JPH04245695A - Thick film circuit substrate and manufacture thereof - Google Patents
Thick film circuit substrate and manufacture thereofInfo
- Publication number
- JPH04245695A JPH04245695A JP3183591A JP3183591A JPH04245695A JP H04245695 A JPH04245695 A JP H04245695A JP 3183591 A JP3183591 A JP 3183591A JP 3183591 A JP3183591 A JP 3183591A JP H04245695 A JPH04245695 A JP H04245695A
- Authority
- JP
- Japan
- Prior art keywords
- wiring line
- branch
- thick film
- wiring
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 title claims description 13
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000010304 firing Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 24
- 238000009413 insulation Methods 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、その表面上において、
2本の厚膜導体による配線ラインが絶縁膜を隔てて交差
するような構造を有する厚膜回路基板およびその形成方
法に関する。[Industrial Application Field] On the surface, the present invention comprises:
The present invention relates to a thick film circuit board having a structure in which wiring lines formed by two thick film conductors intersect with each other with an insulating film in between, and a method for forming the same.
【0002】0002
【従来の技術】上記のような厚膜回路基板として、例え
ば、以下のようにして得られるものが知られている。ま
ず、アルミナ基板等のセラミック基板1を用意し、その
表面上にAg・Pdペースト等のAg系ペーストを帯状
にスクリーン印刷し、これを焼成して第1の配線ライン
2を形成する(図5)。次に、この第1の配線ライン2
の所定部上面に該部分の配線ラインを完全に覆うように
ガラスペーストをスクリーン印刷し、これを焼成してガ
ラス絶縁膜4を形成する(図6)。2. Description of the Related Art As the above-mentioned thick film circuit board, one which can be obtained, for example, as follows is known. First, a ceramic substrate 1 such as an alumina substrate is prepared, and a strip of Ag-based paste such as Ag/Pd paste is screen printed on the surface of the ceramic substrate 1, and this is fired to form the first wiring line 2 (Fig. 5 ). Next, this first wiring line 2
A glass paste is screen-printed on the upper surface of a predetermined portion so as to completely cover the wiring line in the portion, and this is baked to form a glass insulating film 4 (FIG. 6).
【0003】続いて、上記ガラス絶縁膜4の上を通り、
この位置で第1の配線ライン2と交差するようにAuペ
ーストを帯状にスクリーン印刷し、空気中で焼成して第
2の配線ライン5を形成する(図7)。Next, passing over the glass insulating film 4,
At this position, Au paste is screen printed in a band shape so as to intersect with the first wiring line 2, and is fired in air to form the second wiring line 5 (FIG. 7).
【0004】0004
【発明が解決しようとする課題】しかしながら、上記従
来の技術のように、第1の配線ラインをAg系ペースト
で形成し、第2の配線ラインをAuペーストで形成する
と、各ペースト材料の主成分の標準電極電位が相互に著
しく異なっているために、第1の配線ラインと交差させ
てスクリーン印刷した第2の配線ラインを焼成する際、
軟化したガラス絶縁膜を介して存在する2本の配線ライ
ンの間に電位差が生じてしまう。2本の配線ラインの間
に電位差が生じると、これら配線ラインを形成したペー
スト材料における主成分金属の酸化物は、電気化学的な
プロセスで還元され、酸素などの気体を発生する。発生
した気体は、ガラス絶縁膜と配線ラインとの境界部に気
泡となって出現し、配線ラインからガラス絶縁膜が剥離
してしまう原因となっていた。[Problems to be Solved by the Invention] However, when the first wiring line is formed using Ag-based paste and the second wiring line is formed using Au paste as in the above-mentioned conventional technology, the main component of each paste material is Since the standard electrode potentials of the two wiring lines are significantly different from each other, when firing the second wiring line that is screen printed to intersect with the first wiring line,
A potential difference occurs between the two wiring lines that are present via the softened glass insulating film. When a potential difference occurs between the two wiring lines, the oxide of the main component metal in the paste material forming these wiring lines is reduced by an electrochemical process, generating gas such as oxygen. The generated gas appears as bubbles at the boundary between the glass insulating film and the wiring line, causing the glass insulating film to peel off from the wiring line.
【0005】本発明は、上述従来の技術の問題点を解決
し、2本の配線ラインを形成するペースト材料の標準電
極電位の著しい相違により生じる電位差を無くすことに
より、ガラス絶縁膜の剥離を防止し、歩留りの向上を期
待できる厚膜回路基板およびその製造方法を提供するこ
とを目的としている。The present invention solves the above-mentioned problems of the conventional technology and prevents peeling of the glass insulating film by eliminating the potential difference caused by the significant difference in standard electrode potential of the paste materials forming the two wiring lines. However, it is an object of the present invention to provide a thick film circuit board and a method for manufacturing the same, which can be expected to improve yield.
【0006】[0006]
【課題を解決するための手段】本発明者は、上記目的を
達成すべく鋭意研究の結果、ガラス絶縁膜上で第1の配
線ラインと交差させて形成する第2の配線ラインを焼成
する前に、両配線ラインを短絡しておき、第2の配線ラ
イン焼成時に両配線ラインの間に電位が生じないように
し、第2の配線ライン焼成後に両配線ライン間を絶縁す
ることによって、配線ラインとガラス絶縁膜との境界部
における気泡の発生を防止し得ることを見い出し本発明
に到達した。[Means for Solving the Problem] As a result of intensive research in order to achieve the above object, the present inventors have discovered that before firing a second wiring line formed on a glass insulating film so as to intersect with a first wiring line. First, by short-circuiting both wiring lines so that no potential is generated between both wiring lines when firing the second wiring line, and insulating between both wiring lines after firing the second wiring line, the wiring line The present invention was achieved by discovering that it is possible to prevent the generation of bubbles at the boundary between the glass insulating film and the glass insulating film.
【0007】すなわち、本発明は、基板表面上に絶縁膜
を隔てて交差する2本の厚膜導体による配線ラインが存
在する構造を有する厚膜回路基板であって、上記2本の
配線ラインと同様の厚膜導体による分岐配線ラインが、
上記2本の配線ラインを短絡する態様にそれぞれの配線
ラインから枝状に引き出されており、さらに、該分岐配
線ラインからなる枝状部の少なくとも一部に、該枝状部
を絶縁する分断部が存在することを特徴とする厚膜回路
基板;および、前記2本の配線ラインの一方がAuを主
成分とするペースト材料、他方がAg、Cu、Ni、Z
n、AlまたはSnからなる群より選ばれた一つの金属
を主成分とするペースト材料から形成されたものである
上記の厚膜回路基板;並びに、前記2本の配線ラインの
一方がAgを主成分とするペースト材料、他方がNi、
Zn、AlまたはSnからなる群より選ばれた一つの金
属を主成分とするペースト材料から形成されたものであ
る上記の厚膜回路基板;さらに、基板表面上に絶縁膜を
隔てて交差する2本の配線ラインが存在する構造を有す
る厚膜回路基板の製造方法において、まず、第1の配線
ラインを形成する際、このラインから枝状に分岐配線ラ
インを引き出し、この第1の配線ラインの所定部分上面
を覆って絶縁膜を形成し、次いでこの絶縁膜の上に第2
の配線ラインを形成する際、上記第1の配線ラインの分
岐配線ラインと第2の配線ラインとを結ぶための分岐配
線ラインを第2の配線ラインから枝状に引き出して、第
1の配線ラインと第2の配線ラインとを各々の分岐配線
ライン同士によって短絡し、第2の配線ラインの焼成後
に、これら分岐配線ラインからなる枝状部の一部を分断
して、短絡していた両配線ライン間を絶縁することを特
徴とする厚膜回路基板の製造方法を提供するものである
。That is, the present invention provides a thick film circuit board having a structure in which wiring lines formed by two thick film conductors intersect with each other with an insulating film interposed on the surface of the board. Branch wiring lines using similar thick film conductors are
Branches are drawn out from each wiring line in such a manner as to short-circuit the two wiring lines, and further, a dividing portion is provided in at least a part of the branch-like portion consisting of the branch wiring line to insulate the branch-like portion. A thick film circuit board characterized in that one of the two wiring lines is made of a paste material containing Au as a main component, and the other is made of a paste material containing Ag, Cu, Ni, or Z.
The above thick film circuit board is formed from a paste material whose main component is one metal selected from the group consisting of n, Al, or Sn; and one of the two wiring lines is made mainly of Ag. paste material as a component, the other is Ni,
The thick film circuit board described above is formed from a paste material whose main component is one metal selected from the group consisting of Zn, Al, or Sn; In a method for manufacturing a thick film circuit board having a structure in which a main wiring line exists, first, when forming a first wiring line, a branch wiring line is drawn out from this line in a branch shape, and a branch wiring line is drawn out from the first wiring line. An insulating film is formed covering the upper surface of a predetermined portion, and then a second insulating film is formed on this insulating film.
When forming the wiring line, a branch wiring line for connecting the branch wiring line of the first wiring line and the second wiring line is drawn out in a branch shape from the second wiring line, and the first wiring line is formed. and the second wiring line are short-circuited by each branch wiring line, and after firing the second wiring line, a part of the branch-like part consisting of these branch wiring lines is separated, and both the short-circuited wirings are removed. The present invention provides a method for manufacturing a thick film circuit board characterized by insulating lines.
【0008】[0008]
【作用】本発明の厚膜回路基板は、ガラス絶縁膜を隔て
て第1の配線ラインと交差させて形成する第2の配線ラ
インの焼成前に、両配線ラインを短絡したことによって
第2の配線ライン焼成時に両配線ラインの間に発生する
電位差が消失する。そのため、2本の配線ラインを形成
するペースト材料の主成分の標準電極電位が著しく異な
るものであっても、気泡が配線ラインとガラス絶縁膜と
の境界部に発生することを防止できる。[Operation] In the thick film circuit board of the present invention, the second wiring line is formed by short-circuiting both wiring lines before firing the second wiring line, which is formed by intersecting the first wiring line with a glass insulating film in between. The potential difference that occurs between both wiring lines when firing the wiring lines disappears. Therefore, even if the standard electrode potentials of the main components of the paste materials forming the two wiring lines are significantly different, bubbles can be prevented from being generated at the boundary between the wiring line and the glass insulating film.
【0009】また、本発明の厚膜回路基板は、第1の配
線ラインと第2の配線ラインを形成するペースト材料の
主成分の標準電極電位差が、0.7 V以上である場合
に特に有効である。Further, the thick film circuit board of the present invention is particularly effective when the standard electrode potential difference of the main components of the paste material forming the first wiring line and the second wiring line is 0.7 V or more. It is.
【0010】以下、実施例により本発明をさらに詳しく
説明する。ただし、本発明の範囲は以下の実施例に限定
されるものではない。[0010] The present invention will now be explained in more detail with reference to Examples. However, the scope of the present invention is not limited to the following examples.
【0011】[0011]
【実施例】本発明の厚膜回路基板の製造工程を、図2、
図3、図4および図1を用いて説明する。[Example] The manufacturing process of the thick film circuit board of the present invention is shown in FIG.
This will be explained using FIGS. 3, 4, and 1.
【0012】まず、96%アルミナ基板1を用意し、こ
の基板の表面に第1の配線ライン2および第1の分岐配
線ライン3をAuペーストを用いてスクリーン印刷し、
空気中で 850℃、10分間焼成して形成した(図2
)。First, a 96% alumina substrate 1 is prepared, and a first wiring line 2 and a first branch wiring line 3 are screen printed on the surface of this substrate using Au paste.
It was formed by firing in air at 850°C for 10 minutes (Figure 2
).
【0013】次に、上記第1の分岐配線ライン3の近傍
の第1の配線ライン上に、絶縁性ガラスペーストを矩形
状にスクリーン印刷し、空気中で 850℃、10分間
焼成してガラス絶縁膜4を形成した(図3)。続いて、
Ag・Ptペーストを用いて、第1の配線ライン2と直
交し、かつガラス絶縁膜4上を通過するように第2の配
線ライン5をスクリーン印刷した。また、これと同時に
、この第2の配線ライン5から上記第1の分岐配線ライ
ン3の端部へ第2の分岐配線ライン6をスクリーン印刷
して両配線ラインを短絡し、空気中で 850℃、10
分間焼成した(図4)。Next, an insulating glass paste is screen printed in a rectangular shape on the first wiring line near the first branch wiring line 3, and is baked in air at 850°C for 10 minutes to form a glass insulator. A film 4 was formed (FIG. 3). continue,
A second wiring line 5 was screen printed using Ag/Pt paste so as to be perpendicular to the first wiring line 2 and to pass over the glass insulating film 4 . At the same time, a second branch wiring line 6 was screen printed from this second wiring line 5 to the end of the first branch wiring line 3 to short-circuit both wiring lines, and the temperature was increased to 850°C in air. , 10
It was baked for a minute (Figure 4).
【0014】焼成後、第2の分岐配線ライン6の一部を
YAGレーザーで切断することにより、第1の配線ライ
ン2と第2の配線ライン5とを絶縁し、厚膜回路基板を
製造した(図1)。After baking, a part of the second branch wiring line 6 was cut with a YAG laser to insulate the first wiring line 2 and the second wiring line 5, and a thick film circuit board was manufactured. (Figure 1).
【0015】なお、上記製造工程において第1の配線ラ
イン2または第2の配線ライン5と、ガラス絶縁膜4と
の境界部に気泡は全く発生せず、ガラス絶縁膜の剥離は
起こらなかった。In the above manufacturing process, no bubbles were generated at the boundary between the first wiring line 2 or the second wiring line 5 and the glass insulating film 4, and no peeling of the glass insulating film occurred.
【0016】[0016]
【発明の効果】本発明の出現により、第1の配線ライン
または第2の配線ラインとガラス絶縁膜との境界部に気
泡が発生することがなくなり、配線ラインからのガラス
絶縁膜の剥離が防止できるようになった。そのため、厚
膜回路基板製造上の歩留りが著しく向上した。[Effects of the Invention] With the advent of the present invention, bubbles are no longer generated at the boundary between the first wiring line or the second wiring line and the glass insulating film, and peeling of the glass insulating film from the wiring line is prevented. Now you can. Therefore, the yield in manufacturing thick film circuit boards has been significantly improved.
【図1】本発明の厚膜回路基板の製造工程の一例を段階
的に示した図の一つであって、最終工程である図4の基
板上の第2の分岐配線ラインの一部を分断した後の厚膜
回路基板を示す平面図である。FIG. 1 is a diagram showing step-by-step an example of the manufacturing process of the thick film circuit board of the present invention, showing a part of the second branch wiring line on the board in FIG. 4, which is the final step. FIG. 3 is a plan view showing the thick film circuit board after being divided.
【図2】本発明の厚膜回路基板の製造工程の一例を段階
的に示した図の一つであって、基板上に第1の配線ライ
ンおよび第1の分岐配線ラインを形成した状態を示す平
面図である。FIG. 2 is a diagram showing step-by-step an example of the manufacturing process of the thick film circuit board of the present invention, showing a state in which a first wiring line and a first branch wiring line are formed on the board. FIG.
【図3】本発明の厚膜回路基板の製造工程の一例を段階
的に示した図の一つであって、図2の基板上にガラス絶
縁膜を形成した状態を示す平面図である。3 is a plan view showing a state in which a glass insulating film is formed on the substrate of FIG. 2, which is one of the diagrams showing step-by-step an example of the manufacturing process of the thick film circuit board of the present invention; FIG.
【図4】本発明の厚膜回路基板の製造工程の一例を段階
的に示した図の一つであって、図3の基板上に第2の配
線ラインおよび第2の分岐配線ラインを形成した状態を
示す平面図である。4 is one of the diagrams showing step-by-step an example of the manufacturing process of the thick film circuit board of the present invention, in which a second wiring line and a second branch wiring line are formed on the substrate of FIG. 3; FIG. FIG.
【図5】従来の厚膜回路基板の製造工程の一例を段階的
に示した図の一つであって、基板上に第1の配線ライン
を形成した状態を示す平面図である。FIG. 5 is a diagram illustrating step-by-step an example of a conventional thick film circuit board manufacturing process, and is a plan view showing a state in which a first wiring line is formed on a substrate.
【図6】従来の厚膜回路基板の製造工程の一例を段階的
に示した図の一つであって、図5の基板上にガラス絶縁
膜を形成した状態を示す平面図である。6 is a plan view showing a state in which a glass insulating film is formed on the substrate of FIG. 5, which is one of the diagrams showing step-by-step an example of the manufacturing process of a conventional thick film circuit board; FIG.
【図7】従来の厚膜回路基板の製造工程の一例を段階的
に示した図の一つであって、図6の基板上に第2の配線
ラインを形成する最終工程経過後の厚膜回路基板を示す
平面図である。7 is a diagram showing step-by-step an example of the manufacturing process of a conventional thick film circuit board, the thick film after the final step of forming a second wiring line on the substrate of FIG. FIG. 3 is a plan view showing the circuit board.
1‥‥基板 2‥‥第1の配線ライン 3‥‥第1の分岐配線ライン 4‥‥ガラス絶縁膜 5‥‥第2の配線ライン 6‥‥第2の分岐配線ライン 7‥‥分断部 1‥‥Substrate 2..First wiring line 3..First branch wiring line 4‥‥Glass insulation film 5. Second wiring line 6. Second branch wiring line 7‥‥Divided part
Claims (4)
2本の厚膜導体による配線ラインが存在する構造を有す
る厚膜回路基板であって、上記2本の配線ラインと同様
の厚膜導体による分岐配線ラインが、上記2本の配線ラ
インを短絡する態様にそれぞれの配線ラインから枝状に
引き出されており、さらに、該分岐配線ラインからなる
枝状部の少なくとも一部に、該枝状部を絶縁する分断部
が存在することを特徴とする厚膜回路基板。1. A thick film circuit board having a structure in which wiring lines made of two thick film conductors intersect with each other with an insulating film on the surface of the board, the wiring line being a thick film similar to the two wiring lines. A branch wiring line made of a conductor is drawn out in a branch shape from each wiring line in such a manner as to short-circuit the two wiring lines, and further, the branch wiring line is drawn out in a branch shape from each wiring line in such a manner as to short-circuit the two wiring lines, and further, the branch wiring line is connected to at least a part of the branch portion formed by the branch wiring line. 1. A thick film circuit board characterized by having a dividing part that insulates a shaped part.
主成分とするペースト材料、他方がAg、Cu、Ni、
Zn、AlまたはSnからなる群より選ばれた一つの金
属を主成分とするペースト材料から形成されたものであ
る請求項1記載の厚膜回路基板。2. One of the two wiring lines is made of a paste material mainly composed of Au, and the other is made of a paste material containing Ag, Cu, Ni, etc.
2. The thick film circuit board according to claim 1, wherein the thick film circuit board is made of a paste material whose main component is one metal selected from the group consisting of Zn, Al, or Sn.
主成分とするペースト材料、他方がNi、Zn、Alま
たはSnからなる群より選ばれた一つの金属を主成分と
するペースト材料から形成されたものである請求項1記
載の厚膜回路基板。3. One of the two wiring lines is made of a paste material whose main component is Ag, and the other is made of a paste material whose main component is one metal selected from the group consisting of Ni, Zn, Al, or Sn. The thick film circuit board according to claim 1, wherein the thick film circuit board is formed by forming a thick film circuit board.
2本の配線ラインが存在する構造を有する厚膜回路基板
の製造方法において、まず、第1の配線ラインを形成す
る際、このラインから枝状に分岐配線ラインを引き出し
、この第1の配線ラインの所定部分上面を覆って絶縁膜
を形成し、次いでこの絶縁膜の上に第2の配線ラインを
形成する際、上記分岐配線ラインと第2の配線ラインと
を結ぶ分岐配線ラインを枝状に引き出して、第1の配線
ラインと第2の配線ラインとを分岐配線ラインによって
短絡し、第2の配線ラインの焼成後に、これら分岐配線
ラインからなる枝状部の一部を分断して、短絡していた
両配線ライン間を絶縁することを特徴とする厚膜回路基
板の製造方法。4. In a method for manufacturing a thick film circuit board having a structure in which two wiring lines intersect with each other with an insulating film on the surface of the substrate, first, when forming a first wiring line, A branch wiring line is drawn out in a branch shape from the first wiring line, an insulating film is formed covering the upper surface of a predetermined portion of this first wiring line, and then when a second wiring line is formed on this insulating film, the branch wiring line is A branch wiring line connecting the first wiring line and the second wiring line is drawn out in a branch shape, the first wiring line and the second wiring line are short-circuited by the branch wiring line, and after firing the second wiring line, these branches are connected. A method for manufacturing a thick film circuit board, which comprises dividing a part of a branch portion consisting of a wiring line to insulate a short-circuited wiring line.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3183591A JP2842699B2 (en) | 1991-01-31 | 1991-01-31 | Thick film circuit board and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3183591A JP2842699B2 (en) | 1991-01-31 | 1991-01-31 | Thick film circuit board and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04245695A true JPH04245695A (en) | 1992-09-02 |
JP2842699B2 JP2842699B2 (en) | 1999-01-06 |
Family
ID=12342125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3183591A Expired - Lifetime JP2842699B2 (en) | 1991-01-31 | 1991-01-31 | Thick film circuit board and method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2842699B2 (en) |
-
1991
- 1991-01-31 JP JP3183591A patent/JP2842699B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2842699B2 (en) | 1999-01-06 |
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A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19980922 |