JPH04257862A - Substrate fixing device for squeegee coating device - Google Patents

Abstract

PURPOSE:To enhance gap precision between a transparent substrate and a chuck base without causing a temp. difference on the transparent substrate, and to uniformize the thickness of the film of a coating sensitive material. CONSTITUTION:This substrate fixing device for a squeegee coating device forms a color pattern on the transparent substrate by squeegee coating. and has the chuck base 9 on which the transparent substrate is placed, a groove 10 for evacuation formed on the outer periphery of the chuck base 9, and a groove 10a which is communicated with the groove 10 and formed avoiding a region 13 corresponding to the above-mentioned color pattern.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate fixing device used in a squeegee coating device in the process of manufacturing color separation filters for image pickup tubes or solid-state imaging devices and color filters for liquid crystal display devices.

0002

2. Description of the Related Art First, an example of a method for manufacturing a color filter will be explained with reference to FIG. After forming a chromium film on a transparent substrate 1 such as glass using a vacuum film forming method, a photoresist is applied, a photomask is placed, and exposure, development, chrome etching, and photoresist peeling are performed to obtain a line width of 30.
A black light-shielding layer 2 consisting of a striped pattern with a pitch of 100 μm and a film thickness of about 0.1 μm is formed (A
), then a first color, for example, a red coloring sensitive material is applied from above the black light-shielding layer 2, a photomask is placed, exposed, and developed to form a red pattern 3 (B
), and for the second and subsequent colors, for example, green and blue coloring sensitive materials are applied, a photomask is placed and exposed, and development is performed to form green and blue patterns 4 and 5 (C, D). Each color pattern layer overlaps the black light shielding layer 2 by about 20 to 30 μm on both sides in the longitudinal direction, and has a film thickness of about 1 to 2.5 μm. Next, a protective film layer 6 is formed on the color pattern to a thickness of about 6 to 8 μm for the purpose of physical and chemical protection, surface smoothing, and flattening (E). Furthermore, if necessary, after forming an indium tin oxide (ITO) film on the protective film layer 6 using a vacuum film forming method, an electrode pattern is processed using an etching method or the like.
A color filter is manufactured by forming a transparent electrode layer 7 (F
).

[0003] In the above manufacturing process, a squeegee coating device is sometimes used to apply the coloring sensitive material. As shown in FIGS. 5 and 6, this is done by placing the transparent substrate 1 on the chuck table 9 and sucking air through the vacuum groove 10 formed around the chuck table 9. The transparent substrate 1 is fixed, and the squeegee rod 11 is moved on the transparent substrate 1 in the direction of the arrow to apply the coating.

0004

[Problem to be Solved by the Invention] However, when applying a coloring sensitive material using a squeegee coating device,
When the transparent substrate 1 is warped as shown in FIG.
As a result, air remains in the internal space 12 of the transparent substrate 1 as shown in FIG.
There is a problem in that the gap accuracy between the two ends is reduced and uneven coating of the photosensitive material occurs. To solve this problem, if a vacuum groove is also formed in the center of the chuck base 9,
The transparent substrate 1 is removed by suctioning air from the internal space 12 of the transparent substrate 1.
Although it is possible to improve the accuracy of the gap between the groove 10 and the chuck table 9, there is a problem in that a temperature difference occurs on the transparent substrate 1 due to the cooling effect of the air sucked from the groove 10, and uneven coating of the photosensitive material occurs. are doing.

The present invention solves the above problem, and improves the gap accuracy between the transparent substrate and the chuck stand without creating a temperature difference on the transparent substrate, and improves the accuracy of the applied photosensitive material film. It is an object of the present invention to provide a substrate fixing device for a squeegee coating device that can make the thickness uniform.

[0006]

[Means for Solving the Problems] To achieve this, the substrate fixing device for a squeegee coating apparatus of the present invention includes a chuck table 9 on which a transparent substrate 1 is placed, and a vacuum groove formed on the outer periphery of the chuck table 9. 10, and a groove 1 that communicates with the groove 10 and is formed avoiding the area 13 corresponding to the color pattern.
0a.

[0007] The numbers added to the above structures are for comparison with the drawings to facilitate understanding, and are not intended to limit the structure of the present invention in any way.

[0008]

[Operation] In the present invention, for example, as shown in FIG.
Vacuuming grooves 10 and 10a formed in the chuck stand 9
is formed avoiding the area 13 corresponding to the color pattern formed on the transparent substrate, thereby increasing the gap accuracy between the transparent substrate and the chuck table without creating a temperature difference on the transparent substrate.

[0009]

Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1, 2, and 3 are plan views showing each embodiment of the substrate fixing device of the present invention.

FIG. 1 shows a chuck table 9 for forming one color pattern on a transparent substrate, in which a vacuum groove 10 is formed around the chuck table 9, and a plurality of grooves communicating with the groove 10 are formed. 10a is formed avoiding the region 13 corresponding to the color pattern.

FIG. 2 shows a chuck stand 9 for forming two color patterns on a transparent substrate, in which a vacuum groove 10 is formed around the chuck stand 9, and a groove communicating with the groove 10 is formed in the center. 10a is formed avoiding the region 13 corresponding to the color pattern.

FIG. 3 shows a chuck table 9 for forming six color patterns on a transparent substrate, in which a vacuum groove 10 is formed around the chuck table 9, and a groove communicating with the groove 10 is formed in the center. 10a is formed avoiding the region 13 corresponding to the color pattern.

[0013] In the chuck stand 9 having the above structure, the vacuum grooves 10, 10a are formed avoiding the area corresponding to the color pattern formed on the transparent substrate.
Without creating a temperature difference on the transparent substrate, the gap accuracy between the transparent substrate and the chuck stand can be improved, and the film thickness of the applied photosensitive material can be made uniform.

[0014]

As explained above, according to the present invention, there is provided a substrate fixing device for a squeegee coating apparatus that forms a color pattern on a transparent substrate by squeegee coating, which includes a chuck stand on which a transparent substrate is placed; , has a vacuum groove formed on the outer periphery of the chuck table, and a groove communicating with the groove and formed avoiding the area corresponding to the color pattern, thereby creating a temperature difference on the transparent substrate. It is possible to improve the gap accuracy between the transparent substrate and the chuck stand and to make the film thickness of the coated photosensitive material uniform without any problems.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing one embodiment of a substrate fixing device according to the present invention.

FIG. 2 is a plan view showing another embodiment of the substrate fixing device according to the present invention.

FIG. 3 is a plan view showing another embodiment of the substrate fixing device according to the present invention.

[Figure 4] Enlarged sectional view to explain the manufacturing process of color filters

[Fig. 5] Plan view of a conventional substrate fixing device for a squeegee coating device

[Figure 6] Cross-sectional view of Figure 5

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1... Transparent substrate, 9... Chuck stand, 10, 10a... Vacuuming groove, 13... Area.

Claims (1)

[Claims] 1. A substrate fixing device for a squeegee coating apparatus that forms a color pattern on a transparent substrate by squeegee coating, comprising a chuck stand on which the transparent substrate is placed, and a substrate fixing device formed on the outer periphery of the chuck stand. A substrate fixing device for a squeegee coating apparatus, comprising a vacuum groove and a groove communicating with the groove and formed avoiding a region corresponding to the color pattern.