JPH0428442U - - Google Patents
Info
- Publication number
- JPH0428442U JPH0428442U JP6869890U JP6869890U JPH0428442U JP H0428442 U JPH0428442 U JP H0428442U JP 6869890 U JP6869890 U JP 6869890U JP 6869890 U JP6869890 U JP 6869890U JP H0428442 U JPH0428442 U JP H0428442U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- support substrate
- probes
- wiring
- insulating ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6869890U JPH0428442U (cs) | 1990-06-28 | 1990-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6869890U JPH0428442U (cs) | 1990-06-28 | 1990-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0428442U true JPH0428442U (cs) | 1992-03-06 |
Family
ID=31603357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6869890U Pending JPH0428442U (cs) | 1990-06-28 | 1990-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0428442U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008093465A1 (ja) * | 2007-01-29 | 2008-08-07 | Advantest Corporation | 試験装置およびプローブカード |
-
1990
- 1990-06-28 JP JP6869890U patent/JPH0428442U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008093465A1 (ja) * | 2007-01-29 | 2008-08-07 | Advantest Corporation | 試験装置およびプローブカード |
| US7960991B2 (en) | 2007-01-29 | 2011-06-14 | Advantest Corporation | Test apparatus and probe card |
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