洋サーモシステム株式会社 洗浄装置

Also Published As

Publication number Publication date
JP2568799Y2 (ja) 1998-04-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees