JPH0430171B2 - - Google Patents
Info
- Publication number
- JPH0430171B2 JPH0430171B2 JP56103065A JP10306581A JPH0430171B2 JP H0430171 B2 JPH0430171 B2 JP H0430171B2 JP 56103065 A JP56103065 A JP 56103065A JP 10306581 A JP10306581 A JP 10306581A JP H0430171 B2 JPH0430171 B2 JP H0430171B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- substrate
- oxide
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 27
- 239000010409 thin film Substances 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 229910052742 iron Inorganic materials 0.000 claims description 5
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 24
- 230000005291 magnetic effect Effects 0.000 description 21
- 239000010949 copper Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 14
- 229910001566 austenite Inorganic materials 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Compounds Of Iron (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56103065A JPS584914A (ja) | 1981-07-01 | 1981-07-01 | 酸化物磁性薄膜形成用スパツタ・タ−ゲツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56103065A JPS584914A (ja) | 1981-07-01 | 1981-07-01 | 酸化物磁性薄膜形成用スパツタ・タ−ゲツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS584914A JPS584914A (ja) | 1983-01-12 |
| JPH0430171B2 true JPH0430171B2 (de) | 1992-05-21 |
Family
ID=14344261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56103065A Granted JPS584914A (ja) | 1981-07-01 | 1981-07-01 | 酸化物磁性薄膜形成用スパツタ・タ−ゲツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584914A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57143161U (de) * | 1981-03-03 | 1982-09-08 |
-
1981
- 1981-07-01 JP JP56103065A patent/JPS584914A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584914A (ja) | 1983-01-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2963003B2 (ja) | 軟磁性合金薄膜及びその製造方法 | |
| JPH0430171B2 (de) | ||
| JPH06168822A (ja) | 垂直磁化膜、垂直磁化膜用多層膜及び垂直磁化膜の製造法 | |
| US4641213A (en) | Magnetic head | |
| JPS58100412A (ja) | 軟質磁性材料の製法 | |
| JPS6313256B2 (de) | ||
| JP2570337B2 (ja) | 軟磁性積層膜 | |
| JPS62117143A (ja) | 磁気記録媒体の製造方法 | |
| JP2546275B2 (ja) | 軟磁性薄膜 | |
| JP3181723B2 (ja) | 軟磁性合金膜 | |
| JPS6057211B2 (ja) | 磁気記録媒体の製作法 | |
| JP2522284B2 (ja) | 軟磁性薄膜 | |
| JPS60109215A (ja) | 酸化鉄磁性薄膜形成用スパッタ・タ−ゲット | |
| JPH0365650B2 (de) | ||
| JPH1092640A (ja) | 超高密度磁気記録媒体および製法 | |
| JPH0540916A (ja) | 磁気ヘツド | |
| JPH03173915A (ja) | 磁気記録媒体の製造方法 | |
| JPS63146417A (ja) | 軟磁性薄膜 | |
| JPH0365649B2 (de) | ||
| JPS6032261B2 (ja) | 磁気記録媒体の製造方法 | |
| JPH0552567B2 (de) | ||
| JPS6126131B2 (de) | ||
| JPS6249724B2 (de) | ||
| JPH08241813A (ja) | 磁気ヘッド用軟磁性薄膜材料 | |
| JPS61224125A (ja) | 磁気記録媒体 |