JPH0426541B2 - - Google Patents
Info
- Publication number
- JPH0426541B2 JPH0426541B2 JP60169093A JP16909385A JPH0426541B2 JP H0426541 B2 JPH0426541 B2 JP H0426541B2 JP 60169093 A JP60169093 A JP 60169093A JP 16909385 A JP16909385 A JP 16909385A JP H0426541 B2 JPH0426541 B2 JP H0426541B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- powder
- pbo
- silicon wafer
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16909385A JPS6229145A (ja) | 1985-07-30 | 1985-07-30 | 大口径シリコンウェハー被覆用ガラス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16909385A JPS6229145A (ja) | 1985-07-30 | 1985-07-30 | 大口径シリコンウェハー被覆用ガラス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6229145A JPS6229145A (ja) | 1987-02-07 |
| JPH0426541B2 true JPH0426541B2 (enrdf_load_stackoverflow) | 1992-05-07 |
Family
ID=15880188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16909385A Granted JPS6229145A (ja) | 1985-07-30 | 1985-07-30 | 大口径シリコンウェハー被覆用ガラス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6229145A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022080096A1 (ja) * | 2020-10-13 | 2022-04-21 | 日本電気硝子株式会社 | 半導体素子被覆用ガラス及びこれを用いた半導体被覆用材料 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56116648A (en) * | 1980-02-20 | 1981-09-12 | Nippon Electric Glass Co Ltd | Semiconductor covering compound |
| JPS5840845A (ja) * | 1981-09-03 | 1983-03-09 | Nippon Electric Glass Co Ltd | 半導体被覆用ガラス |
-
1985
- 1985-07-30 JP JP16909385A patent/JPS6229145A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6229145A (ja) | 1987-02-07 |
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