JPH0422269Y2 - - Google Patents
Info
- Publication number
- JPH0422269Y2 JPH0422269Y2 JP6216984U JP6216984U JPH0422269Y2 JP H0422269 Y2 JPH0422269 Y2 JP H0422269Y2 JP 6216984 U JP6216984 U JP 6216984U JP 6216984 U JP6216984 U JP 6216984U JP H0422269 Y2 JPH0422269 Y2 JP H0422269Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- resistor
- flow
- flow rate
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 229920000114 Corrugated plastic Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6216984U JPS60174836U (ja) | 1984-04-28 | 1984-04-28 | 流量検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6216984U JPS60174836U (ja) | 1984-04-28 | 1984-04-28 | 流量検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60174836U JPS60174836U (ja) | 1985-11-19 |
| JPH0422269Y2 true JPH0422269Y2 (it) | 1992-05-21 |
Family
ID=30591126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6216984U Granted JPS60174836U (ja) | 1984-04-28 | 1984-04-28 | 流量検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60174836U (it) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2571720B2 (ja) * | 1990-07-10 | 1997-01-16 | 山武ハネウエル株式会社 | 流量計 |
| JP2005003534A (ja) * | 2003-06-12 | 2005-01-06 | Tokyo Gas Co Ltd | 整流器 |
| JP4719075B2 (ja) * | 2006-05-08 | 2011-07-06 | 矢崎総業株式会社 | 流量計 |
| JP5014178B2 (ja) * | 2008-01-24 | 2012-08-29 | アズビル株式会社 | ガスメータ |
-
1984
- 1984-04-28 JP JP6216984U patent/JPS60174836U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60174836U (ja) | 1985-11-19 |
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