JPH04255B2 - - Google Patents

Info

Publication number
JPH04255B2
JPH04255B2 JP12793084A JP12793084A JPH04255B2 JP H04255 B2 JPH04255 B2 JP H04255B2 JP 12793084 A JP12793084 A JP 12793084A JP 12793084 A JP12793084 A JP 12793084A JP H04255 B2 JPH04255 B2 JP H04255B2
Authority
JP
Japan
Prior art keywords
substrate
mirror
laser beam
chopper mirror
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12793084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS616619A (ja
Inventor
Takeshi Masaki
Koichi Kawada
Yukio Sakagaito
Katsumasa Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59127930A priority Critical patent/JPS616619A/ja
Publication of JPS616619A publication Critical patent/JPS616619A/ja
Publication of JPH04255B2 publication Critical patent/JPH04255B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP59127930A 1984-06-21 1984-06-21 チョッパ−ミラ− Granted JPS616619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59127930A JPS616619A (ja) 1984-06-21 1984-06-21 チョッパ−ミラ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59127930A JPS616619A (ja) 1984-06-21 1984-06-21 チョッパ−ミラ−

Publications (2)

Publication Number Publication Date
JPS616619A JPS616619A (ja) 1986-01-13
JPH04255B2 true JPH04255B2 (enExample) 1992-01-06

Family

ID=14972150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59127930A Granted JPS616619A (ja) 1984-06-21 1984-06-21 チョッパ−ミラ−

Country Status (1)

Country Link
JP (1) JPS616619A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08327810A (ja) * 1995-05-30 1996-12-13 Jiyuu Denshi Laser Kenkyusho:Kk 光学ミラー及びこれを用いたレーザ光分割装置
KR101025015B1 (ko) * 2008-12-02 2011-03-25 주식회사 엘티에스 레이저 온오프 셔터유닛
CN113547225A (zh) * 2020-04-22 2021-10-26 鸿鎷科技有限公司 具有石英底座的精密陶瓷工作台

Also Published As

Publication number Publication date
JPS616619A (ja) 1986-01-13

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