JPH0417311Y2 - - Google Patents
Info
- Publication number
- JPH0417311Y2 JPH0417311Y2 JP1985079697U JP7969785U JPH0417311Y2 JP H0417311 Y2 JPH0417311 Y2 JP H0417311Y2 JP 1985079697 U JP1985079697 U JP 1985079697U JP 7969785 U JP7969785 U JP 7969785U JP H0417311 Y2 JPH0417311 Y2 JP H0417311Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction table
- outer periphery
- conduction
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079697U JPH0417311Y2 (th) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079697U JPH0417311Y2 (th) | 1985-05-28 | 1985-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61195939U JPS61195939U (th) | 1986-12-06 |
| JPH0417311Y2 true JPH0417311Y2 (th) | 1992-04-17 |
Family
ID=30624847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985079697U Expired JPH0417311Y2 (th) | 1985-05-28 | 1985-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417311Y2 (th) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3493081B2 (ja) * | 1995-08-09 | 2004-02-03 | 株式会社日本マイクロニクス | 表示パネルの吸着テーブル |
| JP2015109416A (ja) * | 2013-10-21 | 2015-06-11 | 東芝機械株式会社 | チャック装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856744A (ja) * | 1981-09-29 | 1983-04-04 | Matsushita Electric Ind Co Ltd | チヤツク |
-
1985
- 1985-05-28 JP JP1985079697U patent/JPH0417311Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856744A (ja) * | 1981-09-29 | 1983-04-04 | Matsushita Electric Ind Co Ltd | チヤツク |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61195939U (th) | 1986-12-06 |
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