JPH0415228U - - Google Patents
Info
- Publication number
- JPH0415228U JPH0415228U JP5499590U JP5499590U JPH0415228U JP H0415228 U JPH0415228 U JP H0415228U JP 5499590 U JP5499590 U JP 5499590U JP 5499590 U JP5499590 U JP 5499590U JP H0415228 U JPH0415228 U JP H0415228U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pins
- charged beam
- support
- tip end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000012212 insulator Substances 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5499590U JPH0415228U (enrdf_load_stackoverflow) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5499590U JPH0415228U (enrdf_load_stackoverflow) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415228U true JPH0415228U (enrdf_load_stackoverflow) | 1992-02-06 |
Family
ID=31577557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5499590U Pending JPH0415228U (enrdf_load_stackoverflow) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415228U (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213023A (ja) * | 1984-04-09 | 1985-10-25 | Fujitsu Ltd | 半導体基板の露光方法 |
| JPH0357211A (ja) * | 1989-07-25 | 1991-03-12 | Nec Corp | 電子ビーム描画装置用試料ホルダー |
-
1990
- 1990-05-25 JP JP5499590U patent/JPH0415228U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213023A (ja) * | 1984-04-09 | 1985-10-25 | Fujitsu Ltd | 半導体基板の露光方法 |
| JPH0357211A (ja) * | 1989-07-25 | 1991-03-12 | Nec Corp | 電子ビーム描画装置用試料ホルダー |
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