JPH04225178A - Measuring device for semiconductor - Google Patents

Abstract

PURPOSE:To reduce a failure by position regulation and shorten a test time by making first the position regulation, there after carrying out a pretest and making this result the feedback to a handler or water probe in the case of defective. CONSTITUTION:First, a test object (DUT) is loaded onto a carrier system and position regulation is made. Nest, contact is made on and a start signal is sent to a tester. The pretest laying stress on the contact check is made and that quality is judged by the tester. In the case of defective, the contact is made off and the pretest result is made feedback to a handler or wafer probe. Again, the position regulation is carried out and the pretest is made. These operations are repeated N times till the pretest is passed. The DUT not passed even where the pretest is repeated N times is made defective. On the other hand, a main test is carried out to the DUT passed and the contact is made off after the end, the test result is received and the DUT is unloaded.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor measuring device having a function of improving the contact accuracy between an object to be tested and a measuring system by feeding back pretest results.

0002

2. Description of the Related Art A conventional semiconductor measuring device will be explained below. FIG. 2 is a flowchart of a conventional semiconductor measuring device. In FIG. 2, first, in step 1, an object to be tested (hereinafter referred to as DUT) is loaded onto the transport system, and in step 2, position regulation is performed. Next, in step 3, turn the contact
Set to N and send a start signal to the tester in step 4. In step 5, a test is performed by a tester, and in step 6
After receiving a test completion signal, the contact is turned off in step 7, the test result is received in step 8, and finally the DUT is unloaded in step 9.

0003

[Problems to be Solved by the Invention] However, in the conventional configuration described above, if the position regulation fails, the test is determined to be defective, which increases the number of defective re-examinations and, as a result, lengthens the test time. There was a problem.

SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems, and aims to provide a semiconductor specifying device that can reduce failures due to position regulation and shorten test time.

[0005]

[Means for Solving the Problems] In order to solve the above problems, the semiconductor measuring device of the present invention first performs position regulation, and then first performs a pre-test centered on contact checks, and detects defects. In this case, a means is provided for feeding back this pretest result to the handler or wafer probe to have the position regulation performed again.

[0006]

[Operation] With the above configuration, by feeding back the pretest results to the handler or wafer probe, it is possible to re-regulate the position of a DUT that once failed in position regulation, resulting in improved contact accuracy and re-inspection. As the number decreases, the overall test time can be shortened. Moreover, since the contact check that is originally performed is moved to the pretest side, there is almost no increase in test time due to the pretest.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a flowchart of a semiconductor measuring device according to an embodiment of the present invention.

In FIG. 1, first, in step 11, the DUT is loaded onto the transport system, and in step 12, the position is regulated. Next, in step 13, the contact is turned on, and in step 14, a start signal is sent to the tester. In the tester,
First, in step 15, a pretest centered on a contact check is carried out, and in step 16, the quality of the pretest is determined. If it is defective, turn off the contact in step 17.
Then, the pretest result is fed back to the handler or wafer probe, and the process returns to step 12 to perform position regulation again and perform the pretest. This operation is repeated N times in step 18 until the pretest passes. A DUT that does not pass even after repeating N times is determined to be defective. On the other hand, for the DUT that passed the pretest, the main test is carried out in step 19, and after finishing in step 20,
In step 21, the contact is turned off, and in step 22, the test result is received and unloaded.

[0009]

As described above, according to the present invention, by feeding back the pretest results to the handler or wafer probe, it is possible to improve the contact accuracy by regulating the position of the DUT, and the number of retests is reduced. , the overall test time can be reduced.

[Brief explanation of the drawing]

FIG. 1 is a flowchart of a semiconductor measuring device according to an embodiment of the present invention.

FIG. 2 is a flowchart of a conventional semiconductor measuring device.

[Explanation of symbols]

15 Pretest steps focusing on contact check

Claims (1)

[Claims] 1. A semiconductor measuring device comprising means for feeding back pretest results of a tester to a handler or a wafer prober to perform angular position regulation.