JPH0416430Y2 - - Google Patents
Info
- Publication number
- JPH0416430Y2 JPH0416430Y2 JP7060886U JP7060886U JPH0416430Y2 JP H0416430 Y2 JPH0416430 Y2 JP H0416430Y2 JP 7060886 U JP7060886 U JP 7060886U JP 7060886 U JP7060886 U JP 7060886U JP H0416430 Y2 JPH0416430 Y2 JP H0416430Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- opening
- plate
- closed
- pressing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 45
- 238000005530 etching Methods 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 20
- 239000007788 liquid Substances 0.000 description 5
- 239000002699 waste material Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000452 restraining effect Effects 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060886U JPH0416430Y2 (enrdf_load_html_response) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060886U JPH0416430Y2 (enrdf_load_html_response) | 1986-05-13 | 1986-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182546U JPS62182546U (enrdf_load_html_response) | 1987-11-19 |
| JPH0416430Y2 true JPH0416430Y2 (enrdf_load_html_response) | 1992-04-13 |
Family
ID=30912399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7060886U Expired JPH0416430Y2 (enrdf_load_html_response) | 1986-05-13 | 1986-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416430Y2 (enrdf_load_html_response) |
-
1986
- 1986-05-13 JP JP7060886U patent/JPH0416430Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62182546U (enrdf_load_html_response) | 1987-11-19 |