JPH0422442B2 - - Google Patents
Info
- Publication number
- JPH0422442B2 JPH0422442B2 JP60165982A JP16598285A JPH0422442B2 JP H0422442 B2 JPH0422442 B2 JP H0422442B2 JP 60165982 A JP60165982 A JP 60165982A JP 16598285 A JP16598285 A JP 16598285A JP H0422442 B2 JPH0422442 B2 JP H0422442B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- hologram
- order diffracted
- diffracted light
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 62
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000001427 coherent effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Holo Graphy (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US702636 | 1985-02-19 | ||
US06/702,636 US4696572A (en) | 1985-02-19 | 1985-02-19 | Surface inspection apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61198012A JPS61198012A (ja) | 1986-09-02 |
JPH0422442B2 true JPH0422442B2 (US07576130-20090818-C00114.png) | 1992-04-17 |
Family
ID=24822033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60165982A Granted JPS61198012A (ja) | 1985-02-19 | 1985-07-29 | 表面検査装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4696572A (US07576130-20090818-C00114.png) |
JP (1) | JPS61198012A (US07576130-20090818-C00114.png) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4820049A (en) * | 1987-10-16 | 1989-04-11 | Zygo Corporation | Coating and method for testing plano and spherical wavefront producing optical surfaces and systems having a broad range of reflectivities |
JP2631134B2 (ja) * | 1988-07-13 | 1997-07-16 | 株式会社トプコン | 計算機ホログラムを利用した非球面形状測定用干渉計 |
DE3836564A1 (de) * | 1988-10-27 | 1990-05-03 | Zeiss Carl Fa | Verfahren zur pruefung von optischen elementen |
US4948253A (en) * | 1988-10-28 | 1990-08-14 | Zygo Corporation | Interferometric surface profiler for spherical surfaces |
JP3517903B2 (ja) * | 1993-06-21 | 2004-04-12 | 株式会社ニコン | 干渉計 |
US5563706A (en) * | 1993-08-24 | 1996-10-08 | Nikon Corporation | Interferometric surface profiler with an alignment optical member |
US5815268A (en) * | 1996-06-28 | 1998-09-29 | Raytheon Company | Lithographic lens wavefront and distortion tester |
DE19636386A1 (de) * | 1996-09-09 | 1998-03-12 | Bosch Gmbh Robert | Anordnung zur Prüfung von Oberflächen |
DE19818341B4 (de) * | 1998-04-23 | 2008-06-26 | Schneider Gmbh & Co. Kg | Interferometer zum Vermessen asphärischer Linsen |
KR100449711B1 (ko) * | 2001-12-21 | 2004-09-22 | 삼성전자주식회사 | 오목면과 홀로그램을 가지는 비구면 측정장치 및 방법 |
US6880942B2 (en) * | 2002-06-20 | 2005-04-19 | Nikon Corporation | Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system |
FR2914422B1 (fr) * | 2007-03-28 | 2009-07-03 | Soitec Silicon On Insulator | Procede de detection de defauts de surface d'un substrat et dispositif mettant en oeuvre ledit procede. |
WO2013064298A1 (en) * | 2011-11-01 | 2013-05-10 | Asml Holding N.V. | Lithographic apparatus and device manufacturing method |
US9733616B2 (en) | 2011-12-28 | 2017-08-15 | Exfo Inc. | Portable digital holographic probe for the inspection of optical fiber connectors, and inspection system and method for the same |
CN102717305A (zh) * | 2012-06-15 | 2012-10-10 | 天津大学 | 一种光学自由曲面原位测量方法 |
US9581437B2 (en) * | 2014-08-29 | 2017-02-28 | Apre Instruments, Llc | Interferometric non-contact optical probe and measurement |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS516550B1 (US07576130-20090818-C00114.png) * | 1969-03-31 | 1976-02-28 |
-
1985
- 1985-02-19 US US06/702,636 patent/US4696572A/en not_active Expired - Lifetime
- 1985-07-29 JP JP60165982A patent/JPS61198012A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
US4696572A (en) | 1987-09-29 |
JPS61198012A (ja) | 1986-09-02 |
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