JPH04221408A - Laminated magnetic head and its manufacture - Google Patents

Abstract

PURPOSE:To improve the accuracy of track width by a method wherein the tape rubbing plane of a laminated magnetic head is so constructed as not to be worn unevenly. CONSTITUTION:A protruding main core part whose track width TW and laminated core length l are limited is provided at a central part of the tape rubbing plane of a magnetic head 17 and a non-magnetic wear-resistant film 16 is formed on the tape rubbing plane except the protruding main core part.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated magnetic head having a structure in which an alloy magnetic film is surrounded by a substrate, and a method for manufacturing the same.

0002

2. Description of the Related Art Metal tapes with high coercive force are used in magnetic recording and reproducing devices in order to achieve high density and high quality. For this reason, the magnetic head uses an alloy magnetic material with a high saturation magnetic flux density, such as amorphous or sendust. In order to create a head core with such a thin alloy magnetic material and improved high frequency characteristics, a thin film is formed on the auxiliary substrate.

FIG. 5(a) shows a conventional laminated head using such a head core and a method of manufacturing the same. First, the laminated head structure has a magnetic thin film sandwiched between auxiliary substrates to increase the mechanical strength and tape wear resistance of the laminated head. That is, the alloy magnetic film 1 constituting the track width TW is deposited on an auxiliary substrate 2A made of a ceramic material such as crystallized glass by sputtering or the like, and then attached to another auxiliary substrate 2B via an adhesive glass layer 3. The sandwiched state is heat treated and bonded to form a pair of laminated head core halves 4A and 4B. These laminated head core halves 4A and 4B are stacked on the gap surface using a gap material such as glass and an adhesive to form a gap 5, and the two core halves are integrated with a sealing glass 6 from the vicinity of the gap. This is the lamination head 7. FIG. 5(b) is a top view of FIG. 5(a), that is, a front view of the head on which the tape of the laminated head slides, and the track width TW due to the alloy magnetic film 1 is laminated over the entire area along the tape sliding direction. The head core has a length L, and auxiliary substrates 2A and 2B are separated on both sides of the head core. 5(c) is a side sectional view of FIG. 5(b).

That is, for the core forming part of the track width TW, amorphous or sendust materials are selected and used, which have excellent magnetic properties and wear resistance against tape sliding. However, because the track width TW is narrow for high-density recording, and metal tends to wear easily, head wear due to tape sliding is large and the life of the head is shortened. For this reason, the auxiliary substrates 2A, 2B on both sides of the track width TW are made of a ceramic material that is hard to wear, and the auxiliary substrates 2A, 2B are
The tape is slid on the core width CW, which is the sum of both 2B and the track width TW. In the laminated head 7 configured in this way, wear caused by tape sliding is reduced, and head life is improved.

[0005] In general, magnetic heads require a head lifetime guarantee for the equipment in which they are used. Therefore, possible methods for extending the life of the head include (1) increasing the head gap depth GD, (2) selecting a more wear-resistant material for the auxiliary substrates 2A and 2B, and (2) increasing the head core thickness CW.

However, (2) cannot be made too large because it causes a decrease in the sensitivity of the magnetic properties. Moreover, ■ and ■ work to further increase the step difference due to uneven wear. Especially ■、■
An uneven wear step d as shown in FIG. 2 occurs over the entire length L direction of the head core on which the tape slides. As an example, the head has a track width TW of about 10 to 50 microns formed of amorphous or sendust on the ceramic auxiliary substrate 2A.
2B, the total thickness of the core width CW is 150 microns, the tape sliding core length L is 2 mm, and the size of the uneven wear step d produced on the front surface of the head is about 200 angstroms. Such uneven wear steps act as a loss of space between the tape and the head, resulting in a decrease in head performance.

[0007]

However, in the conventional configuration described above, the track width TW is such that the laminated core is sandwiched between wear-resistant materials, so the track width TW portion consisting of the auxiliary substrates 2A, 2B and the alloy magnetic film 1 is There is a difference in the way in which the attached glass layer 3 is reduced, and the reduction in the track width TW portion is much lower than that in the auxiliary substrate 2A, 2B portions with respect to the tape sliding surface, and uneven wear steps are formed. Further, since the attached glass layer 3 is reduced more greatly than the alloy magnetic film 1, the uneven wear of the track width TW is increased.

The present invention solves the above-mentioned problems, and has high track width accuracy, no difference in wear between the head core section and the auxiliary substrate, so there is no loss of space, the life of the head is improved, and the head slider is suitable for tapes. It is an object of the present invention to provide a laminated magnetic head and a method for manufacturing the same, in which the contact conditions between the two are improved because a dynamic surface is obtained.

[0009]

[Means for Solving the Problems] In order to achieve the above object, the present invention provides two or more alloy magnetic films formed on a first auxiliary substrate with one or more non-magnetic insulating films sandwiched therebetween; In a laminated magnetic head having at least the alloy magnetic film side of the auxiliary substrate and a second auxiliary substrate bonded by adhesive glass or the like, a track width and a laminated core length are provided at the center of the tape sliding surface of the laminated magnetic head. According to a structure having at least a convex main core portion formed by limiting the convex main core portion, and a non-magnetic wear-resistant film formed on the tape sliding surface around the main core portion other than the convex main core portion. .

0010

[Operation] With the above structure, the present invention has the peripheral tape sliding surface of the main core part made of a non-magnetic wear-resistant film, which eliminates uneven wear and prevents contact between the main magnetic path laminated head core and the tape. height to prevent loss of space between the two.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A laminated magnetic head according to an embodiment of the present invention will be described below with reference to the drawings.

FIGS. 1, 2, 3 and 4 show a laminated magnetic head and a method of manufacturing the same according to the present invention.

The figure shows that one or more alloy magnetic films 11 such as amorphous or sendust are formed on a first auxiliary substrate 10A with one or more non-magnetic insulating films in between by sputtering or the like, and then a second auxiliary substrate 10B is formed. The laminated core halves 13A and 13B are bonded together using adhesive glass 12, and this laminated core half pair 13
Track width TW with gap g by A, 13B
are formed and integrated by a sealing glass 15 from the vicinity of the winding window 14, leaving a track width TW of the required dimension of the track width portion TW of the laminated core and a laminated core length l in the tape sliding direction, The periphery of the laminated head core is a suitable non-magnetic wear-resistant film 16 made of ferrite, ceramics, glass, etc.
This is a laminated head 17 having a structure comprised of the following.

FIG. 2 shows that the laminated head 17 of FIG. 1 is coated with a suitable wear-resistant material 18 such as diamond or SiC, which is non-magnetic and has excellent wear resistance against tape sliding, on the front surface of the head where the tape slides. The lamination head 19 has a scattered or uniformly formed structure.

Next, a method of manufacturing a laminated magnetic head according to the present invention will be explained with reference to FIG.

As shown in FIG. 3A, an alloy magnetic film 11 made of an amorphous alloy, a nitride alloy, a sendust alloy, or the like is deposited on the auxiliary substrate 10 by sputtering, vapor deposition, or the like. The film thickness is made equal to or thicker than the required head track width TW. Thereafter, they are sequentially stacked with adhesive glass 12 interposed therebetween, pressurized, heat treated, and welded to bond them together to form laminated core halves 13A and 13B.

The auxiliary substrate 10 is made of a magnetic material such as ferrite or sendust, or a non-magnetic ceramic such as MgO-TiO2 or MgO-NiO. Also adhesive glass 1
Crystallized glass is used for 2, and the melting point of the crystallized glass after bonding is increased by heat treatment during bonding, so that the bonded glass 12 portion does not loosen even during heat treatment in the subsequent manufacturing process. A winding groove 14 is provided in the laminated core half 13B.

FIG. 3(b) shows the laminated core halves 13A and 13B.
A gap g is formed through the glass film, and the track width TW is
The sealing glass 1 provided in the winding window 14 is aligned at a predetermined position.
5 to manufacture an integrated laminated head block 20. Let L be the core length of the laminated head block 20.

FIG. 3(c) shows how the head track width TW formed of the alloy magnetic film 11 is set to a predetermined track width TW and the head core length L is set from the front side of the laminated head block 20, that is, the side where the head track width TW is formed. The head core is reduced to a predetermined length l, a convex main core portion is left, and other auxiliary substrates are removed to form a recessed step portion 21. The depth of the recessed step portion 21 is such that it reaches the head gap depth GD or a part of the winding groove 14. The step portion 21 can be processed by laser, ion milling, machining using a grindstone, electrochemical etching, or the like.

FIG. 3(d) shows M made of non-magnetic material on the processing step 21.
Composite oxides such as go-TiO2 and ZnO-Fe2O3, oxides such as α-Fe2O3 and Al2O3, and non-magnetic metals such as Cr, Cu or SuS304 are deposited by sputtering or vapor deposition. This is the state of the laminated head block 20.

Next, by cutting the laminated head block 20 shown in FIG. 3(d) along line C-C',
As shown in e), the lamination head 17 shown in FIG. 1 is obtained.

FIG. 3(f) shows such a laminated head body 1.
7, the same surface is rounded with an abrasive tape from the front surface of the head on which the tape slides.

FIG. 4 shows a tape sliding surface in which protrusions 18 made of fine diamond particles, a wear-resistant material such as SiC are dotted on the head surface by ion implantation or sputtering at a height of about 500 Å or less. .

It is preferable to form the projections 18 of the wear-resistant material after the lamination head 19 has been finished into the required dimensions and shape. Further, it is preferable to shape the head surface in advance so that the protrusion 18 can be easily formed.

[0025]

As is clear from the above embodiments, according to the present invention, a convex shape is formed at the center of the tape sliding surface of a laminated magnetic head with a limited track width and laminated core length. Since the structure has at least a main core part and a non-magnetic wear-resistant film formed on the tape sliding surface around the main core part other than the convex main core part, misalignment of the head track end can be prevented. In addition, there is no difference in wear between the head core and the auxiliary board, so there is no loss of space, and the life of the head is improved.Furthermore, a head sliding surface that is compatible with the tape is obtained, so there is no contact between the two. It is possible to provide a laminated magnetic head with improved conditions and a method for manufacturing the same.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a stacked magnetic head in an embodiment of the present invention.

FIG. 2 is a perspective view of a multilayer magnetic head according to another embodiment of the present invention.

[Fig. 3] Manufacturing process diagram of the laminated magnetic head of the present invention

[Figure 4
]A diagram illustrating a method of manufacturing a laminated magnetic head according to another embodiment of FIG. 2.

[Figure 5] (a) Perspective view of a conventional multilayer magnetic head (b)
Plan view of the magnetic head (c) Side sectional view of the magnetic head

[Explanation of symbols]

10A First auxiliary substrate 10B Second auxiliary substrate 11 Alloy magnetic film 12 Adhesive glass 16 Wear-resistant film 17 Laminated head TW Limited track width l Limited laminated core length g
gap

Claims (4)

[Claims] 1. One or more alloy magnetic films sandwiching one or more non-magnetic insulating films formed on a first auxiliary substrate are bonded to the alloy magnetic film side of the first auxiliary substrate by adhesive glass or the like. a convex main core formed in the center of the tape sliding surface of the laminated magnetic head with a limited track width and a laminated core length; What is claimed is: 1. A laminated magnetic head comprising at least a non-magnetic wear-resistant film formed on a tape sliding surface around the main core portion other than the convex main core portion. 2. The laminated magnetic head according to claim 1, wherein the nonmagnetic wear-resistant film is made of a highly hard film such as diamond or silicon carbide. 3. The laminated magnetic head according to claim 2, wherein the high hardness film has a thickness of 500 Å or less. 4. A laminated magnetic head having at least an alloy magnetic film sandwiched between auxiliary substrates, in the center of the tape sliding surface;
A process of removing the auxiliary substrate part leaving the main core part having a track width and laminated core length of limited dimensions to form a minute recessed step part, and applying a non-magnetic wear-resistant material to the recessed step part. 1. A method of manufacturing a laminated magnetic head, comprising the step of forming a film.