JPH04145693A - Slurry manufacture of multilayer wiring board - Google Patents

Slurry manufacture of multilayer wiring board

Info

Publication number
JPH04145693A
JPH04145693A JP2269783A JP26978390A JPH04145693A JP H04145693 A JPH04145693 A JP H04145693A JP 2269783 A JP2269783 A JP 2269783A JP 26978390 A JP26978390 A JP 26978390A JP H04145693 A JPH04145693 A JP H04145693A
Authority
JP
Japan
Prior art keywords
binder
inorganic powder
solution
slurry
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2269783A
Other languages
Japanese (ja)
Inventor
Hiroyuki Hamaguchi
博幸 濱口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2269783A priority Critical patent/JPH04145693A/en
Publication of JPH04145693A publication Critical patent/JPH04145693A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Preparation Of Clay, And Manufacture Of Mixtures Containing Clay Or Cement (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To dissolve a binder completely and equalize the dispersion of inorganic fine particles by dissolving the binder in a solvent so as to produce a binder solution and mixing the solution with an inorganic fine particle dispersion liquid and kneading them. CONSTITUTION:An organic solvent is added to a binder where they are mixed wit a mixer for specified time so as to dissolve the binder completely. Then, an organic solvent is added to inorganic fine particles and mixed and dispersed for specified time so that an inorganic fine particle dispersion solution may be obtained. The binder solution is mixed and kneaded with this dispersion solution so as to obtain slurry. This process makes it possible to dissolve the binder completely and equalize the dispersion of inorganic fine particles.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、複数のグリーンシートを積層したのちに一括
焼成するグリーンシート多層配線基板の製造方法に関し
、特にスラリーを製造する方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a green sheet multilayer wiring board in which a plurality of green sheets are laminated and then fired all at once, and particularly relates to a method for manufacturing a slurry.

〔従来の技術〕[Conventional technology]

従来、この種の多層配線基板のスラリー製造方法は第2
図のフローチャートで示すように、まず原料の無機粉末
に溶剤を加え混合をおこなって、溶剤中に無機粉末を十
分分散させた後、バインダーを加え、さらに混合機によ
ってバインダーが溶剤に完全に溶けた状態になるように
混合・混線を行なっていた。
Conventionally, the slurry manufacturing method for this type of multilayer wiring board is the second method.
As shown in the flowchart in the figure, first, a solvent is added to the raw inorganic powder and mixed. After the inorganic powder is sufficiently dispersed in the solvent, a binder is added, and a mixer is used to completely dissolve the binder in the solvent. They were mixing and cross-talking to achieve the desired condition.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

溶剤中に無機粉末を分散させると分散溶液は不透明な乳
白色となる。また、バインダーが完全に溶剤に溶解する
と溶液は透明となる。つまり、バインダーが溶解したか
どうか溶液の透明度によって判断することができる。
When an inorganic powder is dispersed in a solvent, the dispersion becomes opaque and milky white. Furthermore, when the binder is completely dissolved in the solvent, the solution becomes transparent. In other words, whether the binder has dissolved or not can be determined based on the transparency of the solution.

上述した従来のスラリー製造方法によれば、無機粉末を
分散させた不透明な溶剤中にバインダー/ぐ を加え溶解させるため、Iインダーが完全溶解したかど
うか判断する事が困難である。また、バインダーを溶解
させるために長時間に渡って混合・混線を行うため無機
粉末の凝集が起こり初期の粉末特性、特に粒度分布が変
化してしまいグリーンシートと作成が困難になる等の問
題点があった。
According to the conventional slurry manufacturing method described above, since the binder/glue is added and dissolved in an opaque solvent in which inorganic powder is dispersed, it is difficult to judge whether or not the I-inder is completely dissolved. In addition, since mixing and cross-fertilization are carried out for a long time to dissolve the binder, the inorganic powder aggregates, which changes the initial powder properties, especially the particle size distribution, making it difficult to create green sheets. was there.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の多層配線基板のスラリー製造方法は、複数のグ
リーンシートを積層したのちに一括焼成するグリーンシ
ート多層配線基板のスラリー製造工程に於て、バインダ
ーを溶剤に溶解させバインダー溶液を作る第1の工程と
、無機粉末と溶剤を混合し無機粉末分散液を製造する第
2の工程と、前記バインダー溶液と無機粉末分散液を混
合・混練する第3の工程とを有している。
The slurry manufacturing method for a multilayer wiring board according to the present invention includes a step of manufacturing slurry for a green sheet multilayer wiring board in which a plurality of green sheets are laminated and then fired all at once, in which a binder is dissolved in a solvent to form a binder solution. a second step of mixing an inorganic powder and a solvent to produce an inorganic powder dispersion, and a third step of mixing and kneading the binder solution and the inorganic powder dispersion.

〔実施例〕〔Example〕

次に、本発明について図面を参照して説明する6 第1図は本発明の一実施例を示すフローチャートである
Next, the present invention will be explained with reference to the drawings.6 Figure 1 is a flowchart showing one embodiment of the present invention.

まず、混合機であるホモジナイザーにバインダー100
gに対して400m1の有機溶剤(本実施例ではエチル
セルソルブを使用した)を加え、8000rpmで30
分間混合し完全にバインダーが溶解したのを確認しバイ
ンダー溶液を得た。
First, add 100 binders to a homogenizer, which is a mixer.
Add 400 ml of an organic solvent (ethyl cellosolve was used in this example) per g, and stir at 8000 rpm for 30
After mixing for a minute and confirming that the binder was completely dissolved, a binder solution was obtained.

次に、他のホー4イザーに無機粉末900gに対して有
機溶剤500m1を加え15000rpmで210分間
混合・分散させ無機粉末分散溶液を得た。次に、バイン
ダー溶液と無機粉末分散溶液を混合しさらにホモジナイ
ザーにて8000rpmで30分間混合・混練をおこな
ってスラリーをえた。
Next, 500 ml of an organic solvent was added to 900 g of the inorganic powder in another hose, and the mixture was mixed and dispersed at 15,000 rpm for 210 minutes to obtain an inorganic powder dispersion solution. Next, the binder solution and the inorganic powder dispersion solution were mixed and further mixed and kneaded using a homogenizer at 8000 rpm for 30 minutes to obtain a slurry.

本スラリーは完全にバインダーが溶解しており無機粉末
の分散状態の良好なスラリーであり、グリーンシートを
作成しても膜厚が均一で良好なシートを得ることが出来
た。
In this slurry, the binder was completely dissolved and the inorganic powder was well dispersed, and even when a green sheet was made, it was possible to obtain a good sheet with a uniform thickness.

次に、従来のスラリー製造方法である第2図に示す従来
のフローチャートによって行った実験の結果を記す。
Next, the results of experiments conducted using the conventional flowchart shown in FIG. 2, which is a conventional slurry manufacturing method, will be described.

まず、混合機であるホモジナイザーに無機粉末900g
に対して有機溶剤を900m1を加え15000rpm
で210分間混合・分散を行った。そしてバインダー1
00gを加え、さらに8000rpmで60分間混合・
混練を行いスラリーを得た。バインダー溶解を調査する
ために本スラリーを顕微鏡によって調べたところ微小な
未溶バインダー粒を確認する事ができた。そして、バイ
ンダーが完全に溶解するまでさらに120分間の混合・
混練が必要であった。こうして合計180分間と混合・
混練を行ってバインダーが完全に溶解したスラリーを得
ることが出来たが、本スラリーは粉末の凝集による影響
と思われる粘度低下が発生し、グリーンシートを作成し
た際に良好なシートを得る事が困難であった。
First, add 900 g of inorganic powder to a homogenizer, which is a mixer.
Add 900ml of organic solvent to the
Mixing and dispersion were performed for 210 minutes. and binder 1
00g and mix for 60 minutes at 8000rpm.
Kneading was performed to obtain a slurry. When this slurry was examined under a microscope to investigate binder dissolution, minute undissolved binder grains were confirmed. Mix for an additional 120 minutes until the binder is completely dissolved.
Kneading was necessary. In this way, for a total of 180 minutes, mixing and
Although we were able to obtain a slurry in which the binder was completely dissolved by kneading, the viscosity of this slurry decreased, probably due to the agglomeration of the powder, and it was difficult to obtain a good green sheet when making it. It was difficult.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、多層配線基板のスラリー
製造工程をバインダーを溶剤に溶解させバインダーを製
造する第1の工程、無機粉末と溶剤を混合し無機粉末分
散液を製造する第2の工程、前記バインダー溶液と無機
粉末分散を混合・混練する第3の工程、以上3つの工程
から構成する事によってバインダーが溶剤に完全に溶け
て且つ無機粉末が均一に分散したスラリーを得ることが
できる。
As explained above, the present invention includes a slurry production process for a multilayer wiring board, including a first process of dissolving a binder in a solvent to produce a binder, and a second process of mixing an inorganic powder and a solvent to produce an inorganic powder dispersion. and a third step of mixing and kneading the binder solution and the inorganic powder dispersion.By comprising the above three steps, it is possible to obtain a slurry in which the binder is completely dissolved in the solvent and the inorganic powder is uniformly dispersed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示すフローチャートである
。第2図は従来の多層配線基板のスラリー製造方法を示
すフローチャートである。
FIG. 1 is a flowchart showing one embodiment of the present invention. FIG. 2 is a flowchart showing a conventional slurry manufacturing method for a multilayer wiring board.

Claims (1)

【特許請求の範囲】[Claims]  複数のグリーンシートを積層したのちに一括焼成する
グリーンシート多層配線基板のスラリー製造工程に於て
、バインダーを溶剤に溶解させバインダー溶液を作る第
1の工程と、無機粉末と溶剤を混合し無機粉末分散液を
製造する第2の工程と、前記バインダー溶液と無機粉末
分散液を混合・混練する第3の工程とを含むことを特徴
とする多層配線基板のスラリー製造方法。
In the slurry manufacturing process for green sheet multilayer wiring boards, in which multiple green sheets are laminated and then fired all at once, the first step is to dissolve the binder in a solvent to create a binder solution, and the second step is to mix inorganic powder and a solvent to create an inorganic powder. A method for producing slurry for a multilayer wiring board, comprising a second step of producing a dispersion, and a third step of mixing and kneading the binder solution and the inorganic powder dispersion.
JP2269783A 1990-10-08 1990-10-08 Slurry manufacture of multilayer wiring board Pending JPH04145693A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2269783A JPH04145693A (en) 1990-10-08 1990-10-08 Slurry manufacture of multilayer wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2269783A JPH04145693A (en) 1990-10-08 1990-10-08 Slurry manufacture of multilayer wiring board

Publications (1)

Publication Number Publication Date
JPH04145693A true JPH04145693A (en) 1992-05-19

Family

ID=17477097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2269783A Pending JPH04145693A (en) 1990-10-08 1990-10-08 Slurry manufacture of multilayer wiring board

Country Status (1)

Country Link
JP (1) JPH04145693A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007137741A (en) * 2005-11-22 2007-06-07 Matsushita Electric Ind Co Ltd Manufacturing method of ceramic slurry
WO2010113628A1 (en) * 2009-03-31 2010-10-07 積水化学工業株式会社 Method for producing slurry composition
WO2012043273A1 (en) * 2010-09-29 2012-04-05 積水化学工業株式会社 Method for producing slurry composition
JP2012072057A (en) * 2010-09-01 2012-04-12 Sekisui Chem Co Ltd Method for producing slurry composition
JP2012072056A (en) * 2010-08-31 2012-04-12 Sekisui Chem Co Ltd Method for producing slurry composition
JP2012092002A (en) * 2010-09-29 2012-05-17 Sekisui Chem Co Ltd Method for manufacturing slurry composition

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007137741A (en) * 2005-11-22 2007-06-07 Matsushita Electric Ind Co Ltd Manufacturing method of ceramic slurry
EP2415731A4 (en) * 2009-03-31 2012-07-25 Sekisui Chemical Co Ltd Method for producing slurry composition
EP2415731A1 (en) * 2009-03-31 2012-02-08 Sekisui Chemical Co., Ltd. Method for producing slurry composition
CN102361835A (en) * 2009-03-31 2012-02-22 积水化学工业株式会社 Method for producing slurry composition
JP4909435B2 (en) * 2009-03-31 2012-04-04 積水化学工業株式会社 Method for producing slurry composition
WO2010113628A1 (en) * 2009-03-31 2010-10-07 積水化学工業株式会社 Method for producing slurry composition
US9056801B2 (en) 2009-03-31 2015-06-16 Sekisui Chemical Co., Ltd. Method for producing slurry composition
TWI496831B (en) * 2009-03-31 2015-08-21 Sekisui Chemical Co Ltd A method for producing a slurry composition
JP2012072056A (en) * 2010-08-31 2012-04-12 Sekisui Chem Co Ltd Method for producing slurry composition
JP2012072057A (en) * 2010-09-01 2012-04-12 Sekisui Chem Co Ltd Method for producing slurry composition
WO2012043273A1 (en) * 2010-09-29 2012-04-05 積水化学工業株式会社 Method for producing slurry composition
JP2012092002A (en) * 2010-09-29 2012-05-17 Sekisui Chem Co Ltd Method for manufacturing slurry composition
US9023930B2 (en) 2010-09-29 2015-05-05 Sekisui Chemical Co., Ltd. Method for producing slurry composition

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