JPH0426413B2 - - Google Patents

Info

Publication number
JPH0426413B2
JPH0426413B2 JP6315884A JP6315884A JPH0426413B2 JP H0426413 B2 JPH0426413 B2 JP H0426413B2 JP 6315884 A JP6315884 A JP 6315884A JP 6315884 A JP6315884 A JP 6315884A JP H0426413 B2 JPH0426413 B2 JP H0426413B2
Authority
JP
Japan
Prior art keywords
light
receiving element
pressure
layer
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6315884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60209128A (ja
Inventor
Takashi Niie
Isamu Nosei
Tsuneo Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP6315884A priority Critical patent/JPS60209128A/ja
Publication of JPS60209128A publication Critical patent/JPS60209128A/ja
Publication of JPH0426413B2 publication Critical patent/JPH0426413B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP6315884A 1984-04-02 1984-04-02 感圧センサ Granted JPS60209128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6315884A JPS60209128A (ja) 1984-04-02 1984-04-02 感圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6315884A JPS60209128A (ja) 1984-04-02 1984-04-02 感圧センサ

Publications (2)

Publication Number Publication Date
JPS60209128A JPS60209128A (ja) 1985-10-21
JPH0426413B2 true JPH0426413B2 (de) 1992-05-07

Family

ID=13221144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6315884A Granted JPS60209128A (ja) 1984-04-02 1984-04-02 感圧センサ

Country Status (1)

Country Link
JP (1) JPS60209128A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5413773B2 (ja) * 2009-06-24 2014-02-12 国立大学法人 東京大学 柔軟触覚センサ
CN104374515B (zh) * 2014-11-21 2016-05-25 贵州大学 一种反射型光纤压力传感器探头中光纤束的布置结构
JP6983713B2 (ja) * 2018-04-04 2021-12-17 キヤノン株式会社 光学式センサ、およびその光学式センサを備えた装置
JP7520867B2 (ja) * 2019-10-30 2024-07-23 ソニーグループ株式会社 光学式センサおよび光学式センサモジュール
JP6864401B1 (ja) * 2020-08-17 2021-04-28 株式会社SensAI 触覚センサ
JPWO2023100483A1 (de) * 2021-11-30 2023-06-08

Also Published As

Publication number Publication date
JPS60209128A (ja) 1985-10-21

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