JPH04282879A - Piezoelectric actuator and production thereof - Google Patents
Piezoelectric actuator and production thereofInfo
- Publication number
- JPH04282879A JPH04282879A JP3044599A JP4459991A JPH04282879A JP H04282879 A JPH04282879 A JP H04282879A JP 3044599 A JP3044599 A JP 3044599A JP 4459991 A JP4459991 A JP 4459991A JP H04282879 A JPH04282879 A JP H04282879A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- layer
- piezoelectric actuator
- slurry
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 239000002002 slurry Substances 0.000 claims abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000011230 binding agent Substances 0.000 claims abstract description 7
- 230000005484 gravity Effects 0.000 claims abstract description 4
- 238000010304 firing Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 11
- 239000011146 organic particle Substances 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 239000005416 organic matter Substances 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims 1
- 238000000465 moulding Methods 0.000 abstract description 3
- 239000003795 chemical substances by application Substances 0.000 abstract 2
- 239000000203 mixture Substances 0.000 description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 4
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 4
- 239000002518 antifoaming agent Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- -1 purity 99.9) %) Chemical compound 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、計測機に好適に用いら
れる圧電アクチュエータ製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a piezoelectric actuator suitably used in measuring instruments.
【０００２】0002
【従来の技術】従来、圧電アクチュエータとしては圧電
材料と誘電材料を接着剤で接合して作成されたものがあ
った。また、接着剤を使用しない圧電アクチュエータと
して、上側が圧電特性に優れ、下側に移るにつれて徐々
に誘電率が向上する傾斜機能材料を使用したものがあっ
た。この傾斜機能材料を使用した圧電アクチュエータに
ついては、例えば、日経ニューマテリアル，１９８９年
４月３日号，Ｐ１１に示されている。その製造方法は、
先ず１層目に誘電性の高い組成の粉末を、次に圧電性の
高い組成の粉末を充填し、プレス成形の後、１２００℃
で３〜６時間焼成する。このように製造することにより
、焼成中に原子が拡散し、組成が圧電層から誘電層に傾
斜した圧電アクチュエータが形成される。2. Description of the Related Art Conventionally, piezoelectric actuators have been made by bonding a piezoelectric material and a dielectric material with an adhesive. Furthermore, as a piezoelectric actuator that does not use adhesive, there is one that uses a functionally graded material that has excellent piezoelectric properties on the upper side and whose dielectric constant gradually increases as it moves to the lower side. A piezoelectric actuator using this functionally graded material is described, for example, in Nikkei New Materials, April 3, 1989 issue, P11. The manufacturing method is
First, the first layer was filled with powder with a high dielectric composition, then with a powder with a high piezoelectric composition, and after press molding, the powder was heated to 1200°C.
Bake for 3 to 6 hours. By manufacturing in this manner, atoms diffuse during firing, forming a piezoelectric actuator with a composition gradient from the piezoelectric layer to the dielectric layer.
【０００３】0003
【発明が解決しようとする課題】しかしながら、前記の
圧電材料と誘電材料を接着剤で接合して製造する方法で
は、接着剤の耐熱性に限界があるために高温下で使用で
きないばかりか、大振幅で長時間にわたり使用すると、
圧電アクチュエータの接合部に剥がれや、ずれが生じ、
計測機としての十分な精度が得られなかった。[Problems to be Solved by the Invention] However, the method of manufacturing the piezoelectric material and the dielectric material by bonding them with an adhesive has a limit in the heat resistance of the adhesive, so not only can it not be used at high temperatures, but also When used for a long time at high amplitudes,
Peeling or misalignment may occur at the piezoelectric actuator joints.
It was not possible to obtain sufficient accuracy as a measuring device.
【０００４】また、前記の傾斜機能材料を使用する方法
では、圧電層と誘電体層を重ねて焼成し、原子を拡散さ
せて組成を傾斜させるため、焼成条件によって圧電特性
が大幅に変化する。それにより、ある一定の圧電特性を
得るための最適焼成温度、最適焼成時間、最適昇温速度
、等の範囲が狭く、焼成条件の設定が非常に難しい。
そのため、圧電特性のバラツキが生じやすいという問題
があった。Furthermore, in the method using the functionally graded material described above, the piezoelectric layer and the dielectric layer are stacked and fired, and the composition is graded by diffusing atoms, so the piezoelectric properties change significantly depending on the firing conditions. As a result, the range of optimal firing temperature, optimal firing time, optimal heating rate, etc. for obtaining certain piezoelectric properties is narrow, and it is very difficult to set firing conditions. Therefore, there was a problem in that variations in piezoelectric properties were likely to occur.
【０００５】そこで本発明は、以上述べた剥がれや、ず
れが生じやすいという欠点、および焼成条件の設定が難
しいという欠点を除去するため、製造された圧電アクチ
ュエータを使用しても剥がれや、ずれが生じ難く、圧電
アクチュエータの製造時の焼成が容易な、圧電アクチュ
エータの製造方法を提供することを目的とする。[0005] Therefore, the present invention aims to eliminate the above-mentioned drawbacks of easy peeling and misalignment, and difficulty in setting firing conditions. It is an object of the present invention to provide a method for manufacturing a piezoelectric actuator, which is less likely to occur and which facilitates firing during manufacturing of the piezoelectric actuator.
【０００６】[0006]
【課題を解決するための手段】本発明は前記問題点を解
決するために、本発明の圧電アクチュエータは、圧電層
と誘電層を有する圧電アクチュエータにおいて、誘電層
を多孔質層セラミックスとしたものである。すなわち、
図１に示すように、本発明の圧電アクチュエータは、圧
電セラミックス体のバルクの両主面に電極が形成されて
おり、片側の主面近傍の圧電セラミックス体中に空孔が
形成されたものである。[Means for Solving the Problems] In order to solve the above problems, the present invention provides a piezoelectric actuator having a piezoelectric layer and a dielectric layer, in which the dielectric layer is made of porous ceramic layer. be. That is,
As shown in FIG. 1, the piezoelectric actuator of the present invention has electrodes formed on both principal surfaces of the bulk of a piezoelectric ceramic body, and holes formed in the piezoelectric ceramic body near one principal surface. be.
【０００７】また、本発明は、圧電層と誘電層を有する
圧電アクチュエータの製造方法において、圧電セラミッ
クスのみからなるグリーンシート上に、圧電セラミック
スおよび該圧電セラミックスの焼成過程で焼失する有機
物粒子とを混合して製造されたグリーンシートを積層し
、この積層体を焼成することにより、有機物を焼失させ
多孔質層を形成して圧電アクチュエータを製造したもの
である。The present invention also provides a method for manufacturing a piezoelectric actuator having a piezoelectric layer and a dielectric layer, in which piezoelectric ceramics and organic particles that are burned out during the firing process of the piezoelectric ceramics are mixed on a green sheet made only of piezoelectric ceramics. A piezoelectric actuator is manufactured by laminating the green sheets manufactured by the above methods and firing the laminated body to burn off the organic matter and form a porous layer.
【０００８】さらに、本発明は、圧電層と誘電層を有す
る圧電アクチュエータの製造方法において、圧電セラミ
ックス粉末、比重が１より小さい空孔形成材、バインダ
ーおよび水を混合してスラリーを形成し、このスラリー
を成形型に流し込み、前記空孔形成材が上部に集まった
後に、脱水し、乾燥して成形体を得、この成形体を焼成
することにより、空孔形成材を焼失させ多孔質層を形成
して圧電アクチュエータを製造したものである。Furthermore, the present invention provides a method for manufacturing a piezoelectric actuator having a piezoelectric layer and a dielectric layer, in which a piezoelectric ceramic powder, a pore-forming material having a specific gravity of less than 1, a binder, and water are mixed to form a slurry. The slurry is poured into a mold, and after the pore-forming material gathers at the top, it is dehydrated and dried to obtain a molded body, and this molded body is fired to burn out the pore-forming material and form a porous layer. A piezoelectric actuator is manufactured by forming a piezoelectric actuator.
【０００９】[0009]
【実施例１】高純度の一酸化鉛（ＰｂＯ，純度９９．９
％）、二酸化チタン（ＴｉＯ２ ，純度９９．９％）、
酸化ジルコニウム（ＺｒＯ２ ，純度９９．９％）およ
びその他の添加剤をそれぞれ所定量秤量し、ポットミル
を用いて純水とともに約２０時間混合した。その混合物
を脱水、乾燥し、８００℃〜９００℃で２〜１０時間仮
焼し、ＰＺＴの仮焼物を得た。この仮焼物に純水を加え
て粉砕、脱水、乾燥してＰＺＴの仮焼粉を得た。[Example 1] High purity lead monoxide (PbO, purity 99.9)
%), titanium dioxide (TiO2, purity 99.9%),
Predetermined amounts of zirconium oxide (ZrO2, purity 99.9%) and other additives were each weighed out and mixed with pure water using a pot mill for about 20 hours. The mixture was dehydrated, dried, and calcined at 800° C. to 900° C. for 2 to 10 hours to obtain a calcined product of PZT. Pure water was added to the calcined product, which was then ground, dehydrated, and dried to obtain a calcined powder of PZT.
【００１０】次に上記ＰＺＴ仮焼粉１００ｇ、水５０ｇ
、解こう剤（商品名：セラモＤ−１３４、第一工業製薬
（株）製）８ｇ、および粒径２０μｍ〜４０μｍのカー
ボン粒子４０ｇをボールミル中にて４〜５時間混合する
。その後、バインダー（商品名：セラモＴＢ−１３、第
一工業製薬（株）製）１００ｇ、可塑剤（商品名：セラ
モＰ−１７、第一工業製薬（株）製）１２ｇ、消泡剤（
商品名：アンチフロスＦ−１０２、第一工業製薬（株）
製）１ｇを加え、ボールミル中にて２０時間混合し、ス
ラリー１を作製した。このスラリー１を用いてドクター
ブレード法によりグリーンシート１を得る。このグリー
ンシート１の厚さは、約０．４ｍｍであった。Next, 100 g of the above PZT calcined powder and 50 g of water
, 8 g of a peptizer (trade name: Ceramo D-134, manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), and 40 g of carbon particles having a particle size of 20 μm to 40 μm are mixed in a ball mill for 4 to 5 hours. Thereafter, 100 g of binder (trade name: Ceramo TB-13, manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), 12 g of plasticizer (trade name: Ceramo P-17, manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), antifoaming agent (
Product name: Anti-Floss F-102, Daiichi Kogyo Seiyaku Co., Ltd.
Slurry 1 was prepared by adding 1 g of the slurry (manufactured by M.D. Co., Ltd.) and mixing in a ball mill for 20 hours. Using this slurry 1, a green sheet 1 is obtained by a doctor blade method. The thickness of this green sheet 1 was approximately 0.4 mm.
【００１１】また、ＰＺＴ仮焼粉１００ｇ、水３４ｇ、
解こう剤６ｇをボールミル中にて４〜５時間混合する。
その後、バインダー６０ｇ、可塑剤８ｇ、消泡剤１ｇを
加え、ボールミル中にて２０時間混合し、スラリー２を
作製した。このスラリー２を用いてドクターブレード法
によりグリーンシート２を得る。このグリーンシート２
の厚さは、約０．３ｍｍであった。[0011] Also, 100 g of PZT calcined powder, 34 g of water,
Mix 6 g of peptizer in a ball mill for 4-5 hours. Thereafter, 60 g of binder, 8 g of plasticizer, and 1 g of antifoaming agent were added and mixed in a ball mill for 20 hours to prepare slurry 2. Using this slurry 2, a green sheet 2 is obtained by a doctor blade method. This green sheet 2
The thickness was approximately 0.3 mm.
【００１２】以上２種類のグリーンシートを用いて、先
ずグリーンシート１を１枚用意し、このシートの上にグ
リーンシート２を２枚積層し、加熱加圧して図２（ａ）
に示す積層体を得た。この積層体を空気中において昇温
速度１００℃／時間で、１２００℃〜１３００℃の温度
で２時間焼成し、多孔質層を持つ図２（ｂ）に示す圧電
セラミックスを作製した。Using the above two types of green sheets, first, one green sheet 1 is prepared, and two green sheets 2 are laminated on top of this sheet, and heated and pressed to form the sheet shown in FIG. 2(a).
A laminate shown in was obtained. This laminate was fired in air at a heating rate of 100° C./hour at a temperature of 1200° C. to 1300° C. for 2 hours to produce a piezoelectric ceramic having a porous layer shown in FIG. 2(b).
【００１３】得られた圧電セラミックスの両面に銀を焼
き付けて電極を作製し、次に１００℃〜１３０℃のシリ
コンオイル中で２〜３ｋＶ／ｍｍの電圧を印加して分極
を行ない、圧電アクチュエータを作製した。本発明によ
る圧電アクチュエータは、長さ４０ｍｍ×幅２０ｍｍ×
厚さ０．７〜０．８ｍｍで、印加電圧１５０Ｖの場合、
変位は８０〜１００μｍであった。また、８０℃におい
て変位を繰り返しても剥離は発生しなかった。[0013] Silver is baked on both sides of the obtained piezoelectric ceramic to make electrodes, and then a voltage of 2 to 3 kV/mm is applied in silicone oil at 100°C to 130°C to perform polarization, thereby creating a piezoelectric actuator. Created. The piezoelectric actuator according to the present invention has a length of 40 mm x width of 20 mm x
When the thickness is 0.7 to 0.8 mm and the applied voltage is 150 V,
The displacement was 80-100 μm. Furthermore, no peeling occurred even after repeated displacement at 80°C.
【００１４】[0014]
【実施例２】高純度の一酸化鉛（ＰｂＯ，純度９９．９
％）、二酸化チタン（ＴｉＯ２，純度９９．９％）、酸
化ジルコニウム（ＺｒＯ２，純度９９．９％）およびそ
の他の添加剤をそれぞれ所定量秤量し、ポットミルを用
いて純水とともに約２０時間混合した。その混合物を脱
水、乾燥し、８００℃〜９００℃で２〜１０時間仮焼し
、ＰＺＴの仮焼物を得た。この仮焼物に純水を加えて粉
砕、脱水、乾燥してＰＺＴの仮焼粉を得た。[Example 2] High purity lead monoxide (PbO, purity 99.9)
%), titanium dioxide (TiO2, purity 99.9%), zirconium oxide (ZrO2, purity 99.9%), and other additives were each weighed in predetermined amounts and mixed with pure water using a pot mill for about 20 hours. . The mixture was dehydrated, dried, and calcined at 800° C. to 900° C. for 2 to 10 hours to obtain a calcined product of PZT. Pure water was added to the calcined product, which was then ground, dehydrated, and dried to obtain a calcined powder of PZT.
【００１５】次に上記ＰＺＴ仮焼粉１００ｇ、水５０ｇ
、解こう剤（商品名：セラモＤ−１３４、第一工業製薬
（株）製）８ｇ、および粒径２０μｍ〜４０μｍのカー
ボン粒子４０ｇをボールミル中にて４〜５時間混合する
。その後、バインダー（商品名：セラモＴＢ−１３、第
一工業製薬（株）製）１００ｇ、可塑剤（商品名：セラ
モＰ−１７、第一工業製薬（株）製）１２ｇ、消泡剤（
商品名：アンチフロスＦ−１０２、第一工業製薬（株）
製）１ｇを加え、ボールミル中にて２０時間混合し、ス
ラリーを作製した。Next, 100 g of the above calcined PZT powder and 50 g of water
, 8 g of a peptizer (trade name: Ceramo D-134, manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), and 40 g of carbon particles having a particle size of 20 μm to 40 μm are mixed in a ball mill for 4 to 5 hours. Thereafter, 100 g of binder (trade name: Ceramo TB-13, manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), 12 g of plasticizer (trade name: Ceramo P-17, manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), antifoaming agent (
Product name: Anti-Floss F-102, Daiichi Kogyo Seiyaku Co., Ltd.
A slurry was prepared by adding 1 g of the product (manufactured by M.D. Co., Ltd.) and mixing in a ball mill for 20 hours.
【００１６】このスラリーを、低部に脱水孔を有し、内
長５５ｍｍ、内幅３０ｍｍ、深さ２ｍｍの図３に示す成
形型に入れ、２時間放置し、カーボンが上部に集まった
後、脱水し、乾燥して図４（ａ）に示す成形体を得た。
この成形体を空気中において、１２００℃〜１３００℃
の温度で２時間焼成して、図４（ｂ）に示す多孔質層を
持つ圧電セラミックスを得た。[0016] This slurry was placed in a mold shown in Fig. 3 having a dehydration hole in the lower part and having an inner length of 55 mm, an inner width of 30 mm, and a depth of 2 mm, and was left to stand for 2 hours so that carbon gathered at the upper part. It was dehydrated and dried to obtain a molded article shown in FIG. 4(a). This molded body was placed in air at 1200°C to 1300°C.
The piezoelectric ceramics having the porous layer shown in FIG. 4(b) were obtained by firing at a temperature of 2 hours.
【００１７】得られた圧電セラミックスの両面に銀を焼
き付けて電極を作製し、１００℃〜１３０℃のシリコン
オイル中で２〜３ｋＶ／ｍｍの電圧を印加して分極を行
ない、圧電アクチュエータを作製した。本発明による圧
電アクチュエータは、長さ４０ｍｍ×幅２０ｍｍ×厚さ
０．７〜０．８ｍｍで、印加電圧１５０Ｖの場合、変位
は８０〜１００μｍであった。また、８０℃において変
位を繰り返しても剥離は発生しなかった。[0017] Electrodes were made by baking silver on both sides of the piezoelectric ceramic obtained, and polarization was performed by applying a voltage of 2 to 3 kV/mm in silicone oil at 100°C to 130°C to produce a piezoelectric actuator. . The piezoelectric actuator according to the present invention had a length of 40 mm x width of 20 mm x thickness of 0.7 to 0.8 mm, and had a displacement of 80 to 100 μm at an applied voltage of 150 V. Furthermore, no peeling occurred even after repeated displacement at 80°C.
【００１８】以上、詳細に説明したように、本発明は上
記実施例に限定されず、本発明の趣旨に基づいて種々の
変形が可能である。例えば、本実施例では、空孔形成材
としてカーボン粒子を用いたが、焼成時に消失して空孔
を形成するものなら何でもよく、有機物等、他の空孔形
成材を用いても良い。As described above in detail, the present invention is not limited to the above embodiments, and various modifications can be made based on the spirit of the present invention. For example, in this example, carbon particles were used as the pore-forming material, but any material that disappears during firing to form pores may be used, and other pore-forming materials such as organic substances may also be used.
【００１９】[0019]
【発明の効果】本発明の圧電アクチュエータによれば、
製造された圧電アクチュエータは多孔質層を持つ圧電セ
ラミックスとなるので、高温雰囲気下で使用しても、ま
た、長時間使用しても、剥離はほとんど発生しない。さ
らに、圧電セラミックスのみから成るグリーンシート上
に、圧電セラミックスおよび該圧電セラミックスの焼成
過程で焼失する有機物粒子とを混合して製造されたグリ
ーンシートを積層して製造することにより、同じ組成の
圧電セラミックスが積層されているために、焼成が容易
な圧電アクチュエータが製造できる。[Effects of the Invention] According to the piezoelectric actuator of the present invention,
Since the manufactured piezoelectric actuator is a piezoelectric ceramic having a porous layer, peeling hardly occurs even when used in a high temperature atmosphere or for a long time. Furthermore, by manufacturing a green sheet made by mixing piezoelectric ceramics and organic particles that are burned out during the firing process of piezoelectric ceramics on top of a green sheet made only of piezoelectric ceramics, piezoelectric ceramics of the same composition can be produced. Since these are laminated, it is possible to manufacture a piezoelectric actuator that is easy to fire.
【００２０】さらにまた、従来の傾斜機能材料を使用す
る方法では、焼成によって原子を拡散させるために焼成
条件によって圧電アクチュエータの圧電特性が変化して
いたが、本発明においては、圧電セラミックス粉末、比
重が１より小さい空孔形成材、バインダーおよび水を混
合してスラリーを形成し、このスラリーを成形型に流し
込み、成形、焼成して圧電アクチュエータを製造するの
で、焼成条件によって組成が変化しないため、圧電特性
が変わることがない。したがって、焼成が容易なしかも
性能の安定した圧電アクチュエータを製造することがで
きる。Furthermore, in the conventional method using functionally graded materials, the piezoelectric properties of the piezoelectric actuator change depending on the firing conditions because atoms are diffused by firing, but in the present invention, piezoelectric ceramic powder, specific gravity The piezoelectric actuator is manufactured by mixing a pore-forming material with a value of less than 1, a binder, and water to form a slurry, pouring this slurry into a mold, molding, and firing, so that the composition does not change depending on the firing conditions. Piezoelectric properties do not change. Therefore, it is possible to manufacture a piezoelectric actuator that is easy to fire and has stable performance.
【図１】本発明の圧電アクチュエータの構成を示す図。FIG. 1 is a diagram showing the configuration of a piezoelectric actuator of the present invention.
【図２】本発明の圧電アクチュエータの製造工程図を示
す。FIG. 2 shows a manufacturing process diagram of the piezoelectric actuator of the present invention.
【図３】本発明の圧電アクチュエータの別の製造方法で
用いる成形型を示す。FIG. 3 shows a mold used in another method of manufacturing a piezoelectric actuator of the present invention.
【図４】本発明の圧電アクチュエータの別の製造工程図
を示す。FIG. 4 shows another manufacturing process diagram of the piezoelectric actuator of the present invention.
Claims (3)
エータにおいて、誘電層が多孔質層セラミックスである
ことを特徴とする圧電アクチュエータ。1. A piezoelectric actuator having a piezoelectric layer and a dielectric layer, wherein the dielectric layer is a porous ceramic layer.
エータの製造方法において、（ａ）圧電セラミックスの
みからなるグリーンシート上に、（ｂ）圧電セラミック
スおよび該圧電セラミックスの焼成過程で焼失する有機
物粒子とを混合して製造されたグリーンシートを積層し
、（ｃ）この積層体を焼成することにより有機物を焼失
させて多孔質層を形成する、各工程からなることを特徴
とする圧電セラミックスの製造方法。2. A method for manufacturing a piezoelectric actuator having a piezoelectric layer and a dielectric layer, in which (a) a green sheet consisting only of piezoelectric ceramics is provided with (b) piezoelectric ceramics and organic particles that are burned out during the firing process of the piezoelectric ceramics; A method for producing piezoelectric ceramics, comprising the steps of: laminating green sheets produced by mixing the above, and (c) firing the laminate to burn off organic matter and form a porous layer. .
エータの製造方法において、（ａ）圧電セラミックス粉
末、比重が１より小さい空孔形成材、バインダーおよび
水を混合してスラリーを形成し、（ｂ）このスラリーを
成形型に流し込み、（ｃ）前記空孔形成材が上部に集ま
った後に、脱水し、乾燥して成形体を得、（ｄ）この成
形体を焼成することにより、空孔形成材を焼失させて多
孔質層を形成する、各工程からなることを特徴とする圧
電セラミックスの製造方法。3. A method for manufacturing a piezoelectric actuator having a piezoelectric layer and a dielectric layer, comprising: (a) mixing piezoelectric ceramic powder, a pore-forming material having a specific gravity of less than 1, a binder, and water to form a slurry; ) Pouring this slurry into a mold, (c) dehydrating and drying the pore-forming material after it collects in the upper part to obtain a molded body, and (d) firing this molded body to form pores. A method for manufacturing piezoelectric ceramics, comprising steps of burning out the material and forming a porous layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3044599A JPH04282879A (en) | 1991-03-11 | 1991-03-11 | Piezoelectric actuator and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3044599A JPH04282879A (en) | 1991-03-11 | 1991-03-11 | Piezoelectric actuator and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04282879A true JPH04282879A (en) | 1992-10-07 |
Family
ID=12695922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3044599A Pending JPH04282879A (en) | 1991-03-11 | 1991-03-11 | Piezoelectric actuator and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04282879A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012209554A (en) * | 2006-02-27 | 2012-10-25 | Kyocera Corp | Method of manufacturing ceramic member, ceramic member, gas sensor element, fuel cell element, filter element, laminated piezoelectric element, injector, and fuel injection system |
-
1991
- 1991-03-11 JP JP3044599A patent/JPH04282879A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012209554A (en) * | 2006-02-27 | 2012-10-25 | Kyocera Corp | Method of manufacturing ceramic member, ceramic member, gas sensor element, fuel cell element, filter element, laminated piezoelectric element, injector, and fuel injection system |
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