JPH0417310A - Magnetic multilayer film - Google Patents
Magnetic multilayer filmInfo
- Publication number
- JPH0417310A JPH0417310A JP11978090A JP11978090A JPH0417310A JP H0417310 A JPH0417310 A JP H0417310A JP 11978090 A JP11978090 A JP 11978090A JP 11978090 A JP11978090 A JP 11978090A JP H0417310 A JPH0417310 A JP H0417310A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- alloy
- multilayer film
- layers
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 63
- 239000000956 alloy Substances 0.000 claims abstract description 22
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 230000000737 periodic effect Effects 0.000 claims description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 13
- 229910000640 Fe alloy Inorganic materials 0.000 abstract description 9
- 238000001704 evaporation Methods 0.000 abstract description 6
- 230000008020 evaporation Effects 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 3
- 229910052742 iron Inorganic materials 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 2
- 125000004122 cyclic group Chemical group 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 31
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 17
- 239000000463 material Substances 0.000 description 9
- 239000000654 additive Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、磁気記録用磁気ヘッドの磁極等に適する磁性
多層膜に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic multilayer film suitable for the magnetic pole of a magnetic head for magnetic recording.
［従来の技術およびその課題］
近年、コンピュータ用リジッド磁気ディスク装置を始め
として、フレキシブル磁気ディスク装置、磁気テープ装
置等の磁気記録装置の高密度化が進められている。磁気
記録の高密度化のためには、記録媒体の保磁力（ＨＣ）
を大きくすることが不可欠である。一方、信号の記録を
行う磁気ヘッドには、このような高保磁力媒体を十分に
磁化するため、高飽和磁束密度（ＢＳ＞を有する材料が
必要とされる。また、信号の再生時に記録媒体からの信
号磁界を効率良く集束するために、磁気ヘッド材料は良
好な軟磁特性を併せ持つ必要がある。[Background Art and its Problems] In recent years, the density of magnetic recording devices such as rigid magnetic disk devices for computers, flexible magnetic disk devices, and magnetic tape devices has been increased. In order to increase the density of magnetic recording, the coercive force (HC) of the recording medium is
It is essential to increase the On the other hand, a magnetic head that records signals requires a material with a high saturation magnetic flux density (BS>) in order to sufficiently magnetize such a high coercive force medium. In order to efficiently focus the signal magnetic field, the magnetic head material must also have good soft magnetic properties.
このような磁気ヘッド材料として、従来酸化鉄フェライ
ト（ＢＳ〜３ ｋＧａｕｓｓ ）が広く用いられてきた
。ざらに、高Ｂｓの軟磁性材料として、ＮＦＣ合金（１
３ｓ 〜９ ｋＧａｕｓｓ ） 、ＦｅＳ ｉ Ａ１合
金（ＢＳ〜１１ ｋＧａｕｓｓ ）等の合金系軟磁性薄
膜が現在用いられているが、１００００ｅ以上の高保磁
力媒体に書き込むことは困難である。Conventionally, iron oxide ferrite (BS~3 kGauss) has been widely used as such a magnetic head material. In general, NFC alloy (1
Although alloy-based soft magnetic thin films such as 3s to 9 kGauss) and FeS i A1 alloy (BS to 11 kGauss) are currently used, it is difficult to write on high coercive force media of 10,000e or more.
これら合金系以外の新しい高ＢＳ軟磁性材料として、高
Ｂｓを有するＦｅを非磁性の中間層材料と交互に積層し
て多層膜とすることによって軟磁気特性を得る、Ｆｅ／
Ｃ多層膜、Ｆｅ／５ｉ０２多層膜等のＦｅ系多層膜が注
目され、広く研究されている（例えば、千田正勝他著：
電子情報通信学会技術報告、８８巻（１９８８年）１７
ページ、小林他著：ジャーナル・オブ・アプライド・フ
ィジックス、６３巻（１９８８年＞ ３２０３ページ
）。しかし、これらの多層膜では中間層の非磁性体によ
ってＢＳが低下するという欠点がある。As a new high-BS soft magnetic material other than these alloys, Fe/
Fe-based multilayer films such as C multilayer films and Fe/5i02 multilayer films have been attracting attention and being widely studied (for example, by Masakatsu Senda et al.
IEICE Technical Report, Volume 88 (1988) 17
Page, Kobayashi et al.: Journal of Applied Physics, Volume 63 (1988 > 3203 pages). However, these multilayer films have the disadvantage that the BS is lowered by the nonmagnetic material in the intermediate layer.
そこで、中間層として強磁性体を用いたＦｅ／Ｎｉ多層
膜、Ｆｅ／ＦｅＣ０多層膜、Ｆｅ／ＮＦＣ多層膜（例え
ば、特開昭６４−３９０１２号公報、アイ・イー・イー
・イー・トランザクションズ・オン・マグネティクス、
２３巻（１９８７年） ２７４６ベージ）等が検討さ
れている。中でもＦ ｅ／ＮＦｅ多層膜は、中間層とし
て軟磁気特性に優れたＮｉＦｅ合金を用いているため、
磁気ヘッド用高ＢＳ軟磁性材料として特に優れた特性が
期待される。しかし、このような多層膜材料は、加熱す
ると層間の拡散によって積層構造が崩れてしまうため、
合金材料に比べて耐熱性が劣るといった問題点があった
。Therefore, Fe/Ni multilayer film, Fe/FeC0 multilayer film, Fe/NFC multilayer film using ferromagnetic material as an intermediate layer (for example, Japanese Patent Laid-Open No. 64-39012, IE Transactions)・On Magnetics,
23 volumes (1987) 2746 pages) are being considered. Among them, the Fe/NFe multilayer film uses a NiFe alloy with excellent soft magnetic properties as the intermediate layer, so
It is expected to have particularly excellent properties as a high BS soft magnetic material for magnetic heads. However, when such multilayer film materials are heated, the laminated structure collapses due to diffusion between the layers.
There was a problem that heat resistance was inferior compared to alloy materials.
本発明の目的は、高ＢＳで良好な軟磁気特性を有し、し
かも耐熱性に優れた磁性多層膜を提供することにある。An object of the present invention is to provide a magnetic multilayer film having high BS, good soft magnetic properties, and excellent heat resistance.
［課題を解決するための手段］
本発明は、基板上に、Ｆｅを主成分とする合金からなる
第１の磁性層と、Ｎ ｉ Ｆｅ合金またはＮ ｉ Ｆｅ
合金を主成分とする合金からなる第２の磁性層とを交互
に積層した周期構造を有する磁性多層膜であって、第１
の磁性層中に、Ｂ、Ｃ。[Means for Solving the Problems] The present invention provides a first magnetic layer made of an alloy containing Fe as a main component, and a N i Fe alloy or a N i Fe alloy on a substrate.
A magnetic multilayer film having a periodic structure in which a first magnetic layer is alternately laminated with a second magnetic layer made of an alloy containing an alloy as a main component.
B, C in the magnetic layer.
八β、ＳｉあるいはＣｒのうち少なくとも１種類の元素
を含有することを特徴とする磁性多層膜である。The magnetic multilayer film is characterized by containing at least one element selected from the group consisting of 8β, Si, and Cr.
以下、図面を参照して本発明をざらに詳細に説明する。Hereinafter, the present invention will be roughly described in detail with reference to the drawings.
第１図は本発明の磁性多層膜の一例を示す部分断面図で
ある。本発明の磁性多層膜は、基板１上に、Ｆｅを主成
分とする第１の磁性層２とＮ ｉ ＦｅまたはＮｉＦｅ
を主成分とする第２の磁性層３とが交互に積層された繰
り返しによる周期構造を有する。第１図では基板上にま
ずＦｅ合金層が形成され、次にＮ ｉ Ｆｅ層が形成さ
れ、最後の層もＮ ｉ Ｆｅ層で終わるように記しであ
るが、本発明の磁性多層膜はこれらの層の積層順序には
よらない。FIG. 1 is a partial cross-sectional view showing an example of the magnetic multilayer film of the present invention. The magnetic multilayer film of the present invention has a first magnetic layer 2 containing Fe as a main component on a substrate 1, and a first magnetic layer 2 containing Fe as a main component and NiFe or NiFe.
It has a periodic structure in which second magnetic layers 3 mainly composed of are repeatedly stacked alternately. In FIG. 1, the Fe alloy layer is first formed on the substrate, then the Ni Fe layer is formed, and the last layer ends with the Ni Fe layer, but the magnetic multilayer film of the invention It does not depend on the stacking order of the layers.
本発明に係わる基板１の材料には、ガラス。The material of the substrate 1 according to the present invention is glass.
Ｓｉ、Ａｌ２２０３．ＴｉＣ，ＳｉＣ，Ａｌ２Ｏ３とＴ
ｉＣとの焼結体、フェライト等を用いることができ、ま
た第１の磁性層２には、ＦｅまたはＦｅ−Ｃｏ、Ｆｅ−
Ｎ ｉ等の強磁性合金、あるいはこれらに添加物を加え
たものに、Ｂ、Ｃ，Ａ１ 。Si, Al2203. TiC, SiC, Al2O3 and T
A sintered body with iC, ferrite, etc. can be used, and for the first magnetic layer 2, Fe, Fe-Co, Fe-
Ferromagnetic alloys such as Ni or additives added to these, B, C, A1.
３ｉあるいはＣｒのうち少なくとも１種類の元素を添加
したものが用いられる。また、本発明に係わる第２の磁
性層３の材料としては、ＮｉＦｅ合金、あるいはこれに
添加物を加えたものが用いられる。A material to which at least one element of 3i or Cr is added is used. Further, as the material for the second magnetic layer 3 according to the present invention, a NiFe alloy or a NiFe alloy with additives added thereto is used.
本発明による磁性多層膜は、例えば、上記の第１の強磁
性材料と第２の強磁性材料とを２基の蒸発源を持つ真空
蒸着装置、もしくは２基のターゲットを持つスパッタリ
ング装置で蒸発させ、２基の蒸発源のシャッタを交互に
開閉したり、あるいは基板を２基の蒸発源上を交互に通
過させることによって製造することができる。The magnetic multilayer film according to the present invention can be produced by, for example, evaporating the first ferromagnetic material and the second ferromagnetic material using a vacuum evaporation device having two evaporation sources or a sputtering device having two targets. , by alternately opening and closing the shutters of the two evaporation sources, or by alternately passing the substrate over the two evaporation sources.
［作用］
本発明の磁性多層膜は、Ｆｅを主成分とする合金からな
る第１の磁性層中にＢ、Ｃ，ＡＩ、、５１あるいはＣｒ
のうち、少なくとも１種類の元素を含有しており、これ
によって耐熱性が大幅に改善される。[Function] The magnetic multilayer film of the present invention has B, C, AI, .
Among these, it contains at least one type of element, which significantly improves heat resistance.
このように、Ｂ、Ｃ，ＡＩ Ｓ＋あるいはＣｒ等の添加
によって耐熱性が改善される原因は明らかではないが、
これらの添加元素がＦｅの結晶粒の粒界に偏析し、Ｆｅ
、ＮｉＦｅ層間の拡散を妨げるために耐熱性が改善され
るものと考えられる。Although it is not clear why the heat resistance is improved by the addition of B, C, AI S+ or Cr, etc.,
These additive elements segregate at the grain boundaries of Fe crystal grains, and Fe
, it is thought that the heat resistance is improved because diffusion between the NiFe layers is prevented.
［実施例］ 以下、本発明の実施例について説明する。[Example] Examples of the present invention will be described below.
２基の蒸発源を用いた電子ビーム真空蒸着法により、基
板上にＦｅ合金層とＮ ｉ Ｆｅ合金（Ｎ８２％、Ｆｅ
ｌＢ％）層とを交互に連続的に＠居したＦｅ／Ｎ ｉ
Ｆｅ多層膜を作成した。この時、Ｆｅ合金層は第１表に
示す種々の組成のものを用いた。基板にはガラス基板を
用い、基板温度は１００℃とした。成膜速度はｏ、ｉｎ
ｍ／秒とし、各蒸発源のシャッタの開閉時間を変えて各
層の膜厚を制御した。蒸着中の真空度は５Ｘ１０−８
Ｔｏｒｒであった。また、成膜中に基板面内に５０００
ｅの直流磁界を印加して、膜中に一軸性の磁気異方性を
誘起した。膜全体の厚さは、全て２００ ｎｍと一定に
した。An Fe alloy layer and a NiFe alloy (N82%, Fe
1B%) layer continuously and alternately
A Fe multilayer film was created. At this time, Fe alloy layers having various compositions shown in Table 1 were used. A glass substrate was used as the substrate, and the substrate temperature was 100°C. The film formation rate is o, in
m/sec, and the film thickness of each layer was controlled by changing the opening/closing time of the shutter of each evaporation source. Vacuum degree during vapor deposition is 5X10-8
It was Torr. Also, during film formation, 5000
A DC magnetic field of e was applied to induce uniaxial magnetic anisotropy in the film. The thickness of the entire film was kept constant at 200 nm.
これらの試料の飽和磁束密度（ＢＳ）を振動試料型磁力
計で測定した。また、軟磁気特性を代表する量として困
難軸方向の比透磁率（μ）を１０ＭＨｚの周波数で測定
した。さらに、これらの膜を種々の温度で１時間熱処理
し、比透磁率の値が初期値の７０％に低下する温度を耐
熱温度として求めた。The saturation magnetic flux density (BS) of these samples was measured using a vibrating sample magnetometer. Further, the relative magnetic permeability (μ) in the hard axis direction was measured at a frequency of 10 MHz as a quantity representative of soft magnetic properties. Furthermore, these films were heat-treated at various temperatures for 1 hour, and the temperature at which the relative magnetic permeability value decreased to 70% of the initial value was determined as the heat-resistant temperature.
以上の測定結果を第１表ｋまとめた。表中、多層膜の膜
構成Ｆｅ （Ｘ＞／Ｎ ｉ Ｆｅ （Ｙ）と記したのは
、Ｆｅ合金層Ｘ ｎｍとＮｉＦｅ合金層Ｙ ｎｍの積層
構造であることを示している。The above measurement results are summarized in Table 1k. In the table, the film structure of the multilayer film Fe (X>/N i Fe (Y)) indicates a stacked structure of an Fe alloy layer of X nm and a NiFe alloy layer of Y nm.
第１表の結果から明らかなように、本発明の添加元素を
含んだＦｅ合金層を用いた多層膜試料（２〜６）は、添
加元素を含まない多層膜試料（１）に比へて、同等以上
の優れた磁気特性を有し、しかも耐熱温度が１００℃以
上高くなっている。As is clear from the results in Table 1, the multilayer film samples (2 to 6) using the Fe alloy layer containing the additive element of the present invention are superior to the multilayer film sample (1) that does not contain the additive element. , has superior magnetic properties equivalent to or better than that, and has a heat resistance temperature that is 100°C or more higher.
（以下余白）
［発明の効果］
以上説明したように、本発明による磁性多層膜は高い飽
和磁束密度と良好な軟磁気特性を有し、しかも高い耐熱
性を有するもので、磁気ヘッド用材料として特に優れた
特性を備えたものでおる。(The following is a blank space) [Effects of the Invention] As explained above, the magnetic multilayer film according to the present invention has a high saturation magnetic flux density, good soft magnetic properties, and high heat resistance, and is suitable as a material for magnetic heads. It has particularly excellent properties.
第１図は本発明の磁性多層膜の一例の部分断面図である
。
１・・・基板
２・・・第１の磁性層
３・・・第２の磁性層FIG. 1 is a partial cross-sectional view of an example of the magnetic multilayer film of the present invention. 1... Substrate 2... First magnetic layer 3... Second magnetic layer
Claims (1)
の磁性層と、ＮｉＦｅ合金またはＮｉＦｅ合金を主成分
とする合金からなる第２の磁性層とを交互に積層した周
期構造を有する磁性多層膜であって、第１の磁性層中に
、Ｂ，Ｃ，Ａｌ，ＳｉあるいはＣｒのうち少なくとも１
種類の元素を含有することを特徴とする磁性多層膜。(1) A first layer made of an alloy mainly composed of Fe is placed on the substrate.
A magnetic multilayer film having a periodic structure in which a magnetic layer of B, At least one of C, Al, Si or Cr
A magnetic multilayer film characterized by containing different types of elements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11978090A JPH0417310A (en) | 1990-05-11 | 1990-05-11 | Magnetic multilayer film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11978090A JPH0417310A (en) | 1990-05-11 | 1990-05-11 | Magnetic multilayer film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0417310A true JPH0417310A (en) | 1992-01-22 |
Family
ID=14770043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11978090A Pending JPH0417310A (en) | 1990-05-11 | 1990-05-11 | Magnetic multilayer film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417310A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63236304A (en) * | 1987-03-25 | 1988-10-03 | Hitachi Ltd | Corrosion-resistant ferromagnetic film |
| JPS6481208A (en) * | 1987-09-24 | 1989-03-27 | Hitachi Ltd | Soft magnetic film and its manufacture |
| JPH01119005A (en) * | 1987-10-31 | 1989-05-11 | Nec Home Electron Ltd | Magnetic film and manufacture thereof |
-
1990
- 1990-05-11 JP JP11978090A patent/JPH0417310A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63236304A (en) * | 1987-03-25 | 1988-10-03 | Hitachi Ltd | Corrosion-resistant ferromagnetic film |
| JPS6481208A (en) * | 1987-09-24 | 1989-03-27 | Hitachi Ltd | Soft magnetic film and its manufacture |
| JPH01119005A (en) * | 1987-10-31 | 1989-05-11 | Nec Home Electron Ltd | Magnetic film and manufacture thereof |
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