JPH0427737Y2 - - Google Patents
Info
- Publication number
- JPH0427737Y2 JPH0427737Y2 JP5031385U JP5031385U JPH0427737Y2 JP H0427737 Y2 JPH0427737 Y2 JP H0427737Y2 JP 5031385 U JP5031385 U JP 5031385U JP 5031385 U JP5031385 U JP 5031385U JP H0427737 Y2 JPH0427737 Y2 JP H0427737Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- supply
- air
- valve
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012528 membrane Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
Landscapes
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5031385U JPH0427737Y2 (US07655688-20100202-C00086.png) | 1985-04-03 | 1985-04-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5031385U JPH0427737Y2 (US07655688-20100202-C00086.png) | 1985-04-03 | 1985-04-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61165870U JPS61165870U (US07655688-20100202-C00086.png) | 1986-10-15 |
JPH0427737Y2 true JPH0427737Y2 (US07655688-20100202-C00086.png) | 1992-07-03 |
Family
ID=30568326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5031385U Expired JPH0427737Y2 (US07655688-20100202-C00086.png) | 1985-04-03 | 1985-04-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0427737Y2 (US07655688-20100202-C00086.png) |
-
1985
- 1985-04-03 JP JP5031385U patent/JPH0427737Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61165870U (US07655688-20100202-C00086.png) | 1986-10-15 |
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