JPH04298808A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To substantially prevent the peeling of taking-out electrodes by forming the surface layers of a region of lead conductor films conducting to coil conductor films where the taking-out electrodes are formed of copper film and providing the taking-out electrodes on the copper films. CONSTITUTION:A lower magnetic film 2, a gap film 3, the coil conductor film 5, and an interlayer insulating film 6, etc., are formed on a base body 1 and thereafter, the parts corresponding to the taking-out electrode forming regions of the copper films 71, 81 to constitute the lead conductor films are masked by a photoresist, etc., before an upper magnetic film is formed. After the mask 12 is removed, a resist mask 13 is stuck onto the thin-film magnetic conversion element and lead conductor films 7, 8. A copper plating film is then grown by executing a copper plating treatment, by which the taking-out electrodes 9, 10 consisting of the copper plating film are obtd. The resist mask is thereafter removed and the surface of the protective film 11 is polished, by which the surface leveling of the taking-out electrodes 9, 10 is executed.

Description

[Detailed description of the invention]

0001

[Industrial Field of Application] The present invention relates to a thin-film magnetic head, in which at least the surface layer of a lead conductor film connected to a coil conductor film in a region where an extraction electrode is formed is made of a copper film. By forming an extraction electrode on the membrane,
The stress generated between the base and the lead conductor film is reduced to prevent the lead electrode from peeling off.

0002

2. Description of the Related Art FIG. 10 is a perspective view of a main part of a conventionally well-known thin film magnetic head, FIG. 11 is an enlarged sectional view of the same main part, and FIG. 12 is an enlarged sectional view of an extraction electrode portion. In these figures, 1 is a base made of ceramic;
2 is a lower magnetic film, 3 is a gap film made of alumina, etc., 4
1 is an upper magnetic film, 5 is a coil conductor film, 6 is an insulating film made of organic resin such as novolac resin, 7 and 8 are lead conductor films, 9 and 10 are extraction electrodes, and 11 is a protection film such as alumina that covers each part. It is a membrane.

The base 1 is a part used as a slider, and is a ceramic structure having an insulating film 102 made of alumina or the like adhered to the surface of a main part 101 made of Al2O3-TiC or the like.

[0004] The tips of the lower magnetic film 2 and the upper magnetic film 4 form pole parts 2 facing each other with a gap film 3 having a minute thickness in between.
1 and 41, and reading and writing are performed in the pole parts 21 and 41. Reference numerals 22 and 42 are yoke parts, which are connected at ends opposite to the pole parts 21 and 41.

The insulating film 6 is composed of a plurality of layers, and a coil conductor film 5 is formed on the insulating film 6 so as to spiral around the joint between the yoke parts 22 and 42. The coil conductor film 5 usually has a structure in which a copper film is deposited on a base film by means such as plating.

The lead conductor films 7 and 8 have a structure in which permalloy (Ni--Fe) films 72 and 82 are deposited on copper films 71 and 81. The copper films 71 and 81 are formed simultaneously in the step of forming the coil conductor film 5, and the permalloy films 72 and 82 are formed simultaneously in the step of plating the upper magnetic film 4.

The extraction electrodes 9 and 10 are called bumps by those skilled in the art, and are later connected to an external conductor such as a lead wire. The extraction electrodes 9 and 10 are permalloy films 72 and 82 that constitute the lead conductor films 7 and 8 as copper plating films.
formed on top of.

[0008]

However, in the conventional thin film magnetic head in which the extraction electrodes 9 and 10 are formed on the permalloy films 72 and 82, accidents often occur in which the extraction electrodes 9 and 10 peel off. Ta. In particular, Al2O3
- In a thin film magnetic head having a structure in which an alumina insulating film 102 is deposited on the surface of a main portion 101 made of TiC,
In the region below the extraction electrodes 9 and 10, accidents were often observed in which the extraction electrodes 9 and 10 peeled off while the insulating film 102 was attached. The main cause of peeling is the permalloy film 72,
This is thought to be due to the combination of the tensile stress of 82 and the copper lead-out electrodes 9 and 10. That is, under the influence of the tensile stress of the permalloy films 72 and 82 and the copper lead-out electrodes 9 and 10, the insulating film 1
Crack A occurs in 02. When alumina is used as the insulating film 102, compressive stress is generated, and cracks are more likely to occur due to the interaction between the tensile stress and the compressive stress.

Moreover, since this type of thin film magnetic head usually involves heat treatment in its manufacturing process,
Under the influence of thermal stress, cracks are more likely to occur.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned conventional problems, to reduce the stress generated between the base and the lead conductor film, and to provide a highly reliable device capable of preventing the lead-out electrode from peeling off. An object of the present invention is to provide a thin film magnetic head.

[0011]

[Means for Solving the Problems] In order to solve the above-mentioned problems, a thin film magnetic head according to the present invention includes a thin film magnetic transducer element including a magnetic film and a coil conductor film on a base body, and a thin film magnetic transducer element that is electrically connected to the coil conductor film. A thin film magnetic head having a lead conductor film and an extraction electrode formed on the lead conductor film, wherein at least a surface layer of the lead conductor film in a region where the extraction electrode is formed is a copper film. , the extraction electrode is provided on the copper film.

0012

[Function] The surface layer of the lead conductor film in the area where the extraction electrode is formed is a copper film, and the extraction electrode is provided on the copper film, and the area where the extraction electrode is located is one of the areas where tensile stress is generated. There is no permalloy film to cause this. For this reason,
Cracks in the substrate surface layer and accompanying electrode peeling are less likely to occur.

The present invention is applicable not only to thin film magnetic heads for longitudinal recording and reproducing, but also to thin film magnetic heads for perpendicular recording and reproducing.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a perspective view of a thin film magnetic head according to the present invention, and FIG. 2 is an enlarged sectional view of a lead-out electrode portion. In the figures, the same reference numerals as in FIGS. 10 to 12 indicate the same components. As shown in the figure, the surface layer of the lead conductor films 7 and 8 in the region where the extraction electrode is formed is a copper film 71,
81, and the extraction electrodes 9 and 10 are made of copper films 71 and 81.
is placed on top of. Although not shown, the copper film 7
1 and 81 have a base film. The permalloy films 72 and 82 are located outside the extraction electrodes 9 and 10 and are not formed under the extraction electrodes 9 and 10. It is also possible that the entire lead conductor films 7 and 8 are made of copper films 71 and 81 without the permalloy films 72 and 82.

As described above, there is no permalloy film that causes tensile stress in the region where the extraction electrodes 9 and 10 are located. Therefore, cracks in the insulating film 102, which is the surface layer of the base 1, and electrode peeling accompanying the cracks can be reliably prevented.

Lead conductor film 7 having the above-described structure
, 8 and the extraction electrodes 9 and 10 can be easily manufactured using pattern forming techniques well known in this type of thin film magnetic head manufacturing technology. An example is shown in FIGS. 3 to 9. Although only one thin film magnetic transducer is shown in FIGS. 3 to 9, the thin film magnetic head manufacturing process is carried out with the substrate 1 as a wafer and a large number of thin film magnetic transducers aligned. .

First, in the process shown in FIG. 3, after forming a lower magnetic film 2, a gap film 3, a coil conductor film 5, an interlayer insulating film 6, etc. on a substrate 1 which is a wafer, and before forming an upper magnetic film. Next, portions of the copper films 71 and 81, which will become lead conductor films, corresponding to the extraction electrode forming region are masked 12 with photoresist or the like. The copper films 71 and 81 are formed at the same time in the process of forming the coil conductor film 5.

Next, as shown in FIG. 4, an upper magnetic film 4 is formed. In the upper magnetic film forming step, the upper magnetic film 4 mainly composed of permalloy is formed on the insulating film 6, and the copper film constituting the lead conductor film is formed on the insulating film 6, except for the part covered by the mask 12. Also on the surface of 71 and 81,
Permalloy films 72 and 82 are attached.

Next, after removing the mask 12, a resist mask 13 is deposited on the thin film magnetic transducer element and lead conductor films 7 and 8, as shown in FIG. The resist mask 13 removes the copper films 71 and 8 covered by the mask 12.
1, patterning is performed to form a pattern P1 for an extraction electrode.

Next, as shown in FIG. 6, a copper plating process is performed to grow a copper plating film on the copper films 71 and 81 within the pattern P1 defined by the resist mask 13. Thereby, lead electrodes 9 and 10 made of copper plating film are obtained.

After that, as shown in FIG. 7, after removing the resist mask 13, as shown in FIG. 8, a protective film 11 is formed by means such as sputtering, and then as shown in FIG. Polishing the surface of 11, the extraction electrodes 9, 1
Perform surface leveling of 0.

[0022] The above-mentioned manufacturing method is just one example, and it goes without saying that various manufacturing methods can be used.

[0023]

[Effects of the Invention] As described above, in the thin film magnetic head according to the present invention, the surface layer of the region where the lead conductor film that is electrically connected to the coil conductor film is formed is a copper film, and the lead electrode is formed of a copper film. Since it is provided on the above-mentioned copper film, the stress generated between the base and the lead conductor film is small, and a highly reliable thin-film magnetic head in which the extraction electrode does not easily peel off can be provided.

[Brief explanation of drawings]

FIG. 1 is a perspective view of essential parts of a thin film magnetic head according to the present invention.

FIG. 2 is an enlarged sectional view of the extraction electrode portion. 3 to 9 are diagrams showing an example of a method for manufacturing a thin film magnetic head according to the present invention.

FIG. 10 is a perspective view of a main part of a conventional thin film magnetic head.

FIG. 11 is a cross-sectional view of the main parts.

FIG. 12 is an enlarged sectional view of the extraction electrode portion.

[Explanation of symbols]

1 Base 2 Lower magnetic film 3
Gap film 4 Upper magnetic film 5 Coil conductor film 6
Insulating films 7, 8 Lead conductor films 9, 10 Extracting electrodes 71, 81 Copper films 72, 82 Permalloy film

Claims (1)

[Claims] 1. A thin film magnetic conversion element including a magnetic film and a coil conductor film, a lead conductor film electrically connected to the coil conductor film, and an extraction electrode formed on the lead conductor film on a base. The thin film magnetic head is characterized in that at least a surface layer of the lead conductor film in a region where the extraction electrode is formed is a copper film, and the extraction electrode is provided on the copper film. Thin film magnetic head.