JPH0421806U - - Google Patents

Info

Publication number
JPH0421806U
JPH0421806U JP6200190U JP6200190U JPH0421806U JP H0421806 U JPH0421806 U JP H0421806U JP 6200190 U JP6200190 U JP 6200190U JP 6200190 U JP6200190 U JP 6200190U JP H0421806 U JPH0421806 U JP H0421806U
Authority
JP
Japan
Prior art keywords
axis
dimensional sensor
resolution
straight edge
resolution setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6200190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6200190U priority Critical patent/JPH0421806U/ja
Publication of JPH0421806U publication Critical patent/JPH0421806U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6200190U 1990-06-12 1990-06-12 Pending JPH0421806U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6200190U JPH0421806U (enrdf_load_stackoverflow) 1990-06-12 1990-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6200190U JPH0421806U (enrdf_load_stackoverflow) 1990-06-12 1990-06-12

Publications (1)

Publication Number Publication Date
JPH0421806U true JPH0421806U (enrdf_load_stackoverflow) 1992-02-24

Family

ID=31590756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6200190U Pending JPH0421806U (enrdf_load_stackoverflow) 1990-06-12 1990-06-12

Country Status (1)

Country Link
JP (1) JPH0421806U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法

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