JPH0424530A - Magnetostriction torque sensor - Google Patents
Magnetostriction torque sensorInfo
- Publication number
- JPH0424530A JPH0424530A JP12812790A JP12812790A JPH0424530A JP H0424530 A JPH0424530 A JP H0424530A JP 12812790 A JP12812790 A JP 12812790A JP 12812790 A JP12812790 A JP 12812790A JP H0424530 A JPH0424530 A JP H0424530A
- Authority
- JP
- Japan
- Prior art keywords
- torsion bar
- spiral
- magnetic
- torque sensor
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003466 welding Methods 0.000 claims abstract description 13
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 238000010583 slow cooling Methods 0.000 claims description 2
- 230000035699 permeability Effects 0.000 abstract description 11
- 229910000808 amorphous metal alloy Inorganic materials 0.000 abstract description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000002425 crystallisation Methods 0.000 abstract description 3
- 230000008025 crystallization Effects 0.000 abstract description 3
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000035882 stress Effects 0.000 description 18
- 230000005284 excitation Effects 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 10
- 239000000696 magnetic material Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、磁歪トルクセンサに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a magnetostrictive torque sensor.
磁歪トルクセンサにおいては、トーションバーの外周面
に軸線と正負４５度方向の磁気異方性帯域を形成し、ト
ーションバーを回転してトルクを与えると、一方の側の
磁気異方性帯域に沿って圧縮応力が加わり、他方の側の
磁気異方性帯域に沿って引張応力が加わる。それにより
生じる磁気的変化率は、圧縮応力付加と引張応力付加と
で正負に変化しその変化の大きさは各応力の大きさによ
る。In a magnetostrictive torque sensor, a magnetic anisotropic band is formed on the outer peripheral surface of the torsion bar in the positive and negative directions of 45 degrees from the axis, and when the torsion bar is rotated to apply torque, the magnetic anisotropic band on one side is formed. A compressive stress is applied along the magnetic anisotropy band on the other side, and a tensile stress is applied along the magnetic anisotropy band on the other side. The rate of magnetic change caused by this changes between positive and negative depending on the application of compressive stress and the application of tensile stress, and the magnitude of the change depends on the magnitude of each stress.
そこで、その磁気的変化を電気的出力信号として検出し
、その出力信号により各応力の大きさ、即ちトルクの大
きさを測定するのである。Therefore, the magnetic change is detected as an electrical output signal, and the magnitude of each stress, that is, the magnitude of torque, is measured from the output signal.
従来の技術における磁歪トルクセンサのトーションバー
に磁気異方性帯域の形成には、次のようなものが例示さ
れる。The following is an example of the formation of a magnetic anisotropic band in a torsion bar of a magnetostrictive torque sensor in the prior art.
（１）アモルファス合金の細帯を磁性体トーションバー
の外周面に所望ピッチ（所望の条数）・リード角４５度
で螺旋縞状に巻回すると共に、エポキシ樹脂系接着剤で
接着する。(1) A narrow strip of amorphous alloy is wound around the outer circumferential surface of a magnetic torsion bar in a spiral stripe pattern at a desired pitch (desired number of threads) and a lead angle of 45 degrees, and is adhered with an epoxy resin adhesive.
（２） ｌａｉ歪鋼歪音軸−ションバーとして、その外
周面に螺旋溝を刻設し、熱処理を施す。(2) As a lai strained steel strained sound shaft-shape bar, a spiral groove is carved on its outer peripheral surface and heat treated.
（３）磁歪鋼軸をトーションバーとして、熱処理を施す
。（直交磁気センサにより測定する。）（４）トーショ
ンバーの表面に磁歪膜をメツキで形成し、シェブロン状
に写真製版をする。(3) Apply heat treatment to the magnetostrictive steel shaft as a torsion bar. (Measurement is performed using an orthogonal magnetic sensor.) (4) A magnetostrictive film is formed on the surface of the torsion bar by plating, and photoengraved into a chevron shape.
（５）トーションバーの表面に磁歪膜をスパッタでシェ
ブロン状に形成する。(5) A magnetostrictive film is formed in a chevron shape on the surface of the torsion bar by sputtering.
上記の従来の技術における磁歪トルクセンサのトーショ
ンバーに磁気異方性帯域の形成の方式には、次のような
欠点がある。The method of forming a magnetic anisotropic band in the torsion bar of a magnetostrictive torque sensor in the above-mentioned conventional technology has the following drawbacks.
（１）は、トーションバーの形状に制限があり、接着剤
の温度特性や経年変化の影響が大きいので、精度に問題
がある。(1) has a problem with accuracy because there is a limit to the shape of the torsion bar and the temperature characteristics of the adhesive and changes over time have a large influence.
同じく（２）は、機械加工が面倒であり、感度が悪い。Similarly, (2) requires troublesome machining and has poor sensitivity.
同じく（３）は、トーションバーに同期した信号処理が
必要であり、トーションバーの横揺れや磁気特性不均一
による出力ドリフトがある。又、ヒステリシスが大きい
。Similarly, (3) requires signal processing that is synchronized with the torsion bar, and there is an output drift due to horizontal vibration of the torsion bar and non-uniform magnetic properties. Also, hysteresis is large.
同じく（４）は、磁歪膜が剥離し易い、大きな励磁電流
が必要である。トーションバーの形状に制限がある。Similarly, (4) requires a large excitation current that easily causes the magnetostrictive film to peel off. There are restrictions on the shape of the torsion bar.
同じく（５）は、トーションバーに温度上昇により、磁
歪膜が影響を受ける。トーションバーの形状に制限があ
る。Similarly, in (5), the magnetostrictive film is affected by the temperature rise in the torsion bar. There are restrictions on the shape of the torsion bar.
この発明による磁歪トルクセンサは、軸の外周面に巻回
され、リード角４５度の螺旋状の溶接線に沿ってのレー
ザ溶接及び徐冷により形成された結晶化域で固着された
アモルファス薄膜を備えたトーションバーとその螺旋状
溶接線域の外周面を囲繞するよう設けられた励磁コイル
とを具備しており、螺旋状のレーザ溶接線がトーション
バーの中心から片側では左巻き、他側では右巻きである
螺旋であり、その夫々に対し個別に励磁コイルが設けら
れていることが好ましい。The magnetostrictive torque sensor according to the present invention includes an amorphous thin film that is wound around the outer peripheral surface of a shaft and fixed in a crystallized region formed by laser welding and slow cooling along a spiral weld line with a lead angle of 45 degrees. It is equipped with a torsion bar and an excitation coil provided so as to surround the outer peripheral surface of the helical weld line area, and the helical laser weld line winds counterclockwise on one side and clockwise on the other side from the center of the torsion bar. Preferably, the coil is a spiral, each of which is provided with an individual excitation coil.
レーザ溶接に際して、溶接箇所のアモルファス合金は、
加熱溶融した後、徐冷されることになるが、それにより
結晶化して透磁率が低下する。その結果、トーションバ
ーの外周面には、上記の溶接線に沿った螺旋縞状の低透
磁率部分と螺旋縞状の高透磁率部分とが交互に形成され
た螺旋縞状の磁気異方性をもった磁性体帯域が構成され
る。During laser welding, the amorphous alloy at the welding location is
After being heated and melted, it is slowly cooled, but this causes crystallization and decreases magnetic permeability. As a result, the outer peripheral surface of the torsion bar has a spiral striped magnetic anisotropy in which spiral striped low magnetic permeability portions and spiral striped high magnetic permeability portions are alternately formed along the weld line. A magnetic band with .
そのトーションバーの一端に回転動力源を結合し、他端
に負荷を結合して、トーションバーを所望の計測回転速
度で回転駆動する。A rotational power source is coupled to one end of the torsion bar, a load is coupled to the other end, and the torsion bar is driven to rotate at a desired measured rotational speed.
すると、トルクにより、回転方向によりトーションバー
の外周面の一方の巻き方向の溶接線方向に沿って圧縮応
力が加わり、他方の巻き方向の溶接線に沿って引張応力
が加わる。すると、夫々における螺旋縞状の溶接線方向
に沿った磁性体帯域の透磁率は、圧縮応力付加と引張応
力付加とで正負に変化しその変化の大きさは各応力の大
きさによる。Then, due to the torque, compressive stress is applied to the outer peripheral surface of the torsion bar along the weld line direction in one winding direction, and tensile stress is applied along the weld line in the other winding direction, due to the rotation direction. Then, the magnetic permeability of the magnetic material zone along the weld line direction of each spiral stripe changes positively or negatively depending on the application of compressive stress and the application of tensile stress, and the magnitude of the change depends on the magnitude of each stress.
そこで、夫々の励磁コイルによる励磁において、夫々の
励磁コイルのインダクタンスの変化を検出し、その出力
により各応力の大きさが求められ、それと捩じり部の寸
法及び物理的諸元とからトルクの大きさが算出されるの
である。Therefore, during excitation by each excitation coil, changes in the inductance of each excitation coil are detected, and the magnitude of each stress is determined from the output, and the torque is determined from this and the dimensions and physical specifications of the torsion part. The size is calculated.
この発明の磁歪トルクセンサの製作方法について述べる
と、トーションバー１の外周面、特に捩じり部の外周面
における螺旋縞状の磁気異方性をもった磁性体帯域とす
べき範囲に鉄系のアモルファス合金の薄膜シート２（厚
さ・例えば５０〜３０μｍ）を巻付け、仮止めをする。Describing the manufacturing method of the magnetostrictive torque sensor of the present invention, iron-based A thin film sheet 2 (thickness, e.g., 50 to 30 μm) of an amorphous alloy is wrapped around and temporarily fixed.
トーションバー１は、磁性体・非磁性体のいずれでもよ
く、特に捩じり部は、寸法及び物理的諸元が適宜定めら
れて製作されている。The torsion bar 1 may be made of either a magnetic material or a non-magnetic material, and in particular, the torsion portion is manufactured with appropriately determined dimensions and physical specifications.
それから、巻付けたアモルファス合金の薄膜シート２の
上から所望ピンチ（所望の条数）のリード角４５度の螺
旋であり、且つトーションバーの中心から片側では左巻
き、他側では右巻きである螺旋に沿ってレーザ溶接を施
した後、徐冷する。Then, from above the wound amorphous alloy thin film sheet 2, a spiral with a lead angle of 45 degrees with a desired pinch (desired number of threads), and a spiral with a left-handed winding on one side and a right-handed winding on the other side from the center of the torsion bar. After performing laser welding along the lines, it is slowly cooled.
かくして、薄膜シート２は、トーションバー１の外周面
に固着される。In this way, the thin film sheet 2 is fixed to the outer peripheral surface of the torsion bar 1.
レーザ溶接に際して、溶接箇所のアモルファス合金は、
加熱溶融した後、徐冷されることになるが、それにより
結晶化して透磁率が低下する。その結果、第１図に示す
ように、トーションバー１の外周面に上記の溶接線に沿
った螺旋縞状の低透磁率部分３と螺旋縞状の高透磁率部
分４とが交互に形成された螺旋縞状の磁気異方性をもっ
た磁性体帯域が形成されることにより磁歪トルクセンサ
が構成される。During laser welding, the amorphous alloy at the welding location is
After being heated and melted, it is slowly cooled, but this causes crystallization and decreases magnetic permeability. As a result, as shown in FIG. 1, spiral striped low magnetic permeability portions 3 and spiral striped high magnetic permeability portions 4 are alternately formed along the welding line on the outer peripheral surface of the torsion bar 1. A magnetostrictive torque sensor is constructed by forming a magnetic band having spiral striped magnetic anisotropy.
上記のように製作された磁歪トルクセンサの使用に際し
ては、第３図に示すようにトーションバーの螺旋縞状の
磁気異方性をもった磁性体帯域の外周面を囲繞するよう
に環状のヨーク５が設けられ、ヨーク５には、左巻き螺
旋縞状の磁気異方性をもった磁性体帯域６及び右巻き螺
旋縞状の磁気異方性をもった磁性体帯域７の夫々に対応
して個別の励磁コイル８．９が巻回されている。そして
、励磁コイル８，９は、検出回路１０に接続されている
。When using the magnetostrictive torque sensor manufactured as described above, as shown in Fig. 3, an annular yoke is attached so as to surround the outer peripheral surface of the magnetic band of the torsion bar having spiral striped magnetic anisotropy. 5, and the yoke 5 is provided with a magnetic material zone 6 having left-handed spiral striped magnetic anisotropy and a magnetic material zone 7 having right-handed spiral striped magnetic anisotropy, respectively. A separate excitation coil 8.9 is wound. The excitation coils 8 and 9 are connected to a detection circuit 10.
トーションバー１の一端に回転動力源を結合し、他端に
負荷を結合して、トーションバー１を所望の計測回転速
度で回転駆動する。A rotation power source is connected to one end of the torsion bar 1, a load is connected to the other end, and the torsion bar 1 is driven to rotate at a desired measured rotation speed.
すると、トーションバー１に加わるトルクにより、回転
方向によりトーションバーの外周面の一方の側、例えば
左巻き螺旋縞状の磁気異方性をもった磁性体帯域６には
螺旋に沿って圧縮応力が加わり、他方の側１例えば右巻
き螺旋縞状の磁気異方性をもった磁性体帯域７には螺旋
に沿って引張応力が加わる６すると、夫々における螺旋
縞状の磁気異方性をもった磁性体帯域における透磁率は
、圧縮応力付加と引張応力付加とで正負に変化しその変
化の大きさは各応力の大きさによる。Then, due to the torque applied to the torsion bar 1, compressive stress is applied along the spiral to one side of the outer peripheral surface of the torsion bar, for example, the magnetic material zone 6 having left-handed spiral striped magnetic anisotropy, depending on the direction of rotation. , tensile stress is applied along the spiral to the other side 1, for example, a magnetic material band 7 having a right-handed spiral stripe-like magnetic anisotropy 6, then the magnetic material having a spiral stripe-like magnetic anisotropy on each side 6 The magnetic permeability in the body zone changes between positive and negative depending on the application of compressive stress and the application of tensile stress, and the magnitude of the change depends on the magnitude of each stress.
そこで、夫々の励磁コイル８．９による励磁において、
夫々の励磁コイル８，９のインダクタンスの変化を検出
し、その出力により各応力の大きさが求められ、それと
捩じり部の寸法及び物理的諸元とからトルクの大きさが
算出されるのである。Therefore, in excitation by each excitation coil 8.9,
The change in inductance of each exciting coil 8, 9 is detected, and the magnitude of each stress is determined from the output, and the magnitude of torque is calculated from that and the dimensions and physical specifications of the torsion part. be.
〔発明の効果）
この発明による磁歪トルクセンサは、製作が簡単であり
、品質が均一となる。[Effects of the Invention] The magnetostrictive torque sensor according to the present invention is easy to manufacture and has uniform quality.
アモルファス合金の薄膜シートに対するレーザ溶接線が
即、磁気的目盛となるので、面倒な機械加工を要さず、
目盛精度が高く、感度もよく、励磁電流も小さくてもよ
い。The laser weld line on the amorphous alloy thin film sheet instantly becomes a magnetic scale, eliminating the need for troublesome machining.
The scale accuracy is high, the sensitivity is good, and the excitation current may be small.
しかも、レーザ溶接が目盛形成ばかりでなく、トーショ
ンバーに対するアモルファス合金の薄膜シートの固着に
用いられているので、温度特性や経年変化の影響がなく
、剥離し難い。高精度が維持される。Moreover, since laser welding is used not only to form the scale, but also to fix the amorphous alloy thin film sheet to the torsion bar, it is not affected by temperature characteristics or aging, and is difficult to peel off. High accuracy is maintained.
トーションバーに同期した信号処理も不要であり、トー
ションバーの横揺れや磁気特性不均一による出力ドリフ
トがなく、又、ヒステリシスが小さい。There is no need for signal processing synchronized with the torsion bar, there is no output drift due to lateral vibration of the torsion bar or uneven magnetic properties, and hysteresis is small.
第１図は、この発明の実施例における磁歪トルクセンサ
の正面図、
第２図は、この発明の実施例における磁歪トルクセンサ
の断面図。
第３図は、この発明の実施例における磁歪トルクセンサ
を用いたトルク測定装置の構成図である。
１ニド−ジョンバー
２：アモルファス合金の薄膜シート
３；螺旋縞状の低透磁率部分
４：螺旋縞状の高透磁率部分 ５：ヨーク６：左巻き螺
旋縞状の磁気異方性をもった磁性体帯域磁性体帯域
７：右巻き螺旋縞状磁気異方性をもった磁性体帯域磁性
体帯域
８．９：励磁コイルFIG. 1 is a front view of a magnetostrictive torque sensor according to an embodiment of the present invention, and FIG. 2 is a sectional view of a magnetostrictive torque sensor according to an embodiment of the present invention. FIG. 3 is a configuration diagram of a torque measuring device using a magnetostrictive torque sensor according to an embodiment of the present invention. 1 Ni-joon version 2: thin film sheet of amorphous alloy 3; spiral striped low magnetic permeability portion 4: spiral striped high magnetic permeability portion 5: yoke 6: left-handed spiral striped magnetism with magnetic anisotropy Body band Magnetic band 7: Magnetic band with right-handed spiral striped magnetic anisotropy Magnetic band 8.9: Excitation coil
Claims (2)
角４５度の螺旋状の溶接線に沿つてのレーザ溶接及び徐
冷により形成された結晶化域で固着されたアモルファス
薄膜とから構成された磁歪トルクセンサ(1) Consisting of a torsion bar and an amorphous thin film wound around its outer circumferential surface and fixed in a crystallized region formed by laser welding along a spiral weld line with a lead angle of 45 degrees and slow cooling. magnetostrictive torque sensor
ら片側では左巻き、他側では右巻きである螺旋である特
許請求の範囲第１項に記載の磁歪トルクセンサ(2) The magnetostrictive torque sensor according to claim 1, wherein the spiral laser welding line is a left-handed spiral on one side and a right-handed spiral on the other side from the center of the torsion bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12812790A JPH0424530A (en) | 1990-05-19 | 1990-05-19 | Magnetostriction torque sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12812790A JPH0424530A (en) | 1990-05-19 | 1990-05-19 | Magnetostriction torque sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0424530A true JPH0424530A (en) | 1992-01-28 |
Family
ID=14977064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12812790A Pending JPH0424530A (en) | 1990-05-19 | 1990-05-19 | Magnetostriction torque sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0424530A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585574A (en) * | 1993-02-02 | 1996-12-17 | Mitsubishi Materials Corporation | Shaft having a magnetostrictive torque sensor and a method for making same |
| EP0867703A1 (en) * | 1997-03-25 | 1998-09-30 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Torque sensor installing method |
| WO2000062031A1 (en) * | 1999-04-07 | 2000-10-19 | Koyo Seiko Co., Ltd. | Rotation angle detector, torque detector and steering device |
| US7363827B2 (en) | 2005-10-21 | 2008-04-29 | Stoneridge Control Devices, Inc. | Torque sensor system including an elliptically magnetized shaft |
| US7469604B2 (en) | 2005-10-21 | 2008-12-30 | Stoneridge Control Devices, Inc. | Sensor system including a magnetized shaft |
| WO2017057750A1 (en) * | 2015-10-01 | 2017-04-06 | ヤマハ発動機株式会社 | Magnetostrictive sensor |
| WO2022043252A1 (en) * | 2020-08-26 | 2022-03-03 | Thyssenkrupp Presta Ag | Torque sensor unit with structured surface of the steering shafts |
-
1990
- 1990-05-19 JP JP12812790A patent/JPH0424530A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585574A (en) * | 1993-02-02 | 1996-12-17 | Mitsubishi Materials Corporation | Shaft having a magnetostrictive torque sensor and a method for making same |
| EP0867703A1 (en) * | 1997-03-25 | 1998-09-30 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Torque sensor installing method |
| US5880379A (en) * | 1997-03-25 | 1999-03-09 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Torque sensor installing method |
| WO2000062031A1 (en) * | 1999-04-07 | 2000-10-19 | Koyo Seiko Co., Ltd. | Rotation angle detector, torque detector and steering device |
| US7363827B2 (en) | 2005-10-21 | 2008-04-29 | Stoneridge Control Devices, Inc. | Torque sensor system including an elliptically magnetized shaft |
| US7469604B2 (en) | 2005-10-21 | 2008-12-30 | Stoneridge Control Devices, Inc. | Sensor system including a magnetized shaft |
| US7895906B2 (en) | 2005-10-21 | 2011-03-01 | Stoneridge Control Devices, Inc. | Sensor system including a magnetized shaft |
| US8001850B2 (en) | 2005-10-21 | 2011-08-23 | Stoneridge Control Devices, Inc. | Sensor system including a magnetized shaft |
| WO2017057750A1 (en) * | 2015-10-01 | 2017-04-06 | ヤマハ発動機株式会社 | Magnetostrictive sensor |
| JPWO2017057750A1 (en) * | 2015-10-01 | 2018-07-26 | ヤマハ発動機株式会社 | Magnetostrictive sensor |
| US10281346B2 (en) | 2015-10-01 | 2019-05-07 | Yamaha Hatsudoki Kabushiki Kaisha | Magnetostrictive sensor |
| WO2022043252A1 (en) * | 2020-08-26 | 2022-03-03 | Thyssenkrupp Presta Ag | Torque sensor unit with structured surface of the steering shafts |
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