JPH04160093A - Shutter device for film forming device - Google Patents

Abstract

PURPOSE:To avert the damage of the function of a driving mechanism of a shutter plate which shuts off a material splashing direction by providing a guide plate to the shutter plate and adopting the constitution to guide the material sticking to the shutter plate to a flange surface which supports a shutter mechanism. CONSTITUTION:The shutter plate 5 which shuts off the material splashing direction is provided in the position facing the aperture face of a container 2 housing the material for forming films therein and further a shutter shaft 7 for freely openably and closably driving the shutter plate 5 is provided to constitute the shutter mechanism 4. Further, the guide plate 12 is provided on this shutter plate 5 to guide the material sticking to the shutter plate 5 to the surface of the flange 10 supporting the shutter mechanism 4. This shutter device is adequately used for a molecular beam epitaxial device, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) This invention is applicable to, for example, a molecular beam epitaxial device
This invention relates to a shutter device used in a film forming apparatus such as E apparatus).

(Prior Art) As is well known, this type of film forming apparatus stores a film forming material such as gallium in a container like a crucible, heats this material to emit molecular beams, The structure is such that a film is thereby formed on the surface of the substrate.

FIG. 5 shows its conventional configuration, in which 1 is a container, 2 is a material stored in this container, and 3 is a vacuum chamber. By heating the container 1, the material 2 is evaporated and scattered and deposited onto the substrate.

A shutter device 4 includes a shutter plate 5 facing the opening surface of the container 1, a shutter shaft 7 connected to the shutter plate 5 via a joint 6, and a shutter shaft 7 configured to open and close the opening surface of the container 1. It is composed of a drive mechanism 8 for driving.

The drive mechanism 8 shown in the figure is constituted by a bellows 9 that is connected to the shutter shaft 7 and drives it.

10 is a flange for attaching the bellows 9 to the vacuum chamber 3, and 11 is a driver for driving the bellows 9.

By driving the bellows 9, the shutter shaft 7 is driven in the direction of the arrow, thereby causing the shutter plate 5 to
The scattering path P of the material 2 is opened and closed.

(Problem to be Solved by the Invention) By the way, in such a film forming apparatus, when the shutter plate 5 is closed while the container 1 is heated, the surface of the shutter plate 5 facing the opening surface of the container 1 is The evaporated material 2 adheres.

The material 2 deposited in this manner adversely affects the drive mechanism 8 by further flowing down. Specifically, if the adhered material 2 is transmitted along the shutter shaft 7 and adheres to the bellows 9, the movement of the bellows 9 will deteriorate when this solidifies.

Further, in a configuration in which the shutter shaft 7 is supported by a bearing or the like, the movement of the shutter shaft 7 becomes difficult due to solidification of the material 2 attached to the bearing. In either case, the opening/closing operation of the shutter plate 5 is hindered, and the required film forming operation is impaired.

The object of the present invention is to prevent the opening and closing operations of the shutter plate from being impaired by material adhering to the shutter plate.

(Means for Solving the Problems) This invention provides a guide plate that guides the material attached to the shutter plate constituting the shutter mechanism to the surface of the flange that supports the shutter mechanism without directing the material attached to the shutter plate toward the shutter axis. It is characterized by having the following.

Further, the present invention is characterized in that a guide plate is provided on the shutter shaft.

Further, the present invention is characterized in that a port is provided for removing the material that has been guided to the flange and accumulated therefrom, and that this port is provided with a discharge hole that can be vacuum-filled.

(Function) Since the guide plate is provided on the shutter plate or its shutter shaft, even if material attached to the shutter plate flows down, it is prevented from flowing into the drive mechanism from the shutter shaft. This ensures that the operation of the drive mechanism is not hindered in any way.

Material that has left the drive mechanism and flowed down to the flange is
It is appropriately discharged to the outside from the discharge hole through the port provided here. This eliminates the need to remove the shutter mechanism or drive mechanism to remove accumulated material.

(Example) An example of the present invention will be described with reference to the drawings. Note that parts with the same reference numerals as in FIG. 5 indicate the same or corresponding parts. According to the present invention, as shown in FIGS. 1 and 2,
A guide plate 12 is provided on the surface of the shutter plate 5 facing the opening surface of the container 1. Guide plate 12 in this example
It is shaped like a triangular roof.

In addition, at the point where the shutter shaft 7 of the flange 10 passes through,
A material reservoir 13 is formed. A cylinder 14 is installed in the material reservoir 13 so as to surround the shutter shaft 7.

The material attached to the shutter plate 5 flows down along its surface, but due to the guide plate 12, the material adheres to the shutter shaft 7.
It flows down along the guide plate 12 without heading towards the.

This prevents material from flowing along the shutter axis 7 into the drive mechanism 8. The material flowing down along the guide plate 12 is transferred to the material reservoir 1.
It is stored in 3.

In the embodiment shown in FIG. 3, the guide plate 12 is connected to the shutter shaft 7.
This is an example where it is installed. In this example, the guide plate is shaped like an umbrella, and the shutter shaft 7 passes through the center of the guide plate.

In this configuration, the material attached to the shutter plate 5 flows down along the shutter shaft 7, but is blocked by the guide plate 12 on the way, and thereafter flows down along the guide plate. This prevents it from flowing into the drive mechanism 8.
The material is stored in the material reservoir 13.

The material stored in the material reservoir 13 is transferred to the cylinder 14
surrounds the shutter shaft 7, so that it is prevented from flowing into the bellows 9 through the shutter shaft through hole of the flange 10.

A configuration for removing material accumulated in the material reservoir 13 is shown in FIG. In this configuration, material reservoir 1
A boat 15 is attached to the boat 3, and a flange 17 at the tip thereof is provided with a flange 16 that can be opened and closed and is capable of vacuum sealing.

When removing the material accumulated in the material reservoir 13, the lid 16 may be opened and the material may be extracted from there via the boat 15. According to this, the material can be removed without removing the drive mechanism 8, shutter mechanism 4, etc. from the vacuum chamber 3. If the lid 16 is closed after removal, the vacuum in the vacuum chamber 3 will be reduced.

It won't leak from here.

Note that when removing this material, if the material has cooled and solidified, it is sufficient to heat the material reservoir 13 from the outside to liquefy the material before extracting it.

Although each of the above embodiments has been explained regarding an elevating type shutter mechanism, the present invention is not limited to a shutter mechanism having such a configuration, and may be applied to other configurations,
For example, it goes without saying that it can also be applied to a rotating structure or a raised roof structure.

(Effects of the Invention) As detailed above, according to the present invention, it is possible to avoid damage to the function of the drive mechanism of the shutter plate due to material adhering to the shutter plate, and to easily remove the material that has come off the drive mechanism and accumulated. It has the effect of being able to remove it.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing an embodiment of the present invention, Fig. 2 is a partial perspective view, Fig. 3 is a sectional view showing another embodiment of the invention, and Fig. 4 is a removal of material in the material reservoir. A sectional view showing the mechanism, and FIG. 5 is a sectional view showing a conventional example.

Claims (3)

[Claims] (1) A shutter plate is provided at a position facing the opening surface of a container in which a film-forming material is stored, and blocks the direction of scattering of the material, and a shutter shaft that drives the shutter plate to freely open and close the shutter plate. In a film forming shutter device comprising a shutter mechanism and a drive mechanism for driving the shutter shaft, the shutter plate includes a guide plate that guides material attached to the shutter plate to a surface of a flange that supports the shutter mechanism. A shutter device for a film forming apparatus. (2) A shutter plate that is located opposite the opening surface of a container containing a film-forming material therein and blocks the direction of scattering of the material, and a shutter shaft that drives the shutter plate to freely open and close the shutter plate. In a film forming shutter device comprising a shutter mechanism and a drive mechanism for driving the shutter shaft, the shutter shaft includes a guide for guiding material attached to the shutter plate to a surface of a flange supporting the shutter mechanism. A shutter device for a film forming apparatus that is provided with a plate. (3) Remove the material that has accumulated after being guided to the flange.
3. The shutter device for a film forming apparatus according to claim 1, further comprising a port for pulling out from the flange, and a discharge hole that can be sealed in a vacuum in the port.