JPH07110910A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To produce a magnetic head excellent in resistance to wearing with higher workability and higher productivity. CONSTITUTION:In the production of a magnetic head of a lamination type, a process is conducted to laminate and join strip-shaped substrates 1 each having a ferromagnetic metal film 2 in plurality integral, a process to cut a plurality of core blocks out of the substrates 1 integrated in the direction almost orthogonal to the surface where the ferromagnetic metal film 2 is formed and a process to join a pair of core blocks with at least one thereof subjected to the working of a winding groove 7 integral through a gap material. Moreover, a process is arranged to perform a grooving at least at a part of the substrate portion on the sliding surface side of a magnetic recording medium of the core blocks integrated along the ferromagnetic metal film 2 for filling with a hard to wear non-magnetic material 11 and a process to perform the slicing of the core blocks having a groove filled with the hard to wear non-magnetic material 11 at each head tip.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a so-called laminate type magnetic head in which a ferromagnetic metal film is sandwiched by a pair of head cores.

[0002]

2. Description of the Related Art In magnetic recording / reproducing devices such as video tape recorders and digital data recorders, the recording signal density and frequency have been increased, and magnetic powder has been used as a magnetic recording medium corresponding thereto. Fe, Co, N
A so-called metal tape using a ferromagnetic metal powder such as i, or a so-called vapor deposition tape in which a magnetic layer is formed by directly depositing a ferromagnetic metal material on a base film by a vacuum vapor deposition method is used. It is like this.

Here, since such a metal tape or a vapor-deposited tape has a high residual magnetic flux density Br and a high coercive force Hc, a magnetic head used for recording and reproduction also has a material having a high saturation magnetic flux density Bs and a high magnetic permeability. Is required. Further, it is also important that the magnetic head can have a narrower track width so as to increase the recording track density recorded on the magnetic recording medium.

As a magnetic head which meets such a demand, a magnetic core half body obtained by sandwiching a ferromagnetic metal film made of various metallic magnetic materials between nonmagnetic core substrates such as ceramics is used. A so-called laminate type magnetic head has been proposed, which is formed by joining and integrating so as to abut each other.

This laminated type magnetic head can easily achieve a narrow track by controlling the thickness of the ferromagnetic metal film, has no structural pseudo gap, and has a simple manufacturing process. , It has various advantages.

[0006]

In order to increase the recording density and frequency of recording signals, the magnetic tape is slid at high speed with respect to the magnetic head. In addition to the above requirement, it is necessary to have abrasion resistance against sliding of the magnetic tape.

Therefore, in the above laminated type magnetic head, the wear resistance of the sliding surface of the magnetic recording medium is ensured by selecting a material having high wear resistance as the core substrate for sandwiching the ferromagnetic metal film. ing.

However, the core substrate having high wear resistance is difficult to cut, and the workability of the substrate cutting process and the winding groove cutting process in manufacturing is poor. Therefore, there is a problem that productivity of the magnetic head is reduced.

Therefore, the present invention has been proposed in view of such conventional circumstances, and an object thereof is to provide a method of manufacturing a magnetic head capable of manufacturing a magnetic head having wear resistance with high productivity. And

[0010]

In order to achieve the above-mentioned object, a method of manufacturing a magnetic recording medium according to the present invention includes a plurality of strip-shaped substrates on which a ferromagnetic metal film is formed, which are superposed and bonded together. A step of cutting the integrated substrate in a direction substantially orthogonal to the surface on which the ferromagnetic metal film is formed, and cutting out a plurality of core blocks; and a pair of core blocks in which at least one has been subjected to winding groove processing. And the step of joining and integrating them with a gap material, and at least a part of the magnetic recording medium sliding surface side of the joined and integrated core block is grooved along the ferromagnetic metal film to make it hard to wear. The method includes a step of filling a magnetic material and a step of slicing a core block having grooves filled with a hard-wearing non-magnetic material into each head chip.

[0011]

In the manufacturing method of the present invention, a pair of magnetic core half blocks in which ferromagnetic metal films are interposed in parallel are produced by performing various cutting processes and groove cutting processes, and the pair of magnetic core half blocks are formed. The magnetic core block is formed by joining and integrating so that the end faces of the metal magnetic film face each other. Then, at least a part of the substrate portion on the sliding surface side of the magnetic recording medium of the magnetic core block is grooved along the ferromagnetic metal film and filled with a hard-wearing non-magnetic material, and each head chip is sliced. By doing so, the magnetic head is manufactured.

When the hard-wearing non-magnetic material is added only to the front side at the final stage after the core block is manufactured, the hard-wearing non-magnetic material is cut and processed until the core block is manufactured. Since they will not be involved in the cutting process, these processes are performed quickly and satisfactorily,
Precisely shaped magnetic heads are manufactured with high productivity.

Further, since the magnetic head manufactured in this manner is filled with a hard-wearing non-magnetic material on the front side, the hard-wearing non-magnetic material has a wear resistance against sliding of the magnetic recording medium. It is ensured by and exhibits excellent high-speed slidability.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the drawings.

Embodiment 1 First, the structure of a magnetic head manufactured by the manufacturing method of this embodiment will be described.

The magnetic head produced in this embodiment comprises a pair of magnetic core halves I and II formed by sandwiching a ferromagnetic metal film 2 made of sendust or the like between nonmagnetic core substrates 14 as shown in FIG. , The ferromagnetic metal film 2 is joined and integrated so that the end faces of the ferromagnetic metal film 2 are abutted with each other, and the end faces of the ferromagnetic metal film 2 are abutted with each other at the abutting faces of the magnetic core halves I and II. A gap g is formed. Track width Tw of this magnetic gap g
Is regulated by the thickness of the ferromagnetic metal film 2 because the core substrate 14 is a non-magnetic material. A winding groove 7 is cut on one of the magnetic core halves I and II to regulate the front depth of the magnetic gap g.

In this magnetic head, only the vicinity of the sliding surface 20 of the magnetic recording medium in the non-magnetic core substrate 14 is made of the hard-wearing non-magnetic material 11, and the rest is made of the easily-wearing material 1. There is. Therefore, the wear resistance of the magnetic recording medium against sliding is ensured by the hard-wearing non-magnetic material 11 forming the vicinity of the sliding surface 20 of the magnetic recording medium.

Further, it is a very small portion of the core substrate 14 that is made of the hard-wearing non-magnetic material 11, and most of the core substrate 14 is made of the easily-wearable material 1. By adopting such a manufacturing process, it is possible to manufacture with good workability and high productivity.

That is, the magnetic head having such a structure is manufactured as follows.

First, as shown in FIG. 2, a ferromagnetic metal film 2 is formed by vacuum thin film forming method such as sputtering on the entire surface of one side of a substrate made of abradable non-magnetic material 1 to form a plurality of strip substrates 3. Create. At this time, the film thickness of the ferromagnetic metal film 2 formed corresponds to the track width Tw in the magnetic gap g of the magnetic head to be formed.

As the ferromagnetic metal film, for example, the following can be used. (1) Fe-Al-Si, Fe-Ni-Al-Si, F
e-Ga-Si, Fe-Al-Ge, etc., and C in these
o, Ti, Cr, Nb, Mo, Ta, Ru, Au, P
Crystalline material to which d, N, C, O, etc. are added in a proportion of 8 atomic% or less (2) Co is mainly Zr, Ta, Ti, Hf, Mo,
Amorphous material formed by adding one or several kinds of Nb, Au, Pd, Ru, etc. (3) Co, Fe mainly Ni, Zr, Ta, Ti,
Hf, Mo, Nb, Si, Al, B, Ga, Ge, C
u, Sn, Ru, B, etc., and N, C, O
Microcrystalline material formed by adding one or several kinds of

The ferromagnetic metal film 2 is not limited to a single layer film.
No, SiO₂, Al₂O₃, Si₃N _FourSuch as oxides and nitrogen
Ferromagnetic metal with a small thickness through an electrically insulating film such as a compound
It may be a laminated film in which the film 2 is stacked in multiple layers. Ferromagnetism
By forming the metal film 2 into a laminated film,
The eddy current loss in the wave band can be significantly reduced.
It

Then, as shown in FIG. 3, the ferromagnetic metal film 2 is formed.
A plurality of strip substrates 3 on which are formed are stacked so that the easily abradable material 1 and the ferromagnetic metal film 2 are alternately juxtaposed, and bonded and integrated to produce a magnetic core substrate block 4.

As a method for joining the strip substrates 3, conventionally known joining methods such as low temperature thermal diffusion joining utilizing heat diffusion between precious metal layers and glass fusion can be adopted.

Then, the magnetic core substrate block 4 is
As shown in FIG. 4, the ferromagnetic metal film 2 is cut in a substantially orthogonal direction along the lines AA ′, BB ′, and CC ′ in the drawing, and a plurality of pieces are cut as shown in FIG. Magnetic core half block 5,
Cut out 6. The end faces of the ferromagnetic metal films 2 formed on the strip substrates 3 are exposed at the end faces of the magnetic core half blocks 5 and 6, and the end faces exposed by the ferromagnetic metal films 2 are magnetic core halves. It becomes the butt surface of the blocks 5 and 6.

On the abutting surface of this magnetic core half block,
A winding groove is formed by cutting across each ferromagnetic metal film 2.

Then, as shown in FIG. 6, a magnetic core half block 6 having the winding groove 7 formed therein and a magnetic core half block 5 produced in the same manner except that the winding groove is not formed. After the abutting surfaces are each smooth-polished, the abutting surfaces are abutted via a gap spacer to join and integrate them. At this time, the magnetic core half blocks are joined and integrated so that the end faces of the ferromagnetic metal film 2 precisely face each other and abut against each other.

As a result, as shown in FIG. 7, a magnetic core block 9 having a magnetic gap g which operates as a recording / reproducing gap between the abutting surfaces of the ferromagnetic metal film 2 is obtained. The gap spacer 8 is formed by depositing a gap material on the abutting surfaces of the magnetic core half blocks 5 and 6 by a vacuum thin film forming method such as sputtering.

Next, as shown in FIG. 8, the front surface of the magnetic core block 9 thus formed is grooved along the ferromagnetic metal film 2 so that only the ferromagnetic metal film 2 is formed. Make it stick out and remain.

The groove processing can be performed by grinding with a grindstone or laser processing. Also, at this time,
The bottom surface of the groove may be formed as a curved surface having a constant curvature as shown in FIG. 8 or may be formed as a flat surface.

Next, as shown in FIG. 9, the hard-wearing non-magnetic material 11 is formed in the groove 10 formed on the front surface.
To fill.

The hard-wearing non-magnetic material 11 preferably has a Vickers hardness of 800 or more, for example, SiC,
_{ZrO 2, Fe 2 O 3,} Al 2 O 3, Al 2 O 3 -Ti
C, the non-magnetic material is the main component, TiO _2, NiO-CaTiO ₃ or the like. These non-magnetic materials are filled in the groove portion 10 by a vacuum thin film forming method such as sputtering or CVD, or a method of depositing by spraying fine particles such as powder, beam or deposition at a high speed.

Finally, this hard-wearing non-magnetic material 1
The surface filled with 1 is lapped until the front depth of the magnetic gap g reaches a predetermined value to form a cylindrical magnetic recording medium sliding surface 20, and D-D ', E in FIG. −
Each head chip is cut out by cutting along the line E'to complete the magnetic head.

The magnetic head is manufactured through various cutting and cutting processes as described above. In this manufacturing method, first, the strip substrate 3 is made of an easily abradable material, and the final stage after the magnetic core block 9 is manufactured. Then, the hard-wearing non-magnetic material 11 is added only to the front side. That is, in the process until the magnetic core block 9 is manufactured, the cutting process and the cutting process are performed on the low-wear material, and not on the hard-wear non-magnetic material. Therefore, these processes are performed quickly and satisfactorily, and the magnetic head having a precise shape can be manufactured with high productivity.

In the above, the case where a non-magnetic material is used as the easily abradable material used for the strip-shaped substrate 3 is used as an example, but a magnetic material such as ferrite is used as the easily abradable material, or in FIG. As shown in the figure, the strip-shaped substrate 3 may be composed of the magnetic material 12 and the non-magnetic material 13 so that the back side of the head is the magnetic material 12. When the back side of the magnetic head is made of a magnetic material in this way, the rear magnetic resistance is reduced and high head efficiency is obtained.

Embodiment 2 The magnetic head produced in this embodiment is composed of a pair of magnetic core halves I in which ferromagnetic metal films 2 made of sendust or the like are sandwiched between nonmagnetic core substrates 14 as shown in FIG. , I
I is joined and integrated so that the end faces of the ferromagnetic metal film 2 face each other.
A magnetic gap g is formed by abutting the end faces of the ferromagnetic metal film 2 at the abutting faces of I. The track width Tw of the magnetic gap g is regulated by the film thickness of the ferromagnetic metal film 2 because the core substrate 14 is a non-magnetic material. A winding groove 7 is cut on one of the magnetic core halves I and II to regulate the front depth of the magnetic gap g.

In this magnetic head, the non-magnetic core substrate 14 is made of the hard-wearing non-magnetic material 11 only in the vicinity of the sliding surface 20 of the magnetic recording medium except for the vicinity of the ferromagnetic metal film 2. The balance is made of the easily abradable material 1.

That is, in the non-magnetic core substrate, when viewed from the sliding surface 20 of the magnetic recording medium, the vicinity of the ferromagnetic metal film 2 is made of the easily abradable material 1, and the portion except the vicinity of the metal magnetic thin film 2 is removed. Is made of a hard-wearing non-magnetic material 11. Therefore, the wear resistance of the magnetic recording medium against sliding is ensured by the hard-wearing non-magnetic material 11 which constitutes the portion of the vicinity of the sliding surface 20 of the magnetic recording medium excluding the vicinity of the metal magnetic thin film 2.

Further, the metal magnetic thin film 2 is relatively easily abraded, and when it is directly sandwiched by the abradable non-magnetic material 11, due to the difference in the abrasion rate, the ferromagnetic metal is less than that of the core substrate 14. The membrane 2 is largely worn unevenly. As a result, a step may be generated on the sliding surface of the magnetic recording medium, resulting in a decrease in output. On the other hand, this magnetic head has a configuration in which the easily abradable material 1 is interposed between the hardly abradable non-magnetic material 11 and the ferromagnetic metal film 2. Therefore, such uneven wear is alleviated by the easily wearable material 1 interposed between the hard-wearing non-magnetic material 11 and the ferromagnetic metal film 2, and the reduction in output due to the uneven wear is avoided.

Furthermore, in the magnetic head, the core substrate 14 is made of the hard-wearing non-magnetic material 11 only near the sliding surface of the magnetic recording medium, and most of the core substrate 14 is easy. Since it is made of the abradable material 1, it can be manufactured with good workability and high productivity by taking the following manufacturing steps.

That is, the magnetic head having such a structure is manufactured as follows.

First, a strip-shaped substrate having a metal magnetic thin film formed on a substrate made of an easily abradable non-magnetic material is joined and integrated to form a magnetic core substrate block. Then, this magnetic core substrate block is cut into a magnetic core half block, and a winding groove is cut into this magnetic core half block. Then, the magnetic core half block having the winding groove cut and the magnetic core half block having the winding groove not cut are joined and integrated to produce a magnetic core block. The steps up to this point are the same as in the case of the first embodiment.

Then, the front surface of the magnetic core block thus formed is grooved. As shown in FIG. 12, the groove processing is performed so that the easily abradable material 1 partially remains in the vicinity of the metallic magnetic thin film 2 along the metallic magnetic thin film 2, and the metallic magnetic thin film 2 and the easily abraded material in the vicinity thereof are formed. Only 1 is projected. As the processing method, any of the methods illustrated in Example 1 can be adopted.

At this time, the width Ew of the easily abradable material 1 partially left in the vicinity of the metal magnetic thin film 2 is Sw as shown in FIG. 11, and the width of the sliding surface of the magnetic recording medium is Sw. Is Tw, Ew ≦ (Sw−Tw)
It is desirable to set so as to satisfy the condition of / 4.
If the width Ew of the easily abradable material is larger than (Sw-Tw) / 4, the wear resistance of the magnetic head becomes insufficient.

Then, as shown in FIG. 13, the groove formed on the front side surface is filled with the hard-wearing non-magnetic material 11. As for the method of filling the non-wearing non-magnetic material and the non-wearing non-magnetic material, any of the methods and materials exemplified in Example 1 can be adopted.

Finally, on the surface filled with this non-magnetic material,
Lapping is performed until the front gap reaches a predetermined depth to form a tape sliding surface 20 having a cylindrical surface.
Each head chip is cut out by cutting along the lines DD 'and EE' to complete the magnetic head.

In this manufacturing method, an easily abradable material is first used for the strip-shaped substrate 3, and the abradable nonmagnetic material 11 is added only to the front side at the final stage after the magnetic core block 9 is manufactured. That is, in the process until the magnetic core block 9 is manufactured, the cutting process and the cutting process are performed on the low-wear material, and not on the hard-wear non-magnetic material. Therefore, these processes are performed quickly and satisfactorily, and the magnetic head having a precise shape can be manufactured with high productivity.

In the above, the case where a non-magnetic material is used as the easily abradable material used for the strip-shaped substrate 3 has been taken as an example. In this case as well, as in the case of Example 1, ferrite or the like is used as the easily abradable material. Alternatively, the strip-shaped substrate 3 may be made of a magnetic material and a non-magnetic material so that the back side of the head is made of the magnetic material. When the back side of the magnetic head is made of a magnetic material in this way, the rear magnetic resistance is reduced and high head efficiency is obtained.

Next, a magnetic head was actually manufactured by the manufacturing method of Examples 1 and 2 and a wear test was conducted. The materials used and head dimensions are shown below.

Magnetic Head Material of Example 1 Easily Wearable Material Used for Strip Substrates: Nonmagnetic Zn-Ferrite Ferromagnetic Metal Film: CoZrMoPd Amorphous Film Hardwearing Nonmagnetic Material: ZrO ₂ Sputtered Film Dimensions Vertical × Horizontal × Thickness: 2 mm × 2 mm × 0.2 mm Width of contact with the sliding surface of the magnetic recording medium: 60 μm Radius of curvature R of the sliding surface of the magnetic recording medium: 8 mm

Thickness of ferromagnetic metal film: 20 μm

Magnetic Head Material of Example 2 Easily Wearable Material Used for Strip Substrates: Non-magnetic Zn-Ferrite Ferromagnetic Metal Film: CoZrMoPd Amorphous Film Hardly Wearable Non-magnetic Material: ZrO ₂ Sputtered Film Dimensions Vertical x Horizontal x Thickness: 2 mm × 2 mm × 0.2 mm Width of contact with the sliding surface of the magnetic recording medium: 60 μm Radius of curvature R of the sliding surface of the magnetic recording medium: 8 mm

Thickness of ferromagnetic metal film: 20 μm Width of easily abradable material near metal magnetic thin film on sliding surface of magnetic recording medium: 5 μm on both sides

A wear test was conducted at a temperature of 30 ° C. and a relative humidity of 80.
In a high humidity environment of 10%, a BVW-50 (Betacam SP) manufactured by Sony Corporation as a video set was used, and a BCT-90ML (Betacam SP metal tape) manufactured by Sony Corporation was used as a magnetic tape. . FIG. 14 shows the relationship between the tape running time and the amount of wear of the sliding surface of the magnetic recording medium.

For comparison, a magnetic head was manufactured in the same manner except that the groove was not formed in the magnetic head block and the hard-wearing nonmagnetic material was not filled (Comparative Example 1).
A wear test was performed. The results are also shown in FIG.

It can be seen from FIG. 14 that the magnetic heads of Examples 1 and 2 have much better wear resistance than the magnetic head of Comparative Example 1. From this, it was found that forming a groove on the sliding surface of the magnetic recording medium and filling the groove with a hard-wearing non-magnetic material is effective in obtaining a magnetic head having high wear resistance.

[0057]

As is apparent from the above description, according to the present invention, the step of superposing and integrating a plurality of strip-shaped substrates on which a ferromagnetic metal film is formed, and the integrated substrate are combined. A step of cutting out a plurality of core blocks by cutting in a direction substantially orthogonal to the surface on which the magnetic metal film is formed, and a pair of core blocks in which at least one of them has been subjected to winding groove processing are joined and integrated via a gap material. A step of forming a groove along the ferromagnetic metal film on at least a part of the substrate portion on the magnetic recording medium sliding surface side of the core block joined and integrated, and filling the hard-wearing non-magnetic material; Since it has a step of slicing a core block whose grooves are filled with a hard-wearing non-magnetic material to each head chip, a laminated type magnetic head with excellent wear resistance can be manufactured with high processability and high productivity. It is possible.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration example of a magnetic head manufactured by a manufacturing method of the present invention.

2 is a perspective view showing a method of manufacturing the magnetic head shown in FIG. 1 in order of steps and showing a step of forming a ferromagnetic metal film.

FIG. 3 is a perspective view showing a strip substrate bonding process.

FIG. 4 is a perspective view showing a magnetic core substrate block cutting step.

FIG. 5 is a perspective view showing a magnetic core half block obtained by cutting the magnetic core substrate block.

FIG. 6 is a perspective view showing a winding groove cutting step.

FIG. 7 is a perspective view showing a magnetic core half block joining step.

FIG. 8 is a perspective view showing a step of forming a groove for filling a hard-wearing non-magnetic material in the magnetic core half block.

FIG. 9 is a perspective view showing a step of filling a hard-wearing non-magnetic material.

FIG. 10 is a perspective view showing another example of the magnetic head manufactured by the manufacturing method of the present invention.

FIG. 11 is a perspective view showing still another example of the magnetic head manufactured by the manufacturing method of the present invention.

12 is a perspective view showing the method of manufacturing the magnetic head shown in FIG. 11 in order of steps, and is a perspective view showing a step of forming a groove for filling the magnetic core half block with the hard-wearing non-magnetic material.

FIG. 13 is a perspective view showing a step of filling a hard-wearing non-magnetic material.

FIG. 14 is a characteristic diagram showing the relationship between the tape running time of the magnetic head and the amount of wear of the sliding surface of the magnetic recording medium.

[Explanation of symbols]

 1 ... Easy-wearing material 2 ... Ferromagnetic metal film 7 ... Winding groove 11 ... Hard-wearing non-magnetic material 14 ... Magnetic core substrate 20 ... Magnetic recording medium sliding surface

Claims (1)

[Claims] 1. A step of stacking a plurality of strip-shaped substrates on each of which a ferromagnetic metal film is formed and bonding and integrating them, and the integrated substrate is placed in a direction substantially orthogonal to a surface on which the ferromagnetic metal film is formed. A step of cutting and cutting out a plurality of core blocks; a step of joining and unifying a pair of core blocks, at least one of which has been subjected to winding groove processing, via a gap material; and a magnetic recording medium of the joined and joined core blocks. A step in which at least a part of the substrate portion on the sliding surface side is grooved along the ferromagnetic metal film and filled with a hard-wearing non-magnetic material, and a core in which the hard-wearing non-magnetic material is filled in the groove. And a step of slicing a block into each head chip.