JPH0427737Y2 - - Google Patents

Info

Publication number
JPH0427737Y2
JPH0427737Y2 JP5031385U JP5031385U JPH0427737Y2 JP H0427737 Y2 JPH0427737 Y2 JP H0427737Y2 JP 5031385 U JP5031385 U JP 5031385U JP 5031385 U JP5031385 U JP 5031385U JP H0427737 Y2 JPH0427737 Y2 JP H0427737Y2
Authority
JP
Japan
Prior art keywords
chamber
supply
air
valve
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5031385U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61165870U (US07655688-20100202-C00086.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5031385U priority Critical patent/JPH0427737Y2/ja
Publication of JPS61165870U publication Critical patent/JPS61165870U/ja
Application granted granted Critical
Publication of JPH0427737Y2 publication Critical patent/JPH0427737Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP5031385U 1985-04-03 1985-04-03 Expired JPH0427737Y2 (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5031385U JPH0427737Y2 (US07655688-20100202-C00086.png) 1985-04-03 1985-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5031385U JPH0427737Y2 (US07655688-20100202-C00086.png) 1985-04-03 1985-04-03

Publications (2)

Publication Number Publication Date
JPS61165870U JPS61165870U (US07655688-20100202-C00086.png) 1986-10-15
JPH0427737Y2 true JPH0427737Y2 (US07655688-20100202-C00086.png) 1992-07-03

Family

ID=30568326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5031385U Expired JPH0427737Y2 (US07655688-20100202-C00086.png) 1985-04-03 1985-04-03

Country Status (1)

Country Link
JP (1) JPH0427737Y2 (US07655688-20100202-C00086.png)

Also Published As

Publication number Publication date
JPS61165870U (US07655688-20100202-C00086.png) 1986-10-15

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