JPH04154968A - Coiling type vacuum vapor deposition device - Google Patents

Abstract

PURPOSE:To allow the execution of brine feeding with single circulating pump by providing an automatic control valve which changes over the operations of a cooler and heater connected in parallel in the brine feed path provided in a cold and hot medium unit. CONSTITUTION:The brine feed path of a closed type is provided in the cold and hot medium unit for cooling or heating a film-like base material for vapor deposition. The inverter system cooler 6 and line heater 10 for cooling and heating the brine are respectively connected in parallel therein. The automatic control valves HV, CV for changing over the heating and cooling operations are respectively provided on the inflow side of the heater 10 and the cooler 6. The cooler 6 is operated and the valve CV is released and the circulating pump 11 is operated in the case of cooling of the base material. The brine in the feed path is sent through the valve CV by the pump 11 to a refrigerant cooler 7 of the cooler 6 and is supplied through a flow switch FS and a medium supply port 12 by a pipeline 5 to the roller for cooling the base material. The heating operation is executed in the same manner by the pump 11 even in the case of heating.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a roll-up vacuum vapor deposition apparatus equipped with a cold/hot medium unit that cools or heats a film-like substrate to be vapor-deposited.

[Prior Art] This type of roll-up vacuum evaporation apparatus is equipped with a cold/hot medium unit that cools and heats a film-like substrate to be vapor-deposited. As shown in the figure, it consists of a refrigerant tank A, a brine cooler B that cools the refrigerant in the refrigerant tank A, a hot medium tank C, and a heater D that heats the hot medium in the hot medium tank C. As shown in FIG. 5, the cooling and heating of the film-like base material to be processed is switched by a valve, and the liquid is fed by a liquid feeding pump. Further, the liquid levels in the refrigerant tank A and the hot medium tank C are controlled by switching valves using a liquid level gauge and a timer.

The operation of such a refrigerating/heating medium unit will be explained with reference to FIG.
VI 5CV2 is opened and refrigerant tank A is pumped by pump P2.
From there, brine is sent through pump P2 and valve CVI, and after cooling the film-like substrate to be deposited, the brine returns to refrigerant tank A through valve CV2. In this case, the brine cooler B is operated while repeatedly being turned on and off at a set temperature, and the brine in the refrigerant tank A is cooled by the pump P1.

On the other hand, when heating a film to be deposited or a mucous substrate, the valve H
VI 5llV2 is opened, brine is sent from the temperature medium tank C by pump P3 through pump P3 and valve IIVI, and after heating the film-like substrate to be deposited, the brine passes through valve 1IV2 and is transferred to Return to tank C. In this case, the brine is heated to a set temperature by repeatedly turning heater D on and off.

To switch between cooling and heating, use valves IVVI and IIV2.
The switching timing of the valves CVI and CV2 is controlled by a timer to prevent the refrigerant tank A and the hot medium tank C from overflowing.

Also, during heating and cooling operations, either pump P2 or P3, Nihalbu IIVL, IIV2 and valve cvt
, cv2 are respectively activated,
The brine cooler B1 heater D and pump PL are always operated at a set temperature.

[Problems to be Solved by the Invention] By the way, the refrigerant/heating medium unit of the conventional roll-type vacuum evaporation apparatus has many components such as various types of refrigerant/heating medium, a brine liquid feeding pump, a circulation pump, and attached valve piping. It was inevitable that the volume would increase. As a result, the volumes of the refrigerating medium tank and each pipe become large, which poses a problem in that not only does the amount of brine used increase, but the cooling and heating time at the start of operation becomes longer.

In addition, because the refrigerant/heating medium unit is large, it cannot be mounted on the moving trolley of the vapor deposition device, and it is necessary to supply the film cooling roller Hebrain in the vapor deposition device via a pipeline that is 10 to 15 meters long. , Heat loss cannot be avoided even if the pipeline is carefully insulated, and since a circulation pump is used in the brine cooler, the heat generated by the circulation pump also causes heat loss in the brine cooler, and as a result, There was also a problem that the cooling characteristics of the film-like substrate to be vapor-deposited were not stable.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a winding type vacuum evaporation deposition apparatus which solves these problems in the conventional apparatus and has a simple structure, a small size, quick start-up of operation, and stable operation characteristics. .

[Means for Solving the Problems] In order to achieve the above object, the roll-up vacuum evaporation apparatus according to the present invention includes a closed type brine liquid feeding path in the refrigerant/heating medium unit, and a closed type brine liquid feeding path in the brine liquid feeding path. An inverter-type brine cooler for cooling the brine and a heater for heating the brine are connected in parallel, and automatic operation valves for switching between heating and cooling operations are installed on the inlet sides of the brine cooler and brine heater, respectively, and the brine is fed. It is characterized by a structure in which the liquid is circulated by one circulation pump.

[Function] In the winding type vacuum evaporation apparatus according to the present invention configured as described above, by providing a closed type brine liquid feeding path in the cold/temperature/medium unit, heating and cooling operations can be carried out by one liquid feeding pump. Moreover, the refrigerating/heating medium unit can be made smaller, and as a result, the installation area can be reduced and the weight can be reduced.

In addition, an inverter-type brine cooler to cool the brine and a heater to heat the brine are installed in the closed-type brine feed path, so the overall length of the brine feed path can be shortened. The amount of brine used can be reduced, and as a result cooling and heating times at the start of operation can be relatively short, while substantial heat loss during the process can be avoided and stable cooling characteristics can be maintained. .

[Embodiments] Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 and 2 of the accompanying drawings.

FIG. 1 schematically shows the overall configuration of the main parts of an embodiment of the present invention, in which 1 is a refrigerating/heating medium unit;
is mounted on a moving carriage 2, and a cooling roller 4, which is incorporated into a vacuum deposition apparatus, is attached to a base plate 3 provided on the moving carriage 2. A relatively short pipeline 5 connects the refrigerating/heating medium unit 1 and the cooling roller 4.

FIG. 2 schematically shows the configuration of the refrigerating/heating medium unit 1 shown in FIG. It is cooled by a cooling system including machine 8.

Further, 9 is an expansion l, 10 is a line heater, that is, a medium heater, 11 is a circulation pump, 12 is a medium supply port, and 13
are medium return ports, and these ports 12, 13 are communicated via the pipeline 5 shown in FIG. 1 with the interior of the cooling roller 4 installed in the vacuum deposition apparatus.

These components are connected as shown,
That is, from the medium return port 13 via the circulation pump 11, the medium cooler 7 and the medium heater 10 are connected in parallel.
A closed-type brine liquid feeding path is formed which passes through each of the media and connects to the medium supply port 12 via the flow switch FS.

The expansion tank 9 is connected between the outflow side of the medium cooler 7 and the medium heater 10 and the inflow side of the circulation pump 11, and the medium return port 13 and the expansion tank 9 are connected through a pipe line 14. ing.

Between circulation pump ll and medium cooler 7 and circulation pump 1
An automatic operating valve Cv1HV is provided between each of the medium heaters 1 and 1 and the medium heater IO.

Further, a low temperature side temperature indicating regulator T1 and a high temperature side temperature indicating regulator T2 are provided on the outflow sides of the medium cooler 7 and the medium heater 10, respectively.

In addition, in FIG. 2, V1 to V13 are manual valves, RV is a pressure reducing valve of the nitrogen gas supply system to the expansion tank 9, and P is a circulation pump 1.
The pressure gauges AV and ~AV3 connected to the outflow side of (2) are automatic air vent valves connected to the inflow side of the expansion tank 9, respectively. A valve W■, a dryer DR, a sight glass SG, a blocking valve Pv1, a solenoid valve Sv2, an expansion valve EV, and a suction pressure regulating valve RV are provided as shown in the figure, and furthermore, a temperature sensor TS is provided on the medium return port 13 side. ing.

In the operation of the illustrated apparatus configured as described above, first, a case will be described in which a refrigerant is supplied to the cooling roller 4 in order to cool the film substrate to be deposited.The brine cooler 6 is operated, the automatic operation valve Cv is opened, and Circulation pump 11 is activated. As a result, the brine in the closed type brine liquid feeding path is passed through the automatic operation valve Cv by the circulation pump 11 to the medium cooler 7 in the brine cooler 6.
, where it is cooled to a set temperature, and from there it becomes a refrigerant, passes through the flow switch FS, passes through the medium supply port 12, and is sent to the cooling roller 4 by the pipeline 5.
supplied to

Furthermore, when heating the film substrate to be deposited, the automatic operation valve Cv in the brine cooler 6 is closed, and the automatic operation valve 11V for the medium heater IO is opened. As a result, the brine in the closed type brine feed path is sent to the medium heater 10 by the circulation pump II through the automatic operation valve +1V, where it is heated to the set temperature, and from there it becomes a hot medium and is transferred to the flow switch PS. through,
The medium is supplied to the cooling roller 4 via the pipeline 5 through the medium supply port 12, and a heating operation is performed.

Brine in this cooling and heating operation cycle = 8
- Expansion and contraction of the brine in the liquid feeding path is absorbed by the expansion tank 9.

In addition, the brine cooler 6 in the cooling and heating operation cycle
The cooling and heating temperatures of the brine by the medium cooler 7 and the medium heater 10 can be set and adjusted by the low temperature indication regulator TI and the high temperature indication regulator T2.

[Effects of the Invention] As explained above, in the winding type vacuum evaporation apparatus according to the present invention, a closed type brine liquid feeding path is provided in the refrigerant/heating medium unit, and the brine is cooled in this brine liquid feeding path. An inverter-type brine cooler and a heater for heating the brine are installed, and heating and cooling operations are performed by a single circulation pump, which reduces the length and scale of the liquid supply path and reduces the amount of brine used. The quantity is small, and the refrigerating/heating medium unit can be made smaller.As a result, it can be mounted on the moving trolley of the evaporation equipment, and the pipeline to the cooling roller for the film to be evaporated is shortened.
Heat loss can be reduced. Furthermore, since the brine cooler is of an inverter type, temperature hunting is small and stable cooling characteristics can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing the overall configuration of an embodiment of the present invention;
Fig. 2 is a schematic diagram showing the configuration of the refrigerating/heating medium uni-soto of the apparatus shown in Fig. 1, Fig. 3 is a schematic front view showing the refrigerating/heating medium unit of the vacuum evaporation apparatus according to the prior art, and Fig. 4 is the figure 3. FIG. 5 is a schematic diagram showing the configuration of the refrigerant/heating medium unit shown in FIG. 3. Figure Middle 1: Refrigerant/hot medium unit 2: Mobile trolley 3: Base plate 4: Cooling roller 5: Pipeline 6: Inverter type brine cooler 7: Medium cooler 8: Freezer 9: Expansion tank 10 Line heater (medium heater) ll :Circulation pump 12:Medium supply port 13:Medium return port 14:Pipeline FS:Flow switch C■2 automatic operation valve■v:Automatic operation valve Tl:Low temperature side temperature indication regulator T2:High temperature side temperature indication regulator

Claims (1)

[Claims] 1. In a roll-up vacuum evaporation device equipped with a cold/hot medium unit that cools or heats the film-like substrate to be vapor-deposited, the cold/hot medium unit is provided with a closed-type brine liquid feeding path, and the brine is cooled in this brine liquid feeding path. An inverter-type brine cooler for heating the brine and a heater for heating the brine are connected in parallel, and automatic operation valves for switching between heating and cooling operations are installed on the inlet sides of the brine cooler and brine heater, respectively, to allow the brine to be fed at once. A roll-up vacuum evaporation apparatus characterized by being configured to use two circulation pumps.