JPH0426454Y2 - - Google Patents
Info
- Publication number
- JPH0426454Y2 JPH0426454Y2 JP11814787U JP11814787U JPH0426454Y2 JP H0426454 Y2 JPH0426454 Y2 JP H0426454Y2 JP 11814787 U JP11814787 U JP 11814787U JP 11814787 U JP11814787 U JP 11814787U JP H0426454 Y2 JPH0426454 Y2 JP H0426454Y2
- Authority
- JP
- Japan
- Prior art keywords
- growth
- solution reservoir
- solution
- raw material
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002994 raw material Substances 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 21
- 239000010410 layer Substances 0.000 description 14
- 239000013078 crystal Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 239000002699 waste material Substances 0.000 description 7
- 239000007791 liquid phase Substances 0.000 description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005204 segregation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11814787U JPH0426454Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-03 | 1987-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11814787U JPH0426454Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-03 | 1987-08-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422778U JPS6422778U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-06 |
| JPH0426454Y2 true JPH0426454Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-06-25 |
Family
ID=31362248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11814787U Expired JPH0426454Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-03 | 1987-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426454Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-08-03 JP JP11814787U patent/JPH0426454Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6422778U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-06 |