JPH0416646B2 - - Google Patents

Info

Publication number
JPH0416646B2
JPH0416646B2 JP61308838A JP30883886A JPH0416646B2 JP H0416646 B2 JPH0416646 B2 JP H0416646B2 JP 61308838 A JP61308838 A JP 61308838A JP 30883886 A JP30883886 A JP 30883886A JP H0416646 B2 JPH0416646 B2 JP H0416646B2
Authority
JP
Japan
Prior art keywords
chamber
nozzle
back pressure
air
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61308838A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63163001A (ja
Inventor
Tatsuhide Shiga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP61308838A priority Critical patent/JPS63163001A/ja
Publication of JPS63163001A publication Critical patent/JPS63163001A/ja
Publication of JPH0416646B2 publication Critical patent/JPH0416646B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP61308838A 1986-12-26 1986-12-26 空気増幅装置 Granted JPS63163001A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61308838A JPS63163001A (ja) 1986-12-26 1986-12-26 空気増幅装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61308838A JPS63163001A (ja) 1986-12-26 1986-12-26 空気増幅装置

Publications (2)

Publication Number Publication Date
JPS63163001A JPS63163001A (ja) 1988-07-06
JPH0416646B2 true JPH0416646B2 (enExample) 1992-03-24

Family

ID=17985891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61308838A Granted JPS63163001A (ja) 1986-12-26 1986-12-26 空気増幅装置

Country Status (1)

Country Link
JP (1) JPS63163001A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3015995B2 (ja) * 1994-06-24 2000-03-06 株式会社山武 デジタル電空ポジショナ

Also Published As

Publication number Publication date
JPS63163001A (ja) 1988-07-06

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