JPH0422443B2 - - Google Patents
Info
- Publication number
- JPH0422443B2 JPH0422443B2 JP26854185A JP26854185A JPH0422443B2 JP H0422443 B2 JPH0422443 B2 JP H0422443B2 JP 26854185 A JP26854185 A JP 26854185A JP 26854185 A JP26854185 A JP 26854185A JP H0422443 B2 JPH0422443 B2 JP H0422443B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- sample
- optical system
- shape measuring
- splitting prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000007547 defect Effects 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 5
- 230000001419 dependent effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003321 amplification Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 19
- 238000007689 inspection Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 230000003746 surface roughness Effects 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 239000006249 magnetic particle Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26854185A JPS62127618A (ja) | 1985-11-29 | 1985-11-29 | 表面形状測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26854185A JPS62127618A (ja) | 1985-11-29 | 1985-11-29 | 表面形状測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62127618A JPS62127618A (ja) | 1987-06-09 |
| JPH0422443B2 true JPH0422443B2 (zh) | 1992-04-17 |
Family
ID=17459957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26854185A Granted JPS62127618A (ja) | 1985-11-29 | 1985-11-29 | 表面形状測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62127618A (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6416904A (en) * | 1987-07-10 | 1989-01-20 | Fujitsu Ltd | Inspection instrument for surface waviness |
| JPH02140608A (ja) * | 1988-11-21 | 1990-05-30 | Fujitsu Ltd | 表面形状測定装置 |
| US5278635A (en) * | 1990-03-28 | 1994-01-11 | Konica Corporation | Surface defect detection apparatus |
| KR100488305B1 (ko) * | 2002-03-21 | 2005-05-11 | 주식회사 새 미 | 비접촉식 휴대용 표면거칠기 측정장치 |
-
1985
- 1985-11-29 JP JP26854185A patent/JPS62127618A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62127618A (ja) | 1987-06-09 |
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