JPH0419526A - Vacuum heat insulating container for infrared detector - Google Patents

Vacuum heat insulating container for infrared detector

Info

Publication number
JPH0419526A
JPH0419526A JP2121376A JP12137690A JPH0419526A JP H0419526 A JPH0419526 A JP H0419526A JP 2121376 A JP2121376 A JP 2121376A JP 12137690 A JP12137690 A JP 12137690A JP H0419526 A JPH0419526 A JP H0419526A
Authority
JP
Japan
Prior art keywords
cylindrical member
inner tank
tank
adhesive
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2121376A
Other languages
Japanese (ja)
Inventor
Koji Hirota
廣田 耕治
Shigeki Hamashima
濱嶋 茂樹
Hirokazu Fukuda
福田 広和
Yukihiro Yoshida
幸広 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2121376A priority Critical patent/JPH0419526A/en
Publication of JPH0419526A publication Critical patent/JPH0419526A/en
Pending legal-status Critical Current

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  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Thermal Insulation (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

PURPOSE:To obtain the container which has a small leak in a vacuum discharge part by providing double annular projections opposite the opening parts of an external and an internal tank and fitting the both to a cylindrical member by using an adhesive. CONSTITUTION:The double annular projections 12 which face the opening parts of the external tank 4 and internal tank 8 are formed respectively and the upper end and lower end of the cylindrical member 10 are fitted to the projections 12 by using the adhesive. In this case, the sectional shape of the adhesion part is curved in a U shape and the crack of the adhesive joint part becomes hard to extend. Consequently, the leak in the vacuum discharge part is reducible with the same joint area. Further, a crack caused by heat stress due to the repetition of the charging and discharging of a low-temperature cooling medium hardly extends from one surface to the other surface of the adhesion part and stable heat insulation characteristics can be maintained for a long period.

Description

【発明の詳細な説明】 概要 赤外線検知装置用真空断熱容器に関し、真空排気部のリ
ークが少ない上記容器の提供を目的とし、 赤外線透過窓が設けられた外槽の開口部及び上記透過窓
に対向して赤外線検知素子が設けられた内槽の開口部に
円筒状部材の上端部及び下端部をそれぞれ接着固定し、
上記外槽及び内槽間のスペースを真空に排気し、上記内
槽内に冷媒を充填するようにした赤外線検知装置用真空
断熱容器において、上記外槽及び内槽の開口部に互いに
向かい合う二重円環状突起をそれぞれ形成し、上記円筒
状部材を上記二重円環状突起に接着剤を介して嵌合させ
て構成する。
[Detailed Description of the Invention] Summary Regarding a vacuum insulated container for an infrared detection device, the purpose is to provide the above-mentioned container with less leakage from the vacuum evacuation part, and an opening of an outer tank provided with an infrared transmission window and facing the transmission window. and adhesively fixing the upper and lower ends of the cylindrical member to the opening of the inner tank in which the infrared detection element is provided, respectively.
In the vacuum insulation container for an infrared detection device, the space between the outer tank and the inner tank is evacuated to a vacuum, and the inner tank is filled with a refrigerant. Annular projections are respectively formed, and the cylindrical member is fitted to the double annular projections via an adhesive.

産業上の利用分野 本発明は赤外線検知装置用真空断熱容器に関する。Industrial applications The present invention relates to a vacuum insulation container for an infrared detection device.

二元又は三元化合物半導体よりなる赤外線検知素子(赤
外線検知用の光電変換器)は、通常、液体窒素温度(7
7K)程度まで冷却した状態で用いられる。このため、
赤外線検知装置としては、デニア構造の真空断熱容器を
用い、該容器の外槽の一部に赤外線透過窓を設けるとと
もにこの透過窓に対向した内槽壁上に赤外線検知素子を
設置し、このような構成の断熱容器の内槽内に液体窒素
のような冷媒を充填して、赤外線検知素子を所定温度に
冷却して動作させる構成が一般的である。この種の真空
断熱容器にあっては、断熱性を向上させるために、単一
素材から容器を構成するのではなく複数素材を接合して
容器が構成されているのが通例であるから、接合部を介
した真空排気部への大気側からの気体リークを防止する
ことが、良好な断熱性を長期にわたり安定に維持する上
で要求される。
Infrared sensing elements (photoelectric converters for infrared sensing) made of binary or ternary compound semiconductors are normally used at liquid nitrogen temperatures (7
It is used after being cooled to about 7K). For this reason,
As an infrared detection device, a vacuum insulated container with a denier structure is used, an infrared transmission window is provided in a part of the outer tank of the container, and an infrared detection element is installed on the inner tank wall opposite to this transmission window. A typical configuration is such that the inner tank of a heat-insulating container is filled with a refrigerant such as liquid nitrogen, and the infrared sensing element is cooled to a predetermined temperature and operated. For this type of vacuum insulated container, in order to improve the insulation properties, the container is usually constructed from multiple materials joined together, rather than from a single material. Preventing gas leakage from the atmosphere side to the evacuation section through the vacuum pump section is required in order to stably maintain good heat insulation properties over a long period of time.

従来の技術 従来、断面構成を第5図に示すように、赤外線透過窓2
が設けられた外槽4の開口部及び透過窓2に対向して赤
外線検知素子6が設けられた内槽8の開口部に円筒状部
材工0部材端部及び下端部をそれぞれ接着固定し、外槽
4及び内槽8間のスペースを真空に排気し、内槽8内に
冷媒を充填するようにした赤外線検知装置用真空断熱容
器が公知で°ある。
BACKGROUND OF THE INVENTION Conventionally, as shown in FIG. 5, an infrared transmitting window 2
Adhesively fix the ends and lower ends of the cylindrical member 0 member to the opening of the outer tank 4 provided with the transparent window 2 and the opening of the inner tank 8 provided with the infrared detection element 6 facing the transparent window 2, A vacuum insulation container for an infrared detection device is known in which the space between the outer tank 4 and the inner tank 8 is evacuated to a vacuum state, and the inner tank 8 is filled with a refrigerant.

発明が解決しようとする課題 従来構成において、内槽、円筒状部材及び外槽又はこれ
らの素材に要求されることは次のとおりである。
Problems to be Solved by the Invention In the conventional configuration, the requirements for the inner tank, the cylindrical member, the outer tank, or their materials are as follows.

内槽;充填された冷媒により赤外線検知素子が良好に冷
却されるために、熱伝導性が良好であること。
Inner tank: The infrared sensing element is well cooled by the refrigerant filled, so it must have good thermal conductivity.

円筒状部材;充填された冷媒に外部からの熱が伝わり易
いと冷媒の消費量が増大するので、熱伝導性が良好でな
いこと。
Cylindrical member: If heat from the outside is easily transferred to the filled refrigerant, the amount of refrigerant consumed will increase, so it must not have good thermal conductivity.

外槽;熱の輻射が小さいこと。Outer tank: Low heat radiation.

このように各部材に要求される特性は異なるので、−船
釣には、内槽の素材と円筒状部材の素材とは異なり、ま
た、円筒状部材の素材と外槽の素材とは異なる。素材が
異なると一般的にはその線熱膨張係数も異なるから、次
のような問題が生じる。即ち、この真空断熱容器には著
しい温度変化が与えられるので、上記線熱膨張係数の差
によって接合部に熱応力が作用し、容器の使用を繰り返
していくうちに接合部の接着剤にクラックが発生する。
Since the characteristics required of each member are different in this way, - For boat fishing, the material of the inner tank and the material of the cylindrical member are different, and the material of the cylindrical member is different from the material of the outer tank. Different materials generally have different coefficients of linear thermal expansion, which causes the following problems. In other words, since this vacuum insulated container is subjected to significant temperature changes, thermal stress acts on the joints due to the difference in linear thermal expansion coefficients, and as the container is repeatedly used, cracks may occur in the adhesive at the joints. Occur.

接合部の接着剤にクラックが発生すると、このクラック
を介して大気中から真空排気部側に空気がリークし、こ
の容器の断熱性が著しく劣化することになる。
When cracks occur in the adhesive at the joint, air leaks from the atmosphere to the vacuum evacuation section through the cracks, resulting in a significant deterioration of the heat insulation properties of the container.

本発明はこのような事情に鑑みて創作されたもので、真
空排気部のリークが少ない赤外線検知装置用真空断熱容
器の提供を目的としている。
The present invention was created in view of the above circumstances, and an object of the present invention is to provide a vacuum insulation container for an infrared detection device with less leakage from the vacuum evacuation section.

課題を解決するための手段 第1図は本発明の基本構成を示す赤外線検知装置用真空
断熱容器の断面図である。
Means for Solving the Problems FIG. 1 is a sectional view of a vacuum insulation container for an infrared detection device showing the basic configuration of the present invention.

この真空断熱容器は、赤外線透過窓2が設けられた外槽
4の開口部及び上記透過窓2に対向して赤外線検知素子
6が設けられた内槽8の開口部に円筒状部材10の上端
部及び下端部をそれぞれ接着固定し、上記外槽4及び内
槽8間のスペースを真空に排気し、上記内槽8内に冷媒
を充填するようにした赤外線検知装置用真空断熱容器に
おいて、上記外槽4及び内槽8の開口部に互いに向かい
合う二重円環状突起12をそれぞれ形成し、上記円筒状
部材10を上記二重円環状突起12に接着剤14を介し
て嵌合させたものである。
This vacuum insulated container has an upper end of a cylindrical member 10 at an opening of an outer tank 4 provided with an infrared transmission window 2 and an opening of an inner tank 8 provided with an infrared detection element 6 facing the transmission window 2. In the vacuum insulated container for an infrared detection device, the outer tank 4 and the inner tank 8 are evacuated, and the inner tank 8 is filled with a refrigerant. Double annular projections 12 facing each other are formed at the openings of the outer tank 4 and the inner tank 8, respectively, and the cylindrical member 10 is fitted onto the double annular projections 12 via an adhesive 14. be.

作   用 一般に、接合部の接着剤に生じるクラックによるリーク
は、初期状態に形成された小クラックが大気側から真空
排気側に或いは真空排気側から大気側に拡大することに
より発生する。本発明の構成によると、外槽及び内槽の
開口部に互いに向かい合う二重円環状突起をそれぞれ形
成し、円筒状部材の上端部及び下端部を二重円環状突起
に接着剤を介して嵌合させているので、断面において従
来直線状であった接着剤接合部の形状が本発明では概略
コの字型状に湾曲するので、接着剤接合部のクラックが
拡大しにくくなる。その結果、接合面積が同等であれば
、真空排気部のリークが少なくなる。
Function Generally, leakage due to cracks occurring in the adhesive at the joint occurs when small cracks formed in the initial state expand from the atmosphere side to the evacuation side or from the evacuation side to the atmosphere side. According to the configuration of the present invention, double annular protrusions facing each other are formed at the openings of the outer tank and the inner tank, and the upper and lower ends of the cylindrical member are fitted to the double annular protrusions via an adhesive. Since the shape of the adhesive bonded portion, which was conventionally straight in cross section, is curved in a roughly U-shape in the present invention, cracks in the adhesive bonded portion are less likely to expand. As a result, if the bonding area is the same, leakage from the evacuation section will be reduced.

実  施  例 以下本発明の詳細な説明する。Example The present invention will be explained in detail below.

第2図は本発明の実施例を示す赤外線検知装置用真空断
熱容器の断面図である。外槽4は、製造の便宜上、円筒
状部材10を介して内槽8が固定される第1部分4aと
、内槽8を取り囲むように第1部分4aに固定された第
2部分4bとからなる。第1部分4aと第2部分4bは
溶接等により相互に気密封止固定されている。第2部分
4bの下端にはねじ穴が形成されたフランジ14が設け
られており、フランジ14を介してこの真空断熱容器を
フレーム等に固定することができるようになっている。
FIG. 2 is a sectional view of a vacuum insulation container for an infrared detection device showing an embodiment of the present invention. For convenience of manufacturing, the outer tank 4 includes a first part 4a to which the inner tank 8 is fixed via a cylindrical member 10, and a second part 4b fixed to the first part 4a so as to surround the inner tank 8. Become. The first portion 4a and the second portion 4b are hermetically sealed and fixed to each other by welding or the like. A flange 14 in which a screw hole is formed is provided at the lower end of the second portion 4b, so that the vacuum insulation container can be fixed to a frame or the like via the flange 14.

この例ではAlからなる外槽4の内周面は鏡面に形成さ
れており、熱の輻射が最小限に抑えられている。16は
外槽の第2部分4bの側壁に設けられた真空排気用のバ
ルブであり、18は同じく側壁に設けられた外部接続用
の端子である。外槽の第2部分4bに形成された開口部
に気密封止固定された赤外線透過窓2は、受光すべき赤
外線を有効に透過するGe(ゲルマニウム)から形成さ
れている。赤外線透過窓2に対向して内槽8に固定され
た赤外線検知素子6は、赤外線透過窓2を透過してきた
赤外線の強度に応じた信号を出力する。この信号はリー
ド線20を介して端子18に伝えられ、端子18から外
部回路に取り出される。この実施例では、内槽8もA1
からなり、内槽8内に充填された液体窒素等の冷媒によ
り赤外線検知素子6が良好に冷却されるようになってい
る。内槽8の外面を鏡面研磨し或いはラジエーション・
シールド膜(熱遮蔽膜)で覆っても良い。円筒状部材1
0は熱伝導性が良好でない例えばガラスエポキシ樹脂か
ら形成されており、これにより外部からの熱が内槽8及
び内槽8内に充填された冷媒に伝わりにくくなっている
In this example, the inner peripheral surface of the outer tank 4 made of Al is formed into a mirror surface, so that heat radiation is suppressed to a minimum. 16 is a vacuum exhaust valve provided on the side wall of the second portion 4b of the outer tank, and 18 is a terminal for external connection also provided on the side wall. The infrared transmitting window 2, which is hermetically sealed and fixed to the opening formed in the second portion 4b of the outer tank, is made of Ge (germanium) which effectively transmits the infrared rays to be received. An infrared detecting element 6 fixed to the inner tank 8 facing the infrared transmitting window 2 outputs a signal corresponding to the intensity of the infrared rays that has passed through the infrared transmitting window 2. This signal is transmitted to the terminal 18 via the lead wire 20 and taken out from the terminal 18 to an external circuit. In this embodiment, the inner tank 8 is also A1
The infrared sensing element 6 is well cooled by a refrigerant such as liquid nitrogen filled in the inner tank 8. The outer surface of the inner tank 8 is mirror-polished or radiation-treated.
It may be covered with a shield film (heat shield film). Cylindrical member 1
0 is made of, for example, glass epoxy resin which does not have good thermal conductivity, which makes it difficult for heat from the outside to be transmitted to the inner tank 8 and the refrigerant filled in the inner tank 8.

外槽4及び内槽8の素材であるAlの線熱膨張係数は2
2 x 10−’/にであり、円筒状部材10の素材で
あるガラスエポキシ樹脂の線熱膨張係数は15 X 1
0−’/にである。このように線熱膨張係数が異なる素
材を組み合わせてなる真空断熱容器において、低温の冷
媒を充填した状態と充填しない状態とを繰り返すと、接
着接合部に熱ストレスが生じる。この実施例では、円筒
状部材10を二重円環状突起12に接着剤を介して嵌合
させているので、この熱ストレスが生じたとしても、大
気側から真空排気側に或いは真空排気側から大気側にク
ラックが到達しにくい。従って、長期間にわたって安定
な断熱特性を維持することができる。
The linear thermal expansion coefficient of Al, which is the material of the outer tank 4 and the inner tank 8, is 2.
2 x 10-'/, and the linear thermal expansion coefficient of the glass epoxy resin that is the material of the cylindrical member 10 is 15 x 1.
It is 0-'/. In a vacuum insulated container made of a combination of materials having different coefficients of linear thermal expansion, if the container is repeatedly filled with a low-temperature refrigerant and not filled, thermal stress occurs in the adhesive joint. In this embodiment, the cylindrical member 10 is fitted to the double annular protrusion 12 via an adhesive, so even if this thermal stress occurs, there is no leakage from the atmosphere side to the evacuation side or from the evacuation side. It is difficult for cracks to reach the atmosphere side. Therefore, stable heat insulation properties can be maintained over a long period of time.

二重円環状突起12は、大気側に位置する円環状突起1
2aと真空排気側に位置する円環状突起12bとからな
り、これらの厚みは円筒状部材10の厚みとほぼ同等で
ある。この実施例では、特に熱ストレスが生じゃすい内
槽8側の二重円環状突起120円筒状部材10側にテー
パ面22を形成しているので、固定に供される接着剤を
円筒状部材10に沿って盛り上がらせることができ、固
化した接着剤にクラックが生じにくい。
The double annular projection 12 is the annular projection 1 located on the atmosphere side.
2a and an annular projection 12b located on the evacuation side, the thickness of which is approximately the same as the thickness of the cylindrical member 10. In this embodiment, the tapered surface 22 is formed on the double annular protrusion 120 on the side of the inner tank 8 where heat stress is likely to occur, and on the side of the cylindrical member 10, so that the adhesive used for fixing is applied to the cylindrical member. 10, and cracks are less likely to occur in the solidified adhesive.

第3図は本発明の他の実施例を示す赤外線検知装置用真
空断熱容器の断面図である。この実施例が前実施例と異
なる点は、二重円環状突起12の円筒状部材10側にテ
ーパ面24を形成し、これに加えて、円筒状部材10の
上端部102及び下端部10bを二重円環状突起のテー
バ面24に沿って先細りさせている点にある。このよう
な構成によると、円筒状部材10の下端部10b近傍の
断面図を第4図に示すように、円筒状部材10の上端及
び下端を二重円環状突起12の溝内の定位置に位置させ
ることができるので、接合に供される接着剤の厚みを大
気側と真空排気側とで均等にすることができ、接合部全
周にわたって安定な接合力を得ることができるようにな
る。一般に接合部のリークは接合力が弱い部分で生じる
ので、この実施例はリークしにくいという品質を安定化
する上で有効である。
FIG. 3 is a sectional view of a vacuum insulation container for an infrared detection device showing another embodiment of the present invention. This embodiment differs from the previous embodiment in that a tapered surface 24 is formed on the cylindrical member 10 side of the double annular projection 12, and in addition, the upper end 102 and lower end 10b of the cylindrical member 10 are The point is that the double annular projection is tapered along the tapered surface 24. According to such a configuration, as shown in FIG. 4, which is a cross-sectional view of the vicinity of the lower end portion 10b of the cylindrical member 10, the upper and lower ends of the cylindrical member 10 are placed in fixed positions within the groove of the double annular projection 12. Since the thickness of the adhesive used for bonding can be made equal between the atmosphere side and the vacuum exhaust side, stable bonding force can be obtained over the entire circumference of the bonded portion. Generally, leaks at joints occur in areas where the joint strength is weak, so this embodiment is effective in stabilizing the quality of being resistant to leaks.

発明の詳細 な説明したように、本発明によれば、真空排気部のリー
クが少ない赤外線検知装置用真空断熱容器の提供が可能
になるという効果を奏する。
DETAILED DESCRIPTION OF THE INVENTION As described in detail, the present invention has the effect that it is possible to provide a vacuum insulation container for an infrared detection device with less leakage from the vacuum evacuation section.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の原理説明図、 第2図は本発明の実施例を示す赤外線検知装置用真空断
熱容器の断面図、 第3図は本発明の他の実施例を示す同容器の断面図、 第4図は第3図に示された容器の部分詳細断面図、 第5図は従来技術の説明図である。 2・・・赤外線透過窓、 4・・・外槽、 6・・・赤外線検知素子、 8・・・内槽、 10・・・円筒状部材、 12・・・二重円環状突起。
Fig. 1 is a diagram explaining the principle of the present invention, Fig. 2 is a sectional view of a vacuum insulation container for an infrared detection device showing an embodiment of the invention, and Fig. 3 is a sectional view of the same container showing another embodiment of the invention. 4 is a partially detailed sectional view of the container shown in FIG. 3, and FIG. 5 is an explanatory diagram of the prior art. 2... Infrared transmission window, 4... Outer tank, 6... Infrared detection element, 8... Inner tank, 10... Cylindrical member, 12... Double annular projection.

Claims (1)

【特許請求の範囲】 1、赤外線透過窓(2)が設けられた外槽(4)の開口
部及び上記透過窓(2)に対向して赤外線検知素子(6
)が設けられた内槽(8)の開口部に円筒状部材(10
)の上端部及び下端部をそれぞれ接着固定し、上記外槽
(4)及び内槽(8)間のスペースを真空に排気し、上
記内槽(8)内に冷媒を充填するようにした赤外線検知
装置用真空断熱容器において、上記外槽(4)及び内槽
(8)の開口部に互いに向かい合う二重円環状突起(1
2)をそれぞれ形成し、上記円筒状部材(10)を上記
二重円環状突起(12)に接着剤(14)を介して嵌合
させたことを特徴とする赤外線検知装置用真空断熱容器
。 2、上記二重円環状突起(12)における円環状突起の
上記円筒状部材(10)側にテーパ面(22)が形成さ
れていることを特徴とする請求項1に記載の赤外線検知
装置用真空断熱容器。 3、上記二重円環状突起(12)における円環状突起の
上記円筒状部材(10)側にはテーパ面(24)が形成
されており、上記円筒状部材(10)の上端部(10a
)及び下端部(10b)は上記テーパ面(24)に沿っ
て先細りしていることを特徴とする請求項1に記載の赤
外線検知装置用真空断熱容器。 4、上記外槽(4)及び内槽(8)はAlからなり、上
記円筒状部材(10)はガラスエポキシ樹脂からなり、
上記赤外線透過窓(2)はGeからなり、上記外槽(4
)の上記内槽(8)側は鏡面に形成されていることを特
徴とする請求項1乃至3のいずれかに記載の赤外線検知
装置用真空断熱容器。
[Claims] 1. An opening of an outer tank (4) provided with an infrared transmitting window (2) and an infrared detecting element (6) facing the transmitting window (2).
) at the opening of the inner tank (8) provided with a cylindrical member (10
), the upper and lower ends of which are adhesively fixed, the space between the outer tank (4) and the inner tank (8) is evacuated, and the inner tank (8) is filled with a refrigerant. In the vacuum insulated container for the detection device, double annular projections (1) facing each other are provided at the openings of the outer tank (4) and the inner tank (8).
2), and the cylindrical member (10) is fitted to the double annular projection (12) via an adhesive (14). 2. The infrared detection device according to claim 1, wherein a tapered surface (22) is formed on the cylindrical member (10) side of the double annular projection (12). Vacuum insulated container. 3. A tapered surface (24) is formed on the cylindrical member (10) side of the annular protrusion in the double annular protrusion (12), and the upper end (10a) of the cylindrical member (10)
) and the lower end (10b) are tapered along the tapered surface (24), the vacuum insulation container for an infrared detection device according to claim 1. 4. The outer tank (4) and the inner tank (8) are made of Al, and the cylindrical member (10) is made of glass epoxy resin,
The infrared transmitting window (2) is made of Ge, and the outer tank (4) is made of Ge.
4. The vacuum insulation container for an infrared detection device according to claim 1, wherein the inner tank (8) side of the inner tank (8) is formed to have a mirror surface.
JP2121376A 1990-05-14 1990-05-14 Vacuum heat insulating container for infrared detector Pending JPH0419526A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2121376A JPH0419526A (en) 1990-05-14 1990-05-14 Vacuum heat insulating container for infrared detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2121376A JPH0419526A (en) 1990-05-14 1990-05-14 Vacuum heat insulating container for infrared detector

Publications (1)

Publication Number Publication Date
JPH0419526A true JPH0419526A (en) 1992-01-23

Family

ID=14809699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2121376A Pending JPH0419526A (en) 1990-05-14 1990-05-14 Vacuum heat insulating container for infrared detector

Country Status (1)

Country Link
JP (1) JPH0419526A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015083855A (en) * 2013-10-25 2015-04-30 古河電気工業株式会社 Superconductive magnetic bearing and cooling device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015083855A (en) * 2013-10-25 2015-04-30 古河電気工業株式会社 Superconductive magnetic bearing and cooling device

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