JP2916237B2 - Winding type vacuum evaporation system - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roll-to-roll vacuum evaporation apparatus provided with a cooling / heating medium unit for cooling or heating a film-like substrate to be evaporated.

2. Description of the Related Art A roll-up type vacuum evaporation apparatus of this type includes a cooling / heating medium unit for cooling and heating a film-like base material to be evaporated. The cooling / heating medium unit is, for example, shown in FIGS. 3 to 5 in the accompanying drawings. As shown in FIG. 1, the cooling tank A includes a cooling tank B for cooling the cooling medium in the cooling tank A, a heating medium tank C, and a heater D for heating the heating medium in the heating medium tank C. As shown in FIG. 5, the cooling and heating of the film-shaped base material are switched by a valve, and the liquid is supplied by a liquid supply pump. The liquid levels in the refrigerant tank A and the heating medium tank C are controlled by switching valves with a liquid level gauge and a timer.

The operation of such a cooling / heating medium unit will be described with reference to FIG.
CV1 and CV2 are opened, brine is sent from the coolant tank A by the pump P2 via the pump P2 and the valve CV1, and the brine cools the film-like base material to be evaporated, and then the coolant passes through the valve CV2 and then cools. Return to A. In this case, the brine cooler B is operated while being repeatedly turned on and off with respect to the set temperature, and the brine in the refrigerant tank A is cooled by the pump P1.

On the other hand, the valve HV
1, HV2 is opened and pump P3 pumps out of heating medium tank C
The brine is sent through P3 and the valve HV1, and the brine heats the film-form base material and returns to the heating medium tank C through the valve HV2. In this case, the brine is heated by the repeated operation of turning on and off the heater D with respect to the set temperature.

Switching between cooling and heating can be performed with valves HV1, HV2 and valve CV
1. The operation timing of the switching of CV2 is controlled by a timer so that the refrigerant tank A and the heating medium tank C do not overflow.

During the heating and cooling operations, one of the pumps P2 and P3 and one of the valves HV1 and HV2 and the valves CV1 and CV2 are operated. Is always driving.

[Problems to be Solved by the Invention] By the way, the cooling and heating medium unit of the conventional roll-to-roll vacuum evaporation apparatus has many components such as a cooling and heating medium tank, a brine feed pump, a circulation pump, and an attached valve pipe. It was not able to bloom to increase the volume. Therefore, there has been a problem that the volume of the cooling / heating medium tank and each pipe is increased, the amount of brine used is increased, and the cooling and heating time at the start of operation is prolonged.

In addition, since the cooling / heating medium unit is large, it cannot be mounted on the moving carriage of the vapor deposition apparatus, and it is necessary to supply brine to the film cooling roller in the vapor deposition apparatus via a 10 to 15 m long pipeline separately. However, heat loss is unavoidable even if insulation measures are carefully applied to the pipeline, and since the circulating pump is used for the Brinecoula, the heat of the circulating pump also causes heat loss of the Brinecoula, and as a result, There is also a problem that the cooling characteristics of the film-form substrate to be deposited are not stable.

Accordingly, an object of the present invention is to provide a roll-to-roll vacuum evaporation apparatus having a simple structure, a small size, a fast start-up, and stable operation characteristics by solving such problems in the conventional apparatus.

[Means for Solving the Problems] In order to achieve the above object, a roll-to-roll vacuum evaporation apparatus according to the present invention includes a roll-to-roll medium provided with a cooling / heating medium unit for cooling or heating a film-like substrate to be deposited. In a vacuum evaporation apparatus, a closed-type brine liquid feed path is provided in a cooling / heating medium unit, and an inverter type brine cooler for cooling the brine and a heater for heating the brine are connected in parallel in the brine liquid feed path. In addition, automatic operation valves for switching between heating and cooling operation are provided on the inflow side of the brine cooler and the brine heater, respectively, and when cooling the brine, the automatic operation valves on the inflow side of the brine cooler are opened,
When the brine is heated, the automatic operation valve on the brine heater inflow side is opened, and the heating and cooling operations of the brine are performed by one circulation pump.

[Operation] In the winding vacuum vapor deposition apparatus according to the present invention configured as described above, the heating and cooling operations are performed by one liquid supply pump by providing the closed-type brine liquid supply path in the cooling / heating medium unit. In addition, the cooling / heating medium unit can be reduced in size, so that the installation area and the weight can be reduced.

In addition, since the closed type brine liquid feed path is provided with an inverter type brine cooler for cooling the brine and a heater for heating the brine, the entire length of the brine liquid feed path can be shortened, thereby The amount of brine used can be reduced, resulting in cooling during start-up,
The heating time can be relatively short, and substantial heat loss in the middle can be avoided, and stable cooling characteristics can be maintained.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 and 2 of the accompanying drawings.

FIG. 1 schematically shows the entire configuration of a main part of an embodiment of the present invention, wherein 1 is a cooling / heating medium unit, and this cooling / heating medium unit 1 is mounted on a moving carriage 2 and provided on the moving carriage 2. A cooling roller 4 incorporated in a vacuum evaporation apparatus is attached to the base plate 3. The cooling / heating medium unit 1 and the cooling roller 4 are connected by a relatively short pipeline 5.

FIG. 2 schematically shows the structure of the heating medium unit 1 shown in FIG. 1, wherein reference numeral 6 denotes an inverter-type blind cooler, which has a medium cooler 7, and a medium cooler 7 It is cooled by a cooling system including the machine 8.

Also, 9 is an expansion tank, 10 is a line heater or medium heater, 11 is a circulation pump, 12 is a medium supply port, 13 is a medium return port, and these ports 12 and 13 are the pipeline 5 shown in FIG. Through the cooling roller 4 incorporated in the vacuum evaporation apparatus.

These components are respectively connected as shown, i.e. from the medium return port 13 via the circulation pump 11, through the medium cooler 7 and the medium heater 10 provided in parallel, respectively, and via the flow switch FS. Thus, a closed-type brine liquid supply path communicating with the medium supply port 12 is formed. The expansion tank 9 is connected between the outflow side of the refrigerant cooler 7 and the medium heater 10 and the inflow side of the circulation amplifier 11, and the medium return port 13 communicates with the expansion tank 9 through a pipe 14. ing.

Automatic operation valves CV and HV are provided between the circulation pump 11 and the medium cooler 7 and between the circulation pump 11 and the medium heater 10, respectively.

Further, a low-temperature-side temperature instruction adjuster T1 and a high-temperature-side temperature instruction adjuster T2 are provided on the outlet side of the medium cooler 7 and the medium heater 10, respectively.

Incidentally, V ₁ ~V ₁₃ is manual valve in Figure 2, RV nitrogen gas supply system of the pressure reducing valve to the expansion tank 9, P is a pressure gauge AV ₁ ~AV ₃ which is connected to the outflow side of the circulation pump 11 Automatic air bleeding valves connected to the inflow side of the expansion tank 9 respectively. The cooling system for the medium cooler 7 in the brine cooler 6 includes a water control valve WV, a dryer DR, a side glass SG, a check valve PV, and a solenoid valve. An SV, an expansion valve EV, and a suction pressure adjusting valve RV are provided as shown in the figure, and a temperature sensor TS is provided on the medium return port 13 side.

In the operation of the illustrated apparatus configured as described above, first, a case where a refrigerant is supplied to the cooling roller 4 to cool the film-shaped base material to be deposited will be described.
Is operated, the automatic operation valve CV is opened, and the circulation pump 11 is operated. As a result, the brine in the closed-type brine feed passage is automatically operated by the circulation pump 11
Through the CV, it is fed into the medium cooler 7 in the bunk cooler 6, where it is cooled to a set temperature, from which it becomes a refrigerant, passes through the flow switch FS, through the medium supply port 12 and through the pipeline 5 to the cooling roller 4 Supplied.

Further, when heating the film-form base material to be vapor-deposited, the automatic operation valve CV of the brightener 6 is closed, and the automatic operation valve HV for the medium heater 10 is opened. As a result, the brine in the closed-type brine liquid feed path is sent by the circulation pump 11 to the medium heater 10 through the automatic operation valve HV, where it is heated to the set temperature, and from there it becomes a heating medium and becomes a flow switch FS. Through the media supply port
After being supplied to the cooling roller 4 by the pipeline 5 through the 12, the heating operation is performed.

The expansion and contraction of the brine in the brine supply path in this cooling and heating operation cycle are absorbed by the expansion tank 9.

Further, the cooling and heating temperatures of the brine by the medium cooler 7 and the medium heater 10 of the brine cooler 6 in the cooling and heating operation cycle are set and adjusted by the low temperature side temperature instruction adjuster T1 and the high temperature side temperature instruction adjuster T2. obtain.

[Effects of the Invention] As described above, in the roll-to-roll vacuum evaporation apparatus according to the present invention, the cooling / heating medium unit is provided with a closed-type brine liquid supply path, and the brine is cooled in the brine liquid supply path. Inverter-type blind cooler and a heater for heating the brine are provided, and the heating and cooling operations are performed by a single circulation pump. The amount is small and the cooling / heating medium unit can be downsized.
It can be mounted on a moving carriage of the vapor deposition apparatus, and accordingly, the pipeline from the film to be vapor-deposited to the cooling roller is shortened, and heat loss can be reduced. Further, since the blind cooler is of the inverter type, temperature hunting is small and stable cooling characteristics can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing the overall configuration of an embodiment of the present invention,
2 is a schematic diagram showing the configuration of a cooling / heating medium unit of the apparatus shown in FIG. 1, FIG. 3 is a schematic front view showing a cooling / heating medium unit of a conventional vacuum evaporation apparatus, and FIG. 4 is a part of FIG. FIG. 5 is a schematic diagram showing the configuration of the cooling / heating medium unit of FIG. In the figure, 1: Cooling / heating medium unit 2: Moving carriage 3: Base plate 4: Cooling roller 5: Pipeline 6: Inverter-type blind cooler 7: Medium cooler 8: Refrigerator 9: Expansion tank 10: Line heater (medium heater) 11: Circulation pump 12: Medium supply port 13: Medium return port 14: Pipe line FS: Flow switch CV: Automatically operated valve HV: Automatically operated valve T1: Low temperature side temperature controller T2: High temperature side temperature controller

Continuation of front page (56) References JP-A-1-95271 (JP, A) JP-A-1-95270 (JP, A) JP-A-1-95269 (JP, A) JP-A-3-5685 (JP) , A) JP-B-61-34511 (JP, B2) (58) Fields investigated (Int. Cl. ⁶ , DB name) C23C 14/00-14/58 F25D 17/02

Claims (1)

(57) [Claims] 1. A roll-to-roll vacuum evaporation apparatus provided with a cooling / heating medium unit for cooling or heating a film-like substrate to be deposited, wherein the cooling / heating medium unit is provided with a closed type brine feeding path. An inverter type brine cooler for cooling brine and a heater for heating brine are connected in parallel, and automatic operation valves for switching heating and cooling operations are provided on the inflow side of the brine cooler and the brine heater, respectively. When cooling the brine, the automatic operation valve on the inflow side of the brine cooler opens, and when heating the brine, the automatic operation valve on the inflow side of the brine heater opens, and the heating and cooling operation of the brine is performed by one circulation pump. A roll-to-roll vacuum evaporation apparatus, characterized in that the apparatus is configured to perform the operation.